Quick-Connect, Agency Compliances: UL / CSA Approved Microswitch, Operating Speed: 25 MSEC, Materials: Body: Polysulfone Diaphragm: Polyurethane Spring: Stainless Steel Other: Nylon, Carbon Filled Nylon, Acetal , Body: Polysulfone, Diaphragm: Polyurethane, Spring: Stainless Steel, Other: Nylon, Carbon Filled Nylon, Acetal, Temperature Range: 40° - 150° F (4° - 66

Quick-Connect, Agency Compliances: UL / CSA Approved Microswitch, Operating Speed: 25 MSEC, Materials: Body: Polysulfone Diaphragm: Polyurethane Spring: Stainless Steel Other: Nylon, Carbon Filled Nylon, Acetal , Body: Polysulfone, Diaphragm: Polyurethane, Spring: Stainless Steel, Other: Nylon, Carbon Filled Nylon, Acetal, Temperature Range: 40° - 150° F (4° - 66

Quick-Connect, Agency Compliances: UL / CSA Approved Microswitch, Operating Speed: 25 MSEC, Materials: Body: Polysulfone Diaphragm: Polyurethane Spring: Stainless Steel Other: Nylon, Carbon Filled Nylon, Acetal , Body: Polysulfone, Diaphragm: Polyurethane, Spring: Stainless Steel, Other: Nylon, Carbon Filled Nylon, Acetal, Temperature Range: 40° - 150° F (4° - 66

Quick-Connect, Agency Compliances: UL / CSA Approved Microswitch, Operating Speed: 25 MSEC, Materials: Body: Polysulfone Diaphragm: Polyurethane Spring: Stainless Steel Other: Nylon, Carbon Filled Nylon, Acetal , Body: Polysulfone, Diaphragm: Polyurethane, Spring: Stainless Steel, Other: Nylon, Carbon Filled Nylon, Acetal, Temperature Range: 40° - 150° F (4° - 66

Quick-Connect, Agency Compliances: UL / CSA Approved Microswitch, Operating Speed: 25 MSEC, Materials: Body: Polysulfone Diaphragm: Polyurethane Spring: Stainless Steel Other: Nylon, Carbon Filled Nylon, Acetal , Body: Polysulfone, Diaphragm: Polyurethane, Spring: Stainless Steel, Other: Nylon, Carbon Filled Nylon, Acetal, Temperature Range: 40° - 150° F (4° - 66

Quick-Connect, Agency Compliances: UL / CSA Approved Microswitch, Operating Speed: 25 MSEC, Materials: Body: Polysulfone Diaphragm: Polyurethane Spring: Stainless Steel Other: Nylon, Carbon Filled Nylon, Acetal , Body: Polysulfone, Diaphragm: Polyurethane, Spring: Stainless Steel, Other: Nylon, Carbon Filled Nylon, Acetal, Temperature Range: 40° - 150° F (4° - 66

Quick-Connect, Agency Compliances: UL / CSA Approved Microswitch, Operating Speed: 25 MSEC, Materials: Body: Polysulfone Diaphragm: Polyurethane Spring: Stainless Steel Other: Nylon, Carbon Filled Nylon, Acetal , Body: Polysulfone, Diaphragm: Polyurethane, Spring: Stainless Steel, Other: Nylon, Carbon Filled Nylon, Acetal, Temperature Range: 40° - 150° F (4° - 66

Quick-Connect, Agency Compliances: UL / CSA Approved Microswitch, Operating Speed: 25 MSEC, Materials: Body: Polysulfone Diaphragm: Polyurethane Spring: Stainless Steel Other: Nylon, Carbon Filled Nylon, Acetal , Body: Polysulfone, Diaphragm: Polyurethane, Spring: Stainless Steel, Other: Nylon, Carbon Filled Nylon, Acetal, Temperature Range: 40° - 150° F (4° - 66

Quick-Connect, Agency Compliances: UL / CSA Approved Microswitch, Operating Speed: 25 MSEC, Materials: Body: Polysulfone Diaphragm: Polyurethane Spring: Stainless Steel Other: Nylon, Carbon Filled Nylon, Acetal , Body: Polysulfone, Diaphragm: Polyurethane, Spring: Stainless Steel, Other: Nylon, Carbon Filled Nylon, Acetal, Temperature Range: 40° - 150° F (4° - 66

PSxx-OMU0008CN

) [FAL] 3[nG] -52No.PS-OMU0008CN-D /(66 ) 1 () 1 [F81] , 30 -53No.PS-OMU0008CN-D [F82] [F10][dUAL][LinE] <> [F82] () ( ,) AbY(Z)019 (1 3 ) /() 1 () [F82] (3) QXZ((/)(*) () (1) AZ3 <3 > () -54No.PS-OMU0008CN-D [F90] <> [F90] [on]() [oFF]() [oFF]() 2 [F90] 56 -55No.PS-OMU0008CN-D 1 2 OUT1 3 OUT2 4 5 6 FUNC 7 8 9 10 11 12 2 -56No.PS-OMU0008CN-D [F96]

Series H, DL, L, LL Self-align Fittings

M L1 L2 1 4 8 6 DEF06-02 48 20 11 16 16 50.5 46.5 17 15 13 11 19 17 14 12 14 12 6max. 4max. 3 8 DEF08-03 66 3 8 3 8 DEF10-03 10 12 53.5 89 DEF12-03 54.5 34 51 17 17 17 17 15 17 19 19 104 17 19 17 19 7max. 7max. 105 Series H, DL, L, LL Self-align Fittings Plug: DP Applicable tube O.D. Weight (g) Part No.

