SMC Corporation of America
Elite Part Number Search


Process Gas Equipment - Check Valve/Vacuum Generator/Flow Switch

  • Process Gas Check Valve

    The AP64 is an all welded and springless check valve. The unique ultraclean design has only one moving part and O-ring. The check valve provides reverse flow protection for N2 purge gas introduction and other applications.

  • Vacuum Generator

    There are four vacuum generator models to choose from - two simple vacuum generators, AP 7 and AP70, and two modules, AP71 and AP72, which include vacuum generator, N2 inlet shut off valve and N2 inlet check valve. The modules provide a compact and cost effective solution for vacuum generator installations. The individual vacuum generators provide a variety of configurations. The devices are designed for use in gas delivery systems to improve efficiency when venting for purging.

  • Flow Switch

    The AP 74 and AP 74B are safety devices to detect excess flow in UHP gas delivery systems. The switches are available with a wide variety of trip points and configurations. An online selection guide makes choosing the proper switch for a given gas, pressure and maximum flow rate as simple as a few key strokes.