XL-OMV0002

-2. 1 2 3 3 2 1 4 162540 50,63,80,100,160 O O O O 50 4 5 6 3 3 2 1 4 2 1 Nm 4 0.7 XLC-16 1.5 -25 2.5 -40 6 -50 6 -63 15 -80 20 -100 25 -160 O O O O , O , 13 XL-OMV0002 6-3.O 1 2 3 4 5 3 2 1 4 162540 50,63,80,100,160 O O 50 O ( ) 3 2 1 Nm 4 0.7 XLC-16 1.5 -25 2.5 -40 6 -50 6 -63 15 -80 20 -100 25 -160 O O ,O , 14 XL-OMV0002 VR 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101

XLC-25,40 ∗ -F7NJ ∗ - ∗ Series

Insert the cover. 13 XL-OMO0001-A Revision history Limited warranty and Disclaimer SR 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2012 SMC Corporation All Rights Reserved 14 XL-OMO0001-A

XL-OMY0002

3 O 4 1 M O M O O O O O O 4 5 O S M XLD-25 S XLD-40,50,160 S XLD-63,80,100 S S 25 4050160 O S 18 XL-OMY0002 6 7 c Nm c O XLD-25 0.360.1 S XLD-25 0.630.1 O S S 0.3MPa S c c O O O O O 8 3 b b Nm a Nm 1 2 4 XLD-25 1.5 0.3 -40 2.5 -50 6 -63 6 -80 15 -100 20 -160 102 a M M0.2MPa b b O a 19 XL-OMY0002 Revision history 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101

XLDV Series

(Ensure there is no fiber or dust on it.) 1(P) SUP 13 XL-OMM0005-A Revision history Safety Instructions P P P Po o o o 1st Printing :NQ 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2009 SMC Corporation

XLGR Series

Perform final torque with same numerical order. 18 XL-OMP0001 Revision history 1st Printing :PR 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2009 SMC Corporation All Rights Reserved 19 XL-OMP0001

High Vacuum L Type Valve

Insert the Cover. 14 XL*-OMJ0005-C Revision C Renewal 2018.9 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2011 SMC Corporation All Rights Reserved XL*-OMJ0005-C

XL-OMY0003

XL-OMY0003 5 10 []18 12 O 1) FKM M 10 FKM : 110 Pa <> 9 XL-OMY0003 6 6-1. 1 1P4P5 10 XL-OMY0003 6-2 1 2 b 3 1 2 O 4 a aa b O O 101

XLJ- -*G1 Series 25 40

Tighten the bolts gradually in numerical order (alternately) with bonnet assembly held. 11 XL-OMU0002-A Revision history A 40 size added WU 1st Printing :UX 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer

XMC/XYC Series

Perform final torque with same numerical order. 15 XM-OMP0002-A Revision history A Limited warranty and Disclaimer Ro 1st Printing :PU 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2012 SMC Corporation

XMD/XYD Series

When tightening bolt b, tighten manually until the O ring is compressed, then perform extra tightening in diagonal order. 15 XL-OMP0003-A Revision history A Limited warranty and Disclaimer Ro 1st Printing :PV 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice

XMH/XYH Series

Place the O ring on the O ring mounting surface. 12 XM-OMP0005-A Revision history A Limited warranty and Disclaimer Ro 1st Printing :PU 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2012 SMC Corporation

XG_-OMV0028

XGT300-9-7S AS568-177 XGT300-4-9S XGT300-2-5S ASSY 6 XGT300-50AS XGT31*-50336-*C 9 D XGT300-50DS XGT31*-50336-*F XGT0402-9-12S XGT31*-50336-*C C016 30D006 100 12 (AMP) 6. 11 - 7. 0.45MPa O O O O O ,O ASSY ASSY O O 4-3 0.45MPa ASSY ASSY 4-3 0.45MPa ASSY ASSY ASSY ASSY ASSY 12 - A 13 - 14 - 15 - Revision history A : ASSY 2021.11 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101

CYV_EN

Model Selection 2 Revision 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2011 SMC Corporation All Rights Reserved

Industrial Filter

) V band tightening 5-6 [Restart and air discharge] (1) When restart the operation after the replacement of the element, follow the procedure of section 4 Operation. (2) When restart the operation, open the upper air relief port to discharge air. 12/12 FGX-OM-L008-A Revision history Revision A Safety instructions added Maintenance Part No. added (Sv) 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101

FGE-C

() (P7 1 ) ) 10/12 FGX-OM-L009-B 5-3 (P7 1) ) 2~3 3 3 () FGESAFGELA FGESBFGELB FGESCFGELC 6570L250 6570 L500 6570 L250 6570 L750 6570 L250 (mm) 2630 4045 3338 5155 2744 11/12 FGX-OM-L009-B 5-4 O O ((1)(2)) (1) (2) 5-5 V V O a V b V V (ab) V T (c) () ()V (P7,1) V V V CY-24S T c V 5-6 4. 12/12 FGX-OM-L009-B Revision history A (Sv) 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101

FGG-E

When restart the operation, open the upper air relief port to discharge air. 8/8 FGX-OM-L010 URL http://www.smcworld.com Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021,JAPAN Phone: +81 3 5207 8249 Fax: +81 3 5298 5362 Specifications are subject to change without prior notice and any obligation the part of the manufacturer. 2008 SMC Corporation All Rights Reserved

FGX-OM-L011

77S 5/8 FGX-OM-L011 2 2. 0.7MPa 80 27L,43L,52L 19.5kg,23kg,30kg 0.1MPa 3 M12 23 4 1 V 2 6 [] 23 6/8 FGX-OM-L011 5 1 INLETOUTLET O (1)(2) (2) AL-25S(:NBR) AL-22S(:FKM) (1) 2 3 23 7/8 FGX-OM-L011 4 O O 1 2 (1) (2) 5 (a)(b) V [(c)] [(c)] O 1 V V V V O (a) V (b) V (c) 6 8/8 FGX-OM-L011 URL http://www.smcworld.com Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101

FGX-OM-N027

P5:Postscript 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2020 SMC Corporation All Rights Reserved

Return Filter

Maintenance space Port size Dimension to draw the element Drain flushing dimension 06,08 290mm from the lower end of the bowl 100mm from the lower end 10,12 380mm from the lower end of the bowl of the bowl 16 430mm from the lower end of the bowl 20,24 540mm from the lower end of the bowl 17 / 17 FGX-OM-F001-A Revision history Revision A: Full scale revision 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101

IP80-OM00019

H 27 E110 F110 E195 F275 911:P368010-27 7 9:P368010-26 () 28 () E195 F275 E110 F110 29 ) 911:P368010-27 7 9:P368010-26 () 30 ) 31