EX250-SEN_eng

Blue : 24 VDC (for input and controlling) 66 4 3 Black : 0 V (for input and controlling) Power supply connector 24 VDC Caution Dimensions When handling the unit or assembling/replacing units: Do not touch the sharp metal parts of the connector or plug for connecting units. Take care not to hit your hand when disassembling the unit.

ø 40, ø 50, ø 63, ø 80, ø 100 Series CLA2 Fine Lock Cylinder Double Acting, Single Rod

Bore size [mm] Stroke range [mm] BF M RT RY FT FX FY FZ Without rod boot With rod boot H ZZ f h ZZ 50 1001 to 1200 88 6 30 76 20 120 58 144 67 241 19 66 240 63 1001 to 1200 105 10 40 92 23 140 64 170 71 263 19 66 258 80 1001 to 1400 124 12 45 112 28 164 84 198 87 307 21 80 300 100 1001 to 1500 140 12 50 136 29 180 100 220 89 327 21 81 319 8 Fine Lock Cylinder: Double Acting, Single Rod Series

VCS

(mm) Electrical entry P Port size B C D E F H K L M N A Grommet: G Conduit: C Conduit terminat: T Model Q R Q R Q R S U 13.5 28 64 31 6.5 12.5 28 14 12.8 M4 4.5 22 59 44 50 99 50 66 83 1/8 VCS21 18 36 67.5 31 8.5 12.5 28 18 12.8 M4 6 22 62 44 53 99 53 66 86 1/4 22 40 81.5 36.5 11 15 32 20 19 M5 8 24 76 46 66.5 101 66.5 68 99 1/4, 3/8 VCS31 30 50 86 36.5 13.5 15 32 25 23 M5 8 24 80 46 71 101

Miniature Fittings Stainless Steel 316 MS Series Applicable Tubes: ø 3.2, ø 4, ø 6 Connection Thread: M5, R 1/8

Principal Parts Material Stainless steel 316 PVC, Nylon 66, GF30% Material Body Gasket 336 Miniature Fittings MS Series Model Model Description Application Note Model Description Application Note Barb fitting for soft tube Universal elbow 3.18/2.18 x M5 For soft nylon tube Body rotates at 360 around the stud axis M5 female x M5 male MS-5AU-3 MS-5UL KQ2 For polyurethane tube 3.18/2 x M5 P.338

VCW

(mm) Electrical entry P Port size A B C D E F H K L M Model Grommet: G Conduit: C DIN connector: D Conduit terminal: T Q R Q R Q R S Q R S 13.5 28 64 31 6.5 12.5 28 14 12.8 M4 22 45 44 43 58 40.5 46.5 99 43 66 1/8 VCW21 18 36 67 31 8.5 12.5 28 18 12.8 M4 22 46 44 44 58 41.5 46.5 99 44 66 1/4 22 40 80.5 36.5 11 15 32 20 19 M5 24 56.5 46 54.5 60 52 48.5 101 54.5 68 1/4, 3/8 VCW31 30 50 85.5

JA/JAH/JB/JS

40 50 50, 63 80 100 100 125 160 JAF20-8-100 JAF25-10-150 JAF32-10-100 JAF40-12-125 JAF40-12-150 JAF40-12-175 JAF50-16-150 JAF63-16-200 JAF80-20-250 JAF100-24-300 JAF100-27-150 JAF125-27-200 JAF160-33-200 13 17 17 22 22 22 27 27 32 41 41 41 55 7 8 8 11 11 11 13.5 13.5 16 20 20 20 24 6.6 6.6 6.6 9 9 9 9 9 11 11 11 18 22 6 6 6 9 9 9 12 12 16 19 19 21 29 21 24 24 31 31 31 41 41 50 59.5 59.5 66

XM, XY

flange) (mm) Model A 75.8 102.5 119 B 48 66 79 C 1 2 2 D 23.5 38 53 E 40 55 75 Fn 26 41 52 G 40.5 57 70 H 21.5 30 35 J XYH-25 XYH-40 XYH-50 100.2 130 178 494 XMH, XYH Series Glossary 2 Shaft Sealing Method 1 Seal Materials Bellows Bellows offer cleaner sealing with reduced particle generation and less outgassing.

JA/JAH/JB/JS

-20-250 JA100-24-300 JA100-27-150 JA125-27-200 JA160-33-200 20 25 32 30, 40 40 30, 40 50 50, 63 80 100 100 125 160 8 10 10 12 12 12 16 16 20 24 27 27 33 44 49.5 49.5 60 60 60 71.5 71.5 90.5 110 110 123 165 17.5 19.5 19.5 20 20 20 22 22 27 32 35 34 38 30.5 34 34 38 38 38 44.5 44.5 57.5 68 68 77 99 1 1.5 1 1.25 1.5 1.75 1.5 2 2.5 3 1.5 2 2 30 35 38 42 21 24 24 31 31 31 41 41 50 59.5 59.5 66

Body Ported Type Vacuum Ejector ZH Series

Body ported ZM Vacuum pressure reached ZL S 90 kPa L 48 kPa (ZH05 to 13DA) 66 kPa (ZH15 to 20DA) ZH ZH ZH Port (SUP./VAC./EXH.) size Note) Silencer can only be selected for EXH. port with One-touch tting. The silencer part number depends on the size of the EXH. port.