High vacuum angle valve series XL provides excellent thermal conductivity results in a uniform temperature for the entire valve body and a marked decrease in the condensation of gases inside the valve. The valve does not contain heavy metals such as Ni (nickel) or Cr (chrome) and a low sputtering yield also helps to minimize heavy metal contamination of semiconductor wafers.
Operations Manual: XLF Series Doc. no.XL*-OMJ0003-D High Vacuum L Type Valve PRODUCT NAME XLF Series MODEL/ Series Thank you for purchasing this SMC product. Be sure to read this Operation Manual carefully and understand its contents before operating this product to ensure the safety of the operator and this product. Please refer to the drawing and other informative documents for the construction and specifications of
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Valve Type: XLFV (Normally Closed, O-ring Seal), Flange Size: 25, Flange Type: KF (NW), Valve Direction: K (w/o Indicator, Left Flange Surface; Std.
Valve Type: XLFV (Normally Closed, O-ring Seal), Flange Size: 40, Flange Type: KF (NW), Valve Direction: K (w/o Indicator, Left Flange Surface; Std.
Valve Type: XLFV (Normally Closed, O-ring Seal), Flange Size: 63, Flange Type: KF (NW), Valve Direction: K (w/o Indicator, Left Flange Surface; Std.
Valve Type: Normally Closed, O-ring Seal, Flange Size: 25, Flange Type: KF (NW), Valve Direction: w/o Indicator, Left Flange Surface; Std. Indicator, Left Flange Surface, Version: Legacy, Auto Switch: w/o Auto Switch and w/o Built-in Magnet), Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: None, Voltage: 110 VAC, 50/60 Hz, Electrical Entry: H [Grommet ( Lead Wire Length 600mm
Valve Type: Normally Closed, O-ring Seal, Flange Size: 40, Flange Type: KF (NW), Valve Direction: w/o Indicator, Left Flange Surface; Std. Indicator, Left Flange Surface, Version: Legacy, Auto Switch: w/o Auto Switch and w/o Built-in Magnet), Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: None, Voltage: 110 VAC, 50/60 Hz, Electrical Entry: H [Grommet ( Lead Wire Length 600mm
Valve Type: Normally Closed, O-ring Seal, Flange Size: 63, Flange Type: KF (NW), Valve Direction: w/o Indicator, Left Flange Surface; Std. Indicator, Left Flange Surface, Version: Legacy, Auto Switch: w/o Auto Switch and w/o Built-in Magnet), Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: None, Voltage: 110 VAC, 50/60 Hz, Electrical Entry: H [Grommet ( Lead Wire Length 600mm
Series XLFV is a high vacuum angle valve for use in industrial applications employing high vacuum and process gases. Common industries that may use this angle valve include semiconductor, solar and other electronics production, as well as food and pharmaceutical manufacturing. The XLFV valves are single-acting, normally closed.
Series XLFV is a high vacuum angle valve for use in industrial applications employing high vacuum and process gases. Common industries that may use this angle valve include semiconductor, solar and other electronics production, as well as food and pharmaceutical manufacturing. The XLFV valves are single-acting, normally closed.
Valve Type: XLD (Smooth Exhaust, Normally Closed, Bellows, O-ring Seal), Flange Size: 80, Flange Type: KF(NW), Port Direction: K (w/o Indicator, Left Flange Surface; Std. Indicator, Left Flange Surface)
Flange Size: 80, Flange Type: KF(NW), Port Direction: K (w/o Indicator, Left Flange Surface)
Valve Type: XYD (In-line Type, 2 State Control, Single Acting, Bellows, O-ring Seal), Flange Size: 80, Flange Type: KF (NW), Port Direction: K (w/o Indicator, Left Flange Surface; Indicator Std, Left Flange Surface)
Magnet: None, Mounting: B (Basic, w/o Bracket), Bore Size: 125mm, Stroke: 80mm, Rod Boot: K [Heat Resistant Tarpaulin (One Side)]
Valve Type: Smooth Exhaust, Normally Closed, Bellows, O-ring Seal, Flange Size: 80, Flange Type: KF(NW), Port Direction: w/o Indicator, Left Flange Surface; Std. Indicator, Left Flange Surface, Temperature: -, Auto Switch: -, Lead Wire: -, Number: -, Non-standard Indicator: -, Body Surface Treatment: -, Seal Material: -, Seal Replacement: -
Magnet: None, Mounting: Basic, w/o Bracket, Bore Size: 125mm, Stroke: 80mm, Rod Boot: K [Heat Resistant Tarpaulin (One Side)], Rod Type: -, Auto Switch: -, Lead Wire or Prewired Connector: -
Cylinder (Tube) Inner Diameter(φ): 200, Stroke(mm): 80, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Double rod, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Standard, End Locking: No, Valves: Presence, Cushion: With cushions on both sides, Operating Pressure(MPa): 0.05 to 0.97, Port thread type: Rc, Auto Switches:
Flange Size: 80, Flange Type: KF(NW), Port Direction: w/o Indicator, Left Flange Surface, Temperature: -, Version: -, Auto Switch: -, Lead Wire: -, Number: -, Body Surface Treatment: -, Seal Material: -, Seal Replacement: -, X152: -, Non-standard Indicator: -