High vacuum angle valve series XL provides excellent thermal conductivity results in a uniform temperature for the entire valve body and a marked decrease in the condensation of gases inside the valve. The valve does not contain heavy metals such as Ni (nickel) or Cr (chrome) and a low sputtering yield also helps to minimize heavy metal contamination of semiconductor wafers.
Operations Manual: XLAQ_XLDQ-E Similar items in stock.
Variation: D (2-step Control, Single Acting/Bellows Seal, O-ring Seal), Flange Size: 40, Indicator, Actuator Port Direction: L (w/o Indicator, Actuator Port Direction on Rear Flange Surface), Temperature Specifications, Heater: 5 to 60°C, w/o Heater, Auto Switch: M9N (M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal), Lead Wire: 0.5m (Or None in the Case of No Switch), Number of Switches
Variation: 2-step Control, Single Acting/Bellows Seal, O-ring Seal, Flange Size: 40, Indicator, Actuator Port Direction: w/o Indicator, Actuator Port Direction on Rear Flange Surface, Temperature Specifications, Heater: 5 to 60°C, w/o Heater, Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, Lead Wire: 0.5m (Or None in the Case of No Switch), Number of Switches, Mounting
Variation: D (2-step Control, Single Acting/Bellows Seal, O-ring Seal), Flange Size: 50
Variation: 2-step Control, Single Acting/Bellows Seal, O-ring Seal, Flange Size: 50, Indicator, Actuator Port Direction: -, Temperature Specifications, Heater: -, Auto Switch: -, Lead Wire: -, Number of Switches, Mounting Position: -, X: -, Body Surface Treatment: -, Seal Material: -, Seal & Leakage Change: -
BONNET ASSY (XLDQ-50), VACUUM SERIES, OTHER OTHER MISC., 21, OTHER NO SIZE RATING, 3.52739 lb
One-touch connection & release, requires no tools; Lightweight & compact; Auto switch capable; XLAQ: single acting, normally closed, bellows seal; XLAQ: flange sizes are 16, 25, 40, 50; XLDQ: 2-step control, single acting; XLDQ: flange sizes are 40, 50
One-touch connection & release, requires no tools; Lightweight & compact; Auto switch capable; XLAQ: single acting, normally closed, bellows seal; XLAQ: flange sizes are 16, 25, 40, 50; XLDQ: 2-step control, single acting; XLDQ: flange sizes are 40, 50
One-touch connection & release, requires no tools; Lightweight & compact; Auto switch capable; XLAQ: single acting, normally closed, bellows seal; XLAQ: flange sizes are 16, 25, 40, 50; XLDQ: 2-step control, single acting; XLDQ: flange sizes are 40, 50
Variation: D (2-step Control, Single Acting/Bellows Seal, O-ring Seal), Flange Size: 40
Variation: 2-step Control, Single Acting/Bellows Seal, O-ring Seal, Flange Size: 40, Indicator, Actuator Port Direction: -, Temperature Specifications, Heater: -, Auto Switch: -, Lead Wire: -, Number of Switches, Mounting Position: -, X: -, Body Surface Treatment: -, Seal Material: -, Seal & Leakage Change: -
Chemraz Example) XLDQ-40K-M9NA-XAN1A VMQ FKM for Plasma ULTIC ARMOR U1 UA4640 The material for the sliding parts of the S valve is FKM.
Valve Type: XLD (Smooth Exhaust, Normally Closed, Bellows, O-ring Seal), Flange Size: 50, Flange Type: KF(NW), Port Direction: w/o Indicator, Flange Side; Std. Indicator, Flange Side, Temperature: 5 to 60°C, Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: A (2pcs, Valve Open/Closed)
Bore Size: 100mm, Port Thread: TN (NPT), Stroke: 50mm, Auto Switch: M9NA--Solid State, Water Resist., 3 Wire NPN, Horizontal
Valve Type: XMA (Angle Type, Normally Closed, Bellows Seal), Flange Size: 50, Flange Type: KF (NW), Port Direction: w/o Ind. or w/Std.Ind.,FlangeSide; w/o Ind or w/Std. Ind.,RearFlangeSide; N/A, Temperature: 5 to 60°C (or n/a for XMH/XYH), Suffix: , Auto Switch: M9N--Solid State, Gen.
Valve Type: XYA (In-line Type, Normally Closed, Bellows Seal), Flange Size: 50, Flange Type: KF (NW), Port Direction: w/o Ind. or w/Std.Ind.,FlangeSide; w/o Ind or w/Std. Ind.,RearFlangeSide; N/A, Temperature: 5 to 60°C (or n/a for XMH/XYH), Suffix: , Auto Switch: M9N--Solid State, Gen.