High vacuum angle valve series XL provides excellent thermal conductivity results in a uniform temperature for the entire valve body and a marked decrease in the condensation of gases inside the valve. The valve does not contain heavy metals such as Ni (nickel) or Cr (chrome) and a low sputtering yield also helps to minimize heavy metal contamination of semiconductor wafers.
Operations Manual: High Vacuum L Type Valve -16-2 40 108 38 30 17 41 XLFV-25-2 50 121 48 40 26 46 XLFV-40-2 65 171 66 55 41 54.5 XLFV-50-2 70 185 79 75 52 71 XLFV-63-2 88 212 100 87 95 70 80.5 XLFV-80-2 90 257 117 114 110 83 90.5 Model K L M N S T XLFV-16-2 17.2 10.2 3.6 3.6 M5 M5 XLFV-25-2 21.4 10.2 3.6 3.6 M5 M5 XLFV-40-2 33.9 10.2 3.6 3.6 M5 M5 XLFV-50-2 35.3 12 4 2 Rc1/8 M5 XLFV-63-2 43.8 12 4 2 Rc1/8 M5 XLFV-80-2 59.8 12 4 2 Rc1
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40l/min 100l/min 0.5l/min 4l/min PF2W504 PF2W504T 0.35l/min 4.5l/min 16l/min 2l/min PF2W520 PF2W520T 1.7l/min 17l/min 5l/min 40l/min PF2W540 PF2W540T 45l/min 3.5l/min 10l/min 100l/min PF2W511 110l/min 7l/min Rated flow rate range of sensor Set flow rate range of sensor 1-16-4 Shimbashi, Minato-ku, Tokyo 105-0004, JAPAN Tel: 03-3502-2740 Fax: 03-3508-2480 URL http://www.smcworld.com 2003
11/2 1 2 Switch output Analog output Accumulated pulse output Display unit Sensor unit PF2A710 750 711 721 751 703H 706H 712H PF2A510 550 511 521 551 1 to 10 PF2A30 5 to 50 10 to 100 31 20 to 200 50 to 500 150 to 3000 300 to 6000 600 to 12000 : Output from integrated display type and remote display unit type : Output from remote sensor unit type For Water P.12 16l/min 4l/min 100l/min 40l
Digital Flow Switch for Air Digital Flow Switch for Water Series PFA Series PFA Series PFW Series PFW New New 12000l 6000l 3000l Flow rate 40l 500l Photo Flow rate Photo 200l 100l 16l 50l Photo 4l Photo 10l Size (port size)) Size (port size) Maximum Flow Rate 3000, 6000, 12000l/min The addition of the high flow rate types supports energy saving measures.