High vacuum angle valve series XL provides excellent thermal conductivity results in a uniform temperature for the entire valve body and a marked decrease in the condensation of gases inside the valve. The valve does not contain heavy metals such as Ni (nickel) or Cr (chrome) and a low sputtering yield also helps to minimize heavy metal contamination of semiconductor wafers.
How To Order: Aluminum One-touch Connection and Release High Vacuum Angle Valve Normally Closed/Bellows Seal XLAQ Series Aluminum One-touch Connection and Release High Vacuum Angle Valve Normally Closed/Bellows Seal XLAQ Series How to Order XLAQ M9N 16 A q w e r t y w Indicator/Actuator port direction q Flange size Size 16 25 40 50 Indicator Without indicator Symbol Nil A F G J K L M Rear flange surface Actuator port direction Flange side Flange side Left flange surface Rear flange surface Right flange surface
Symbol Standard Nil Optional Refer to XLA/XLC-16-2 16 Table 3 XLA/XLC-25-2 25 XLA/XLC-40-2 40 XLA/XLC-50-2 50 XLA/XLC-63-2 63 XLA/XLC-80-2 80 Note 1) Bellows assembly contains the valve seal 1.
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Variation: A (Normally Closed, Bellows Seal), Flange Size: 25, Indicator, Actuator Port Direction: w/o Indicator, Actuator Port Direction on Flange Side, Temperature Specifications, Heater: 5 to 60°C, w/o Heater, Auto Switch: w/o Auto Switch, w/o Built-in Magnet, Lead Wire: 0.5m (Or None in the Case of No Switch), Number of Switches, Mounting Position: w/o Auto Switch, X: X (Indicates a
Variation: Normally Closed, Bellows Seal, Flange Size: 25, Indicator, Actuator Port Direction: w/o Indicator, Actuator Port Direction on Flange Side, Temperature Specifications, Heater: 5 to 60°C, w/o Heater, Auto Switch: w/o Auto Switch, w/o Built-in Magnet, Lead Wire: 0.5m (Or None in the Case of No Switch), Number of Switches, Mounting Position: w/o Auto Switch, X: Indicates a Change
This is a legacy product. Please contact us for the latest version.sales@ocaire.com
Variation: A (Normally Closed, Bellows Seal), Flange Size: 25, Indicator, Actuator Port Direction: A (w/Indicator, Actuator Port Direction on Flange Side), Temperature Specifications, Heater: 5 to 60°C, w/o Heater, Auto Switch: M9// (w/o Auto Switch, w/Built-in Magnet)
Variation: A (Normally Closed, Bellows Seal), Flange Size: 25, Indicator, Actuator Port Direction: G (w/Indicator, Actuator Port Direction on Rear Flange Surface), Temperature Specifications, Heater: 5 to 60°C, w/o Heater, Auto Switch: M9// (w/o Auto Switch, w/Built-in Magnet)
Variation: Normally Closed, Bellows Seal, Flange Size: 25, Indicator, Actuator Port Direction: w/Indicator, Actuator Port Direction on Flange Side, Temperature Specifications, Heater: 5 to 60°C, w/o Heater, Auto Switch: w/o Auto Switch, w/Built-in Magnet, Lead Wire: -, Number of Switches, Mounting Position: -, X: -, Body Surface Treatment: -, Seal Material: -, Seal & Leakage Change: -
Variation: Normally Closed, Bellows Seal, Flange Size: 25, Indicator, Actuator Port Direction: w/Indicator, Actuator Port Direction on Rear Flange Surface, Temperature Specifications, Heater: 5 to 60°C, w/o Heater, Auto Switch: w/o Auto Switch, w/Built-in Magnet, Lead Wire: -, Number of Switches, Mounting Position: -, X: -, Body Surface Treatment: -, Seal Material: -, Seal & Leakage Change
HIGH VACUUM VALVE, HIGH VACUUM VALVE, L45, 0.6 lb
Please contact us for the latest version.sales@ocaire.com, EXTERNAL O RING FOR XLAQ-25, VACUUM SERIES, XLA NO SIZE RATING, 2.05326 lb