SMC Corporation of America
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Part Number Description: HIGH VACUUM VALVE   Product Line: Z   Product Line Description: VACUUM SERIES   PDF Documentation:  Datasheet   Click here to report information errorImage shown may not match exact part number

High vacuum angle valve series XL provides excellent thermal conductivity results in a uniform temperature for the entire valve body and a marked decrease in the condensation of gases inside the valve. The valve does not contain heavy metals such as Ni (nickel) or Cr (chrome) and a low sputtering yield also helps to minimize heavy metal contamination of semiconductor wafers.

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Aluminum One-touch Connection and Release High Vacuum Angle Valve Normally Closed/Bellows Seal XLAQ Series How to Order XLAQ M9N 16 A q w e r t y w Indicator/Actuator port direction q Flange size Size 16 25 40 50 Indicator Without indicator Symbol Nil A F G J K L M Rear flange surface Actuator port direction Flange side Flange side Left flange surface Rear flange surface Right flange surface

Flange Size: 16, Flange Type: KF(NW), Port Direction: A (w/Indicator, Flange Side), Temperature: H0 (5 to 150°C, No Heater)

Valve Type: XMA (Angle Type, Normally Closed, Bellows Seal), Flange Size: 16, Flange Type: KF (NW), Port Direction: A (w/Indicator, Flange Side; w/Indicator, Rear Flange Surface), Temperature: H0 (5 to 150°C)

Flange Size: 16, Flange Type: KF(NW), Port Direction: w/Indicator, Flange Side, Temperature: 5 to 150°C, No Heater, Version: -, Auto Switch: -, Lead Wire: -, Number: -, Body Surface Treatment: -, Seal Material: -, Seal Replacement: -, X152: -, Non-standard Indicator: -

Valve Type: Angle Type, Normally Closed, Bellows Seal, Flange Size: 16, Flange Type: KF (NW), Port Direction: w/Indicator, Flange Side; w/Indicator, Rear Flange Surface, Temperature: 5 to 150°C, Suffix: -, Auto Switch: -, Lead Wire: -, Number: -, Seal Material: -, Seal Replacement: -

Please contact us for the latest version.sales@ocaire.com, EXTERNAL O RING FOR XLAQ-25, VACUUM SERIES, XLA NO SIZE RATING, 2.05326 lb

Please contact us for the latest version.sales@ocaire.com, EXTERNAL O RING FOR XLAQ-40, VACUUM SERIES, XLA NO SIZE RATING, .34393 lb

Please contact us for the latest version.sales@ocaire.com, EXTERNAL O-RING FOR XLAQ-25, VACUUM SERIES, XLA NO SIZE RATING, 2.05326 lb

Please contact us for the latest version.sales@ocaire.com, EXTERNAL O-RING FOR XLAQ-25, VACUUM SERIES, XLA NO SIZE RATING, 2.05326 lb

Please contact us for the latest version.sales@ocaire.com, EXTERNAL O-RING FOR XLAQ-40, VACUUM SERIES, XLA NO SIZE RATING, .34393 lb