High vacuum angle valve series XL provides excellent thermal conductivity results in a uniform temperature for the entire valve body and a marked decrease in the condensation of gases inside the valve. The valve does not contain heavy metals such as Ni (nickel) or Cr (chrome) and a low sputtering yield also helps to minimize heavy metal contamination of semiconductor wafers.
How To Order: Aluminum One-touch Connection and Release High Vacuum Angle Valve Normally Closed/Bellows Seal XLAQ Series Aluminum One-touch Connection and Release High Vacuum Angle Valve Normally Closed/Bellows Seal XLAQ Series How to Order XLAQ M9N 16 A q w e r t y w Indicator/Actuator port direction q Flange size Size 16 25 40 50 Indicator Without indicator Symbol Nil A F G J K L M Rear flange surface Actuator port direction Flange side Flange side Left flange surface Rear flange surface Right flange surface
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Variation: A (Normally Closed, Bellows Seal), Flange Size: 40, Indicator, Actuator Port Direction: w/o Indicator, Actuator Port Direction on Flange Side, Temperature Specifications, Heater: H0 (5 to 150°C, w/o Heater)
Variation: Normally Closed, Bellows Seal, Flange Size: 40, Indicator, Actuator Port Direction: w/o Indicator, Actuator Port Direction on Flange Side, Temperature Specifications, Heater: 5 to 150°C, w/o Heater, Auto Switch: -, Lead Wire: -, Number of Switches, Mounting Position: -, X: -, Body Surface Treatment: -, Seal Material: -, Seal & Leakage Change: -
Variation: A (Normally Closed, Bellows Seal), Flange Size: 40, Indicator, Actuator Port Direction: A (w/Indicator, Actuator Port Direction on Flange Side), Temperature Specifications, Heater: 5 to 60°C, w/o Heater, Auto Switch: M9// (w/o Auto Switch, w/Built-in Magnet)
Variation: A (Normally Closed, Bellows Seal), Flange Size: 40, Indicator, Actuator Port Direction: A (w/Indicator, Actuator Port Direction on Flange Side), Temperature Specifications, Heater: 5 to 60°C, w/o Heater, Auto Switch: M9B (M9B--Solid State, Gen.
Variation: A (Normally Closed, Bellows Seal), Flange Size: 40, Indicator, Actuator Port Direction: G (w/Indicator, Actuator Port Direction on Rear Flange Surface), Temperature Specifications, Heater: 5 to 60°C, w/o Heater, Auto Switch: M9// (w/o Auto Switch, w/Built-in Magnet)
Variation: Normally Closed, Bellows Seal, Flange Size: 40, Indicator, Actuator Port Direction: w/Indicator, Actuator Port Direction on Flange Side, Temperature Specifications, Heater: 5 to 60°C, w/o Heater, Auto Switch: w/o Auto Switch, w/Built-in Magnet, Lead Wire: -, Number of Switches, Mounting Position: -, X: -, Body Surface Treatment: -, Seal Material: -, Seal & Leakage Change: -
Variation: Normally Closed, Bellows Seal, Flange Size: 40, Indicator, Actuator Port Direction: w/Indicator, Actuator Port Direction on Flange Side, Temperature Specifications, Heater: 5 to 60°C, w/o Heater, Auto Switch: M9B--Solid State, Gen.
Variation: Normally Closed, Bellows Seal, Flange Size: 40, Indicator, Actuator Port Direction: w/Indicator, Actuator Port Direction on Rear Flange Surface, Temperature Specifications, Heater: 5 to 60°C, w/o Heater, Auto Switch: w/o Auto Switch, w/Built-in Magnet, Lead Wire: -, Number of Switches, Mounting Position: -, X: -, Body Surface Treatment: -, Seal Material: -, Seal & Leakage Change