XL*Q, High Vacuum Angle Valve, Aluminum One-touch Connection & Release
High vacuum angle valve series XL provides excellent thermal conductivity results in a uniform temperature for the entire valve body and a marked decrease in the condensation of gases inside the valve. The valve does not contain heavy metals such as Ni (nickel) or Cr (chrome) and a low sputtering yield also helps to minimize heavy metal contamination of semiconductor wafers.
- One-touch connection & release, requires no tools
- Lightweight & compact
- Auto switch capable
- XLAQ: single acting, normally closed, bellows seal
- XLAQ: flange sizes are 16, 25, 40, 50
- XLDQ: 2-step control, single acting
- XLDQ: flange sizes are 40, 50
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SMC XLDQ-40 angle valve, two stage, OTHER OTHER MISC.
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SMC XLAQ-16 quick maint angle valve, XLA HIGH VACUUM VALVE***
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SMC XLDQ-40L-M9NA angle valve, two stage, OTHER OTHER MISC.
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SMC XLAQ-40H0 high vacuum valve, XLA HIGH VACUUM VALVE***
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SMC XLDQ-50 high vaccum valve, OTHER OTHER MISC.
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XLAQ-16A-M9//
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XLAQ-25A-M9//
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XLAQ-40A-M9//
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SMC XLAQ-40A-M9BA high vacuum valve, HIGH VACUUM VALVE
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XLAQ-16G-M9//
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XLAQ-25G-M9//
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XLAQ-40G-M9//
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SMC XLAQ-25 high vacuum valve, XLA HIGH VACUUM VALVE***
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SMC XLAQ-40 high vacuum valve, XLA HIGH VACUUM VALVE***
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SMC XLAQ-16AH0-XR3A high vacuum valve, XLA HIGH VACUUM VALVE***
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SMC XLDQ-50-M9NA aluminum, high vacuum angle valve, HIGH VACUUM VALVE
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SMC XLAQ-25-XAN1A high vacuum valve, HIGH VACUUM VALVE