High vacuum angle valve series XL provides excellent thermal conductivity results in a uniform temperature for the entire valve body and a marked decrease in the condensation of gases inside the valve. The valve does not contain heavy metals such as Ni (nickel) or Cr (chrome) and a low sputtering yield also helps to minimize heavy metal contamination of semiconductor wafers.

• High vacuum angle valve
• Type: manual, bellows seal
• Flange size: 16 ~ 50
• Heater type: H1 (80°C), H2 (100°C), H3 (120°C)
• Auto switches not available