SMC Corporation of America
Elite Part Number Search


PFCQ, Flow Controller for Air, 9-300 lpm

PFCQ is a flow controller for clean, dry compressed air or nitrogen that can adjust the flow automatically in response to an analog voltage or current signal. The device combines a flow body, flow sensor, linear motor, valve and electronics to achieve the desired flow rate. Control is linear within the rated flow range. The PFCQ is grease- and oil-free with no copper or aluminum in the fluid flow path, to be suitable for FOUP and EFEM semiconductor manufacturing equipment. An optional PFG flow monitor can be connected for displaying the flow rate and switch output. Power and input signals connect via a D-sub connector. CE, UKCA, and RoHS certified.

  • Flow range: 9 to 300 lpm
  • Operating differential pressure range: 0.05 to 0.5 MPa
  • Port size: 1/2 Rc
  • Power supply: 24 VDC
  • I/O signal: 1-5 VDC or 4-20 mA
  • Accuracy: ±3% F.S.
  • Settling time: ≤ 0.5 seconds