High vacuum angle valve series XL provides excellent thermal conductivity results in a uniform temperature for the entire valve body and a marked decrease in the condensation of gases inside the valve. The valve does not contain heavy metals such as Ni (nickel) or Cr (chrome) and a low sputtering yield also helps to minimize heavy metal contamination of semiconductor wafers.
Operations Manual: XLF Series Doc. no.XL*-OMJ0003-D High Vacuum L Type Valve PRODUCT NAME XLF Series MODEL/ Series Thank you for purchasing this SMC product. Be sure to read this Operation Manual carefully and understand its contents before operating this product to ensure the safety of the operator and this product. Please refer to the drawing and other informative documents for the construction and specifications of
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New Products Guide 2 Air Preparation Equipment, Modular F. R. L., Air Tanks Fittings and Tubing Flow Control Equipment, Exhaust Filters Switches/Sensors Process Valves High Vacuum Equipment Temperature Control Equipment Pneumatic Instrumentation Process Gas Equipment Equipment CAT.E00-7A INDEX New Products Guide 2 Air Preparation Equipment/ Modular F. R. L./Air Tanks Refrigerated Air Dryer
Valve Type: XLFV (Normally Closed, O-ring Seal), Flange Size: 50, Flange Type: KF (NW), Valve Direction: F (w/Indicator, Left Flange Surface), Version: Legacy, Auto Switch: M9// (w/o Auto Switch w/Built-in Magnet), Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: None, Voltage: 5 (24 VDC), Electrical Entry: G [Grommet (Lead Wire Length 300mm)], Surge Suppressor: S (w/Surge