Angle and In-line Valves - XL
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XLA, Aluminum High Vacuum Angle Valve, Normally Closed/Bellows Seal
Series XLA are high vacuum angle valves for use in industrial applications employing high vacuum and process gases. Common industries that may use these angle valves include semiconductor, solar and other electronics production, as well as food and pharmaceutical manufacturing. XLA valves are single-acting, normally closed, with a bellows seal over the shaft and spring. The vavle opens when pressure is applied at the pilot port. The bellows assembly can be replaced, reducing maintenance costs and waste materials. The valve body is hard anodized A6063 aluminum, with 304 stainless steel valves and bellows. Numerous seal materials are available for a wide range of chmical compatibility.
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XLAV, Aluminum High Vacuum Angle Valves, Air Operated w/Solenoid Valve
Series XLAV is a high vacuum angle valve for use in industrial applications employing high vacuum and process gases. Common industries that may use these angle valves include semiconductor, solar and other electronics production, as well as food and pharmaceutical manufacturing. XLAV valves are single-acting, normally closed, with a bellows seal over the shaft and spring. The bellows assembly can be replaced, reducing maintenance costs and waste materials.
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XLG, Aluminum High Vacuum Angle Valve, Double Acting, O-ring Seal
XLG is a double acting high vacuum angle valve with an O-ring shaft seal. The XL* family shares common features with all series members. Bodies are made of aluminum for light weight and excellent thermal conductivity, resulting in a uniform temperature for the entire valve body. The body offers excellent resistance to fluorine corrosion. A low sputtering yield and the absence of heavy metals avoid wafer contamination
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XLD, Aluminum High Vacuum Angle Valve, Air Operated
High vacuum angle valve series XL provides excellent thermal conductivity results in a uniform temperature for the entire valve body and a marked decrease in the condensation of gases inside the valve. The valve does not contain heavy metals such as Ni (nickel) or Cr (chrome) and a low sputtering yield also helps to minimize heavy metal contamination of semiconductor wafers.
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XLDV, Aluminum High Vacuum Angle Valves, Air Operated w/Solenoid Valve
High vacuum angle valve series XL provides excellent thermal conductivity results in a uniform temperature for the entire valve body and a marked decrease in the condensation of gases inside the valve. The valve does not contain heavy metals such as Ni (nickel) or Cr (chrome) and a low sputtering yield also helps to minimize heavy metal contamination of semiconductor wafers.
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XLF, Aluminum High Vacuum Angle Valve, Normally Closed, O-ring Seal
XLF is a normally closed, single acting high vacuum angle valve with an O-ring shaft seal. The XL* family shares common features with all series members. Bodies are made of aluminum for light weight and excellent thermal conductivity, resulting in a uniform temperature for the entire valve body. The body offers excellent resistance to fluorine corrosion. A low sputtering yield and the absence of heavy metals avoid wafer contamination.
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XLFV, Aluminum High Vacuum Angle Valve, Normally Closed, O-ring Seal with Solenoid Valve
Series XLFV is a high vacuum angle valve for use in industrial applications employing high vacuum and process gases. Common industries that may use this angle valve include semiconductor, solar and other electronics production, as well as food and pharmaceutical manufacturing. The XLFV valves are single-acting, normally closed. The spring an shaft are exposed to gas flow, but a scraper and O-ring seal the piston pressure volume from process gases. The XLFV opens when pressure is applied at the pilot port, which is controlled by a body mounted solenoid valve. The valve body is hard anodized A6063 aluminum, with 304 stainless steel valves and an electroless nickel plated steel spring. The XLFV bellows are 316L stainless steel. Numerous seal material are available for a wide range of chemical compatibility.
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XLS, High Vacuum Angle Valve, Electromagnetic Type, Bellows Balance
High vacuum angle valve series XL provides excellent thermal conductivity results in a uniform temperature for the entire valve body and a marked decrease in the condensation of gases inside the valve. The valve does not contain heavy metals such as Ni (nickel) or Cr (chrome) and a low sputtering yield also helps to minimize heavy metal contamination of semiconductor wafers.
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XLH, High Vacuum Manual Angle Valve, Bellows Seal
High vacuum angle valve series XL provides excellent thermal conductivity results in a uniform temperature for the entire valve body and a marked decrease in the condensation of gases inside the valve. The valve does not contain heavy metals such as Ni (nickel) or Cr (chrome) and a low sputtering yield also helps to minimize heavy metal contamination of semiconductor wafers.
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XLC, Aluminum High Vacuum Angle Valve, Double Acting, Bellows Seal
XLC is a double acting high vacuum angle valve with a bellows seal for the shaft. The XL* family shares common features with all series members. Bodies are made of aluminum for lightweight and excellent thermal conductivity, resulting in a uniform temperature for the entire valve body. The body offers excellent resistance to fluorine corrosion. A low sputtering yield and the absence of heavy metals avoid wafer contamination.
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XL*Q, High Vacuum Angle Valve, Aluminum One-touch Connection & Release
High vacuum angle valve series XL provides excellent thermal conductivity results in a uniform temperature for the entire valve body and a marked decrease in the condensation of gases inside the valve. The valve does not contain heavy metals such as Ni (nickel) or Cr (chrome) and a low sputtering yield also helps to minimize heavy metal contamination of semiconductor wafers.
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XLJ, Vacuum Angle Valve w/Release Valve
High vacuum angle valve series XL provides excellent thermal conductivity results in a uniform temperature for the entire valve body and a marked decrease in the condensation of gases inside the valve. The valve does not contain heavy metals such as Ni (nickel) or Cr (chrome) and a low sputtering yield also helps to minimize heavy metal contamination of semiconductor wafers.