High vacuum angle valve series XL provides excellent thermal conductivity results in a uniform temperature for the entire valve body and a marked decrease in the condensation of gases inside the valve. The valve does not contain heavy metals such as Ni (nickel) or Cr (chrome) and a low sputtering yield also helps to minimize heavy metal contamination of semiconductor wafers.
Operations Manual: XLF Series Doc. no.XL*-OMJ0003-D High Vacuum L Type Valve PRODUCT NAME XLF Series MODEL/ Series Thank you for purchasing this SMC product. Be sure to read this Operation Manual carefully and understand its contents before operating this product to ensure the safety of the operator and this product. Please refer to the drawing and other informative documents for the construction and specifications of
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Valve Type: XMA (Angle Type, Normally Closed, Bellows Seal), Flange Size: 40, Flange Type: KF (NW), Port Direction: F (w/Indicator, Left Flange Surface), Temperature: 5 to 60°C (or n/a for XMH/XYH), Suffix: , Auto Switch: M9B--Solid State, Gen. Purpose, 2 Wire, Horizontal, Lead Wire: L (3m), Number: C [1 pc (Valve Closed)]
Type: Air-Actuated Vacuum Valve, Application: Single Item Operating, Installation Method: Direct, Number of Ports: 2-Port Valve, Switching Type: 2-Position Normally Closed, Piping Opening: Flange, Flange Type: NW, Flange Size Nominal: 40, Seal Type: Bellows Seal, Valve Type: Angle type, Indicator: With indicator, Pilot Port Direction: Flange surface, left, Temperature Range(°C): 5 to 60,