SMC Corporation of America
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Part Number Description: ANGLE VALVE, TWO STAGE   Product Line: Z   Product Line Description: VACUUM SERIES   PDF Documentation:  Datasheet   Click here to report information errorImage shown may not match exact part number

High vacuum angle valve series XL provides excellent thermal conductivity results in a uniform temperature for the entire valve body and a marked decrease in the condensation of gases inside the valve. The valve does not contain heavy metals such as Ni (nickel) or Cr (chrome) and a low sputtering yield also helps to minimize heavy metal contamination of semiconductor wafers.

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Variation: D (2-step Control, Single Acting/Bellows Seal, O-ring Seal), Flange Size: 40, Indicator, Actuator Port Direction: L (w/o Indicator, Actuator Port Direction on Rear Flange Surface), Temperature Specifications, Heater: 5 to 60°C, w/o Heater, Auto Switch: M9N (M9N--Solid State, Gen.

Variation: 2-step Control, Single Acting/Bellows Seal, O-ring Seal, Flange Size: 40, Indicator, Actuator Port Direction: w/o Indicator, Actuator Port Direction on Left Flange Surface, Temperature Specifications, Heater: 5 to 150°C, with 80°C at 100VAC, 100°C at 200VAC Heater, Auto Switch: w/o Auto Switch, w/o Built-in Magnet, Lead Wire: 0.5m (Or None in the Case of No Switch), Number of

Variation: 2-step Control, Single Acting/Bellows Seal, O-ring Seal, Flange Size: 40, Indicator, Actuator Port Direction: w/o Indicator, Actuator Port Direction on Rear Flange Surface, Temperature Specifications, Heater: 5 to 60°C, w/o Heater, Auto Switch: M9N--Solid State, Gen.