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SMC XLFV-80F-5LZ high vacuum valve, XLF HIGH VACCUM VALVE***

This is a legacy product. Please contact us for the latest version.sales@ocaire.com

https://www.smcpneumatics.com/XLFV-80F-5LZ.html

XLFV, Aluminum High Vacuum Angle Valve, Normally Closed, O-ring Seal with Solenoid Valve

High vacuum angle valve series XL provides excellent thermal conductivity results in a uniform temperature for the entire valve body and a marked decrease in the condensation of gases inside the valve. The valve does not contain heavy metals such as Ni (nickel) or Cr (chrome) and a low sputtering yield also helps to minimize heavy metal contamination of semiconductor wafers.

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Operations Manual: XLF Series

Doc. no.XL*-OMJ0003-D High Vacuum L Type Valve PRODUCT NAME XLF Series MODEL/ Series Thank you for purchasing this SMC product. Be sure to read this Operation Manual carefully and understand its contents before operating this product to ensure the safety of the operator and this product. Please refer to the drawing and other informative documents for the construction and specifications of

https://smccatalog.partbuilder.smcpneumatics.com/dl_catalogs/assets/manual/en-jp/files/XLF-E.pdf

XLFV, Aluminum High Vacuum Angle Valve, Normally Closed, O-ring Seal with Solenoid Valve

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Valve Type: XLFV (Normally Closed, O-ring Seal), Flange Size: 25, Flange Type: KF (NW), Valve Direction: G (w/Indicator, Rear Flange Surface), Version: Legacy, Auto Switch: w/o Auto Switch and w/o Built-in Magnet), Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: None, Voltage: 5 (24 VDC), Electrical Entry: L (L Type Plug Connector), Surge Suppressor: Z (w/Light & Surge Voltage

https://www.smcpneumatics.com/Part-Builder-Links_ep_2458-1.html?https://partbuilder.smcpneumatics.com/product-search-results/XLFV-25G-5LZ

Valve Type: XLFV (Normally Closed, O-ring Seal), Flange Size: 40, Flange Type: KF (NW), Valve Direction: J (w/Indicator, Right Flange Surface), Version: Legacy, Auto Switch: w/o Auto Switch and w/o Built-in Magnet), Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: None, Voltage: 5 (24 VDC), Electrical Entry: L (L Type Plug Connector), Surge Suppressor: Z (w/Light & Surge Voltage

https://www.smcpneumatics.com/Part-Builder-Links_ep_2458-1.html?https://partbuilder.smcpneumatics.com/product-search-results/XLFV-40J-5LZ

Valve Type: XLFV (Normally Closed, O-ring Seal), Flange Size: 50, Flange Type: KF (NW), Valve Direction: G (w/Indicator, Rear Flange Surface), Version: Legacy, Auto Switch: w/o Auto Switch and w/o Built-in Magnet), Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: None, Voltage: 5 (24 VDC), Electrical Entry: L (L Type Plug Connector), Surge Suppressor: Z (w/Light & Surge Voltage

https://www.smcpneumatics.com/Part-Builder-Links_ep_2458-1.html?https://partbuilder.smcpneumatics.com/product-search-results/XLFV-50G-5LZ

Valve Type: XLFV (Normally Closed, O-ring Seal), Flange Size: 16, Flange Type: KF (NW), Valve Direction: G (w/Indicator, Rear Flange Surface), Version: Legacy, Auto Switch: w/o Auto Switch and w/o Built-in Magnet), Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: None, Voltage: 5 (24 VDC), Electrical Entry: L (L Type Plug Connector), Surge Suppressor: Z (w/Light & Surge Voltage

https://www.smcpneumatics.com/Part-Builder-Links_ep_2458-1.html?https://partbuilder.smcpneumatics.com/product-search-results/XLFV-16G-5LZ

Valve Type: Normally Closed, O-ring Seal, Flange Size: 25, Flange Type: KF (NW), Valve Direction: w/Indicator, Rear Flange Surface, Version: Legacy, Auto Switch: w/o Auto Switch and w/o Built-in Magnet), Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: None, Voltage: 24 VDC, Electrical Entry: L Type Plug Connector, Surge Suppressor: w/Light & Surge Voltage Suppressor

https://www.smcpneumatics.com/Part-Builder-Links_ep_2458-1.html?https://inventory.partbuilder.smcpneumatics.com/vona2/detail/332000162987/?HissuCode=XLFV-25G-5LZ

Valve Type: Normally Closed, O-ring Seal, Flange Size: 40, Flange Type: KF (NW), Valve Direction: w/Indicator, Right Flange Surface, Version: Legacy, Auto Switch: w/o Auto Switch and w/o Built-in Magnet), Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: None, Voltage: 24 VDC, Electrical Entry: L Type Plug Connector, Surge Suppressor: w/Light & Surge Voltage Suppressor

https://www.smcpneumatics.com/Part-Builder-Links_ep_2458-1.html?https://inventory.partbuilder.smcpneumatics.com/vona2/detail/332000162987/?HissuCode=XLFV-40J-5LZ

Valve Type: Normally Closed, O-ring Seal, Flange Size: 50, Flange Type: KF (NW), Valve Direction: w/Indicator, Rear Flange Surface, Version: Legacy, Auto Switch: w/o Auto Switch and w/o Built-in Magnet), Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: None, Voltage: 24 VDC, Electrical Entry: L Type Plug Connector, Surge Suppressor: w/Light & Surge Voltage Suppressor

https://www.smcpneumatics.com/Part-Builder-Links_ep_2458-1.html?https://inventory.partbuilder.smcpneumatics.com/vona2/detail/332000162987/?HissuCode=XLFV-50G-5LZ

