SMC Corporation of America
Elite Part Number Search


AZ3652 & AZ4652, Diaphragm Valve, Manually Operated

Series AZ is an ultra high purity (UHP) diaphragm valve for gas delivery in semiconductor and other clean industries.  This series is available in manually operated.

  • Cleaned for high purity semiconductor applications
  • Cleanroom assembled and Helium leaked tested
  • Valve meets dimensional requirements of SEMI F36-0299, Option 1
  • User-friendly forged body
  • Compact and lightweight