High vacuum angle valve series XL provides excellent thermal conductivity results in a uniform temperature for the entire valve body and a marked decrease in the condensation of gases inside the valve. The valve does not contain heavy metals such as Ni (nickel) or Cr (chrome) and a low sputtering yield also helps to minimize heavy metal contamination of semiconductor wafers.
Operations Manual: High Vacuum L Type Valve -16-2 40 108 38 30 17 41 XLFV-25-2 50 121 48 40 26 46 XLFV-40-2 65 171 66 55 41 54.5 XLFV-50-2 70 185 79 75 52 71 XLFV-63-2 88 212 100 87 95 70 80.5 XLFV-80-2 90 257 117 114 110 83 90.5 Model K L M N S T XLFV-16-2 17.2 10.2 3.6 3.6 M5 M5 XLFV-25-2 21.4 10.2 3.6 3.6 M5 M5 XLFV-40-2 33.9 10.2 3.6 3.6 M5 M5 XLFV-50-2 35.3 12 4 2 Rc1/8 M5 XLFV-63-2 43.8 12 4 2 Rc1/8 M5 XLFV-80-2 59.8 12 4 2 Rc1
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SY114-5GZ Blanking plate assembly SY100-77-1A R P Manifold base (5 stations) SS3Y1-S41-05-M5 SS3Y1-S41-05-M5 1 set (Type S41, 5 station manifold part number) SY100-77-1A 1 set (Blanking plate assembly part number) SY114-5GZ 4 sets (Valve) The asterisk denotes the symbol for assembly. Prefix it to the part nos. of the solenoid valve, etc.
Stations 5 4 3 2 1 V114-5GZ 2 1 3 2 Blank plate assembly V100-77-1A Manifold base (5 stations) VV100-S41-05-M5 VV100-S41-05-M5 1 set (Type S41, 5 station manifold base part no.) V100-77-1A 1 set (Blank plate assembly part no.) V114-5GZ 4 sets (Valve) The asterisk () is used when referring to assembly. Enter the asterisk at the beginning of individual cmponent part numbers.
Valve Type: XLFV (Normally Closed, O-ring Seal), Flange Size: 50, Flange Type: KF (NW), Valve Direction: F (w/Indicator, Left Flange Surface), Version: 2 (Refresh), Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal, 0.5M, Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: A (2pcs, Valve Open/Closed), Voltage: 5 (24 VDC), Electrical Entry: G [Grommet (Lead Wire Length