Valve Type: Normally Closed, O-ring Seal, Flange Size: 16, Flange Type: KF (NW), Valve Direction: w/Indicator, Rear Flange Surface, Version: Legacy, Auto Switch: w/o Auto Switch and w/o Built-in Magnet), Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: None, Voltage: 24 VDC, Electrical Entry: L Type Plug Connector, Surge Suppressor: w/Light & Surge Voltage Suppressor

https://www.smcpneumatics.com/Part-Builder-Links_ep_2458-1.html?https://inventory.partbuilder.smcpneumatics.com/vona2/detail/332000162987/?HissuCode=XLFV-16G-5LZ

XLFV-25G-M9PC-5LZ

Valve Type: XLFV (Normally Closed, O-ring Seal), Flange Size: 25, Flange Type: KF (NW), Valve Direction: G (w/Indicator, Rear Flange Surface), Version: Legacy, Auto Switch: M9P--Solid State, Gen.

https://www.smcpneumatics.com/Part-Builder-Links_ep_2458-1.html?https://partbuilder.smcpneumatics.com/product-search-results/XLFV-25G-M9PC-5LZ

XLFV-50G-M9PC-5LZ

Valve Type: XLFV (Normally Closed, O-ring Seal), Flange Size: 50, Flange Type: KF (NW), Valve Direction: G (w/Indicator, Rear Flange Surface), Version: Legacy, Auto Switch: M9P--Solid State, Gen.

https://www.smcpneumatics.com/Part-Builder-Links_ep_2458-1.html?https://partbuilder.smcpneumatics.com/product-search-results/XLFV-50G-M9PC-5LZ

XLFV-40G-M9NLA-5LZ

Valve Type: XLFV (Normally Closed, O-ring Seal), Flange Size: 40, Flange Type: KF (NW), Valve Direction: G (w/Indicator, Rear Flange Surface), Version: Legacy, Auto Switch: M9N--Solid State, Gen.

https://www.smcpneumatics.com/Part-Builder-Links_ep_2458-1.html?https://partbuilder.smcpneumatics.com/product-search-results/XLFV-40G-M9NLA-5LZ

XLFV-40G-2M9//-5LZ

Valve Type: XLFV (Normally Closed, O-ring Seal), Flange Size: 40, Flange Type: KF (NW), Valve Direction: G (w/Indicator, Rear Flange Surface), Version: 2 (Refresh), Auto Switch: M9// (w/o Auto Switch w/Built-in Magnet), Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: None, Voltage: 5 (24 VDC), Electrical Entry: L (L Type Plug Connector), Surge Suppressor: Z (w/Light & Surge

https://www.smcpneumatics.com/Part-Builder-Links_ep_2458-1.html?https://partbuilder.smcpneumatics.com/product-search-results/XLFV-40G-2M9//-5LZ

XLFV-25G-M9PC-5LZ

Valve Type: Normally Closed, O-ring Seal, Flange Size: 25, Flange Type: KF (NW), Valve Direction: w/Indicator, Rear Flange Surface, Version: Legacy, Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: 1 pc, Valve Closed, Voltage: 24 VDC, Electrical Entry: L Type Plug Connector, Surge Suppressor: w/Light & Surge

https://www.smcpneumatics.com/Part-Builder-Links_ep_2458-1.html?https://inventory.partbuilder.smcpneumatics.com/vona2/detail/332000162987/?HissuCode=XLFV-25G-M9PC-5LZ

XLFV-50G-M9PC-5LZ

Valve Type: Normally Closed, O-ring Seal, Flange Size: 50, Flange Type: KF (NW), Valve Direction: w/Indicator, Rear Flange Surface, Version: Legacy, Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: 1 pc, Valve Closed, Voltage: 24 VDC, Electrical Entry: L Type Plug Connector, Surge Suppressor: w/Light & Surge

https://www.smcpneumatics.com/Part-Builder-Links_ep_2458-1.html?https://inventory.partbuilder.smcpneumatics.com/vona2/detail/332000162987/?HissuCode=XLFV-50G-M9PC-5LZ

XLFV-40G-M9NLA-5LZ

Valve Type: Normally Closed, O-ring Seal, Flange Size: 40, Flange Type: KF (NW), Valve Direction: w/Indicator, Rear Flange Surface, Version: Legacy, Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, Lead Wire: 3m, Number: 2pcs, Valve Open/Closed, Voltage: 24 VDC, Electrical Entry: L Type Plug Connector, Surge Suppressor: w/Light & Surge Voltage Suppressor

https://www.smcpneumatics.com/Part-Builder-Links_ep_2458-1.html?https://inventory.partbuilder.smcpneumatics.com/vona2/detail/332000162987/?HissuCode=XLFV-40G-M9NLA-5LZ

XLFV-40G-2M9//-5LZ

Valve Type: Normally Closed, O-ring Seal, Flange Size: 40, Flange Type: KF (NW), Valve Direction: w/Indicator, Rear Flange Surface, Version: Refresh, Auto Switch: w/o Auto Switch w/Built-in Magnet, Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: None, Voltage: 24 VDC, Electrical Entry: L Type Plug Connector, Surge Suppressor: w/Light & Surge Voltage Suppressor

https://www.smcpneumatics.com/Part-Builder-Links_ep_2458-1.html?https://inventory.partbuilder.smcpneumatics.com/vona2/detail/332000162987/?HissuCode=XLFV-40G-2M9//-5LZ