SMC Corporation of America
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XLFV, Aluminum High Vacuum Angle Valve, Normally Closed, O-ring Seal with Solenoid Valve

High vacuum angle valve series XL provides excellent thermal conductivity results in a uniform temperature for the entire valve body and a marked decrease in the condensation of gases inside the valve. The valve does not contain heavy metals such as Ni (nickel) or Cr (chrome) and a low sputtering yield also helps to minimize heavy metal contamination of semiconductor wafers.

  • Excellent thermal conductivity offers uniform temperature and decreased gas condensation inside valve
  • High corrosion resistance to fluorine gas
  • Minimal outgassing
  • Minimal contamination from heavy metals
  • Optional heaters
  • Optional position sensors
  • Optional oxalic acid anodizing for internals