High Vacuum Products - Slit Valves
-
XGT*, High Vacuum Slit Valve
Series XGT slit valve is suitable for the partition valve between the load lock chamber and the transfer chamber, and between the transfer chamber and the process chamber in semiconductor manufacturing equipment, etc.
-
XGTP, Parallel Seal Slit Valve for High Vacuum
Series XGTP slit valve functions as a portal between chambers of semiconductor equipment. Typical positions include between the transfer chamber and load lock chamber, or transfer and process chambers. The XGTP has been designed for easier maintenance, including easy access to replace the actuator bellows or the gate. Low particle generation and a 3 million cycle sevice life support high productivity of the semiconductor tools.