XLF is a normally closed, single acting high vacuum angle valve with an O-ring shaft seal.  The XL* family shares common features with all series members.  Bodies are made of aluminum for light weight and excellent thermal conductivity, resulting in a uniform temperature for the entire valve body.  The body offers excellent resistance to fluorine corrosion.  A low sputtering yield and the absence of heavy metals avoid wafer contamination.

• Air pressure applied to pilot port shifts opens piston-coupled valve
• Numerous maintenance parts available to extend useful life of valve
• Standard FKM seals, plus 8 additional seal compound options
• Auto switches mountable from 4-directions
• Optional 100°C to 150°C heaters (UL compliant lead wire)