High vacuum angle valve series XL provides excellent thermal conductivity results in a uniform temperature for the entire valve body and a marked decrease in the condensation of gases inside the valve. The valve does not contain heavy metals such as Ni (nickel) or Cr (chrome) and a low sputtering yield also helps to minimize heavy metal contamination of semiconductor wafers.
Operations Manual: XLAQ_XLDQ-E Similar items in stock.
Variation: D (2-step Control, Single Acting/Bellows Seal, O-ring Seal), Flange Size: 50, Indicator, Actuator Port Direction: w/o Indicator, Actuator Port Direction on Flange Side, Temperature Specifications, Heater: 5 to 60°C, w/o Heater, Auto Switch: M9N (M9N--Solid State, Gen.
Variation: 2-step Control, Single Acting/Bellows Seal, O-ring Seal, Flange Size: 50, Indicator, Actuator Port Direction: w/o Indicator, Actuator Port Direction on Flange Side, Temperature Specifications, Heater: 5 to 60°C, w/o Heater, Auto Switch: M9N--Solid State, Gen.
Aluminum, High Vacuum Angle Valve, HIGH VACUUM VALVE, L47, 2.34 lb
BONNET ASSY (XLDQ-50), VACUUM SERIES, OTHER OTHER MISC., 21, OTHER NO SIZE RATING, 3.52739 lb
One-touch connection & release, requires no tools; Lightweight & compact; Auto switch capable; XLAQ: single acting, normally closed, bellows seal; XLAQ: flange sizes are 16, 25, 40, 50; XLDQ: 2-step control, single acting; XLDQ: flange sizes are 40, 50
One-touch connection & release, requires no tools; Lightweight & compact; Auto switch capable; XLAQ: single acting, normally closed, bellows seal; XLAQ: flange sizes are 16, 25, 40, 50; XLDQ: 2-step control, single acting; XLDQ: flange sizes are 40, 50
One-touch connection & release, requires no tools; Lightweight & compact; Auto switch capable; XLAQ: single acting, normally closed, bellows seal; XLAQ: flange sizes are 16, 25, 40, 50; XLDQ: 2-step control, single acting; XLDQ: flange sizes are 40, 50
Variation: D (2-step Control, Single Acting/Bellows Seal, O-ring Seal), Flange Size: 40
Variation: 2-step Control, Single Acting/Bellows Seal, O-ring Seal, Flange Size: 40, Indicator, Actuator Port Direction: -, Temperature Specifications, Heater: -, Auto Switch: -, Lead Wire: -, Number of Switches, Mounting Position: -, X: -, Body Surface Treatment: -, Seal Material: -, Seal & Leakage Change: -
Produced by Mitsubishi Cable Industries, Ltd. 472 XLDQ Series Aluminum One-touch Connection and Release High Vacuum Angle Valve Specifications XLDQ-40 XLDQ-50 Model Flange (valve) size 40 50 Valve type Normally closed (Pressurize to open, Spring seal) [both main & initial exhaust valves) Fluid Inert gas under vacuum Operating temperature (C) 5 to 60 (High-temperature type: 5 to 150) Atmospheric
Variation: D (2-step Control, Single Acting/Bellows Seal, O-ring Seal), Flange Size: 40, Indicator, Actuator Port Direction: L (w/o Indicator, Actuator Port Direction on Rear Flange Surface), Temperature Specifications, Heater: 5 to 60°C, w/o Heater, Auto Switch: M9N (M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal), Lead Wire: 0.5m (Or None in the Case of No Switch), Number of Switches
Variation: 2-step Control, Single Acting/Bellows Seal, O-ring Seal, Flange Size: 40, Indicator, Actuator Port Direction: w/o Indicator, Actuator Port Direction on Rear Flange Surface, Temperature Specifications, Heater: 5 to 60°C, w/o Heater, Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, Lead Wire: 0.5m (Or None in the Case of No Switch), Number of Switches, Mounting
Variation: 2-step Control, Single Acting/Bellows Seal, O-ring Seal, Flange Size: 40, Indicator, Actuator Port Direction: w/o Indicator, Actuator Port Direction on Left Flange Surface, Temperature Specifications, Heater: 5 to 150°C, with 80°C at 100VAC, 100°C at 200VAC Heater, Auto Switch: w/o Auto Switch, w/o Built-in Magnet, Lead Wire: 0.5m (Or None in the Case of No Switch), Number of
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Part Number Description: ANGLE VALVE, TWO STAGE Product Line: Z Product Line Description: VACUUM SERIES PDF Documentation: Datasheet Click here to report information errorImage shown may not match exact part number