High vacuum angle valve series XL provides excellent thermal conductivity results in a uniform temperature for the entire valve body and a marked decrease in the condensation of gases inside the valve. The valve does not contain heavy metals such as Ni (nickel) or Cr (chrome) and a low sputtering yield also helps to minimize heavy metal contamination of semiconductor wafers.
Operations Manual: High Vacuum L Type Valve -16-2 40 108 38 30 17 41 XLFV-25-2 50 121 48 40 26 46 XLFV-40-2 65 171 66 55 41 54.5 XLFV-50-2 70 185 79 75 52 71 XLFV-63-2 88 212 100 87 95 70 80.5 XLFV-80-2 90 257 117 114 110 83 90.5 Model K L M N S T XLFV-16-2 17.2 10.2 3.6 3.6 M5 M5 XLFV-25-2 21.4 10.2 3.6 3.6 M5 M5 XLFV-40-2 33.9 10.2 3.6 3.6 M5 M5 XLFV-50-2 35.3 12 4 2 Rc1/8 M5 XLFV-63-2 43.8 12 4 2 Rc1/8 M5 XLFV-80-2 59.8 12 4 2 Rc1
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Voltage resistance 10 to 500Hz Pulse width 1.5mm or acceleration 98m/s2 PS1100 ON OFF ZSE3 ISE3 Vibration resistance Switch turns ON when the pressure is smaller than setting pressure (at the smaller vibration) in X, Y, Z directions (2 hours) 980m/s2 X, Y, Z directions (3 times for each direction) Shock resistance GS Weight 5g (Excluding lead wire) Pressure Switch Calibration Port size 6
Bore size (mm) Thread size Pulling force N Stroke (mm) 16 M2.5 x 0.45 x 25L or more 4.9 2 Bolt should be detached under normal operation, otherwise it may cause malfunction of the locking feature. Rubber cap 447 Air Cylinder: With End Lock Series CBJ2 Construction (Not able to disassemble) Head end lock !3 !1 Air Cylinders !6 !7 e !5 o !0 i !2 !8 u CJ2 w CM2 CG1 @0 !9 t !