SMC Corporation of America
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Part Number Description: ANGLE VALVE, TWO STAGE   Product Line: Z   Product Line Description: VACUUM SERIES   PDF Documentation:  Datasheet   Click here to report information errorImage shown may not match exact part number

High vacuum angle valve series XL provides excellent thermal conductivity results in a uniform temperature for the entire valve body and a marked decrease in the condensation of gases inside the valve. The valve does not contain heavy metals such as Ni (nickel) or Cr (chrome) and a low sputtering yield also helps to minimize heavy metal contamination of semiconductor wafers.

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Variation: D (2-step Control, Single Acting/Bellows Seal, O-ring Seal), Flange Size: 40, Indicator, Actuator Port Direction: L (w/o Indicator, Actuator Port Direction on Rear Flange Surface), Temperature Specifications, Heater: 5 to 60°C, w/o Heater, Auto Switch: M9N (M9N--Solid State, Gen.

Variation: 2-step Control, Single Acting/Bellows Seal, O-ring Seal, Flange Size: 40, Indicator, Actuator Port Direction: w/o Indicator, Actuator Port Direction on Rear Flange Surface, Temperature Specifications, Heater: 5 to 60°C, w/o Heater, Auto Switch: M9N--Solid State, Gen.

Variation: 2-step Control, Single Acting/Bellows Seal, O-ring Seal, Flange Size: 40, Indicator, Actuator Port Direction: w/o Indicator, Actuator Port Direction on Left Flange Surface, Temperature Specifications, Heater: 5 to 150°C, with 80°C at 100VAC, 100°C at 200VAC Heater, Auto Switch: w/o Auto Switch, w/o Built-in Magnet, Lead Wire: 0.5m (Or None in the Case of No Switch), Number of

This is a legacy product. Please contact us for the latest version.sales@ocaire.com, ANGLE VALVE, TWO STAGE, VACUUM SERIES, OTHER OTHER MISC., 2X, OTHER NO SIZE RATING, 2.70065 lb

One-touch connection & release, requires no tools; Lightweight & compact; Auto switch capable; XLAQ: single acting, normally closed, bellows seal; XLAQ: flange sizes are 16, 25, 40, 50; XLDQ: 2-step control, single acting; XLDQ: flange sizes are 40, 50

One-touch connection & release, requires no tools; Lightweight & compact; Auto switch capable; XLAQ: single acting, normally closed, bellows seal; XLAQ: flange sizes are 16, 25, 40, 50; XLDQ: 2-step control, single acting; XLDQ: flange sizes are 40, 50

One-touch connection & release, requires no tools; Lightweight & compact; Auto switch capable; XLAQ: single acting, normally closed, bellows seal; XLAQ: flange sizes are 16, 25, 40, 50; XLDQ: 2-step control, single acting; XLDQ: flange sizes are 40, 50

BONNET ASSY (XLDQ-50), VACUUM SERIES, OTHER OTHER MISC., 21, OTHER NO SIZE RATING, 3.52739 lb

Variation: 2-step Control, Single Acting/Bellows Seal, O-ring Seal, Flange Size: 50, Indicator, Actuator Port Direction: -, Temperature Specifications, Heater: -, Auto Switch: -, Lead Wire: -, Number of Switches, Mounting Position: -, X: -, Body Surface Treatment: -, Seal Material: -, Seal & Leakage Change: -

55 75 F 17 26 41 52 G 40 39 63 68 H 87 91 129 142 J XLAQ-16 XLAQ-25 XLAQ-40 XLAQ-50 40 50 65 70 Note) The heater (Option) is not available with XLAQ-16. 471 Aluminum One-touch Connection and Release High Vacuum Angle Valve 2-step Control, Single Acting/Bellows Seal, O-ring Seal XLDQ Series How to Order XLDQ M9N A 40 q w e r t y w Actuator port direction q Flange size Rear flange surface

Variation: D (2-step Control, Single Acting/Bellows Seal, O-ring Seal), Flange Size: 50, Indicator, Actuator Port Direction: w/o Indicator, Actuator Port Direction on Flange Side, Temperature Specifications, Heater: 5 to 60°C, w/o Heater, Auto Switch: M9N (M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal), Lead Wire: 0.5m (Or None in the Case of No Switch), Number of Switches, Mounting

Variation: 2-step Control, Single Acting/Bellows Seal, O-ring Seal, Flange Size: 50, Indicator, Actuator Port Direction: w/o Indicator, Actuator Port Direction on Flange Side, Temperature Specifications, Heater: 5 to 60°C, w/o Heater, Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, Lead Wire: 0.5m (Or None in the Case of No Switch), Number of Switches, Mounting Position

This is a legacy product. Please contact us for the latest version.sales@ocaire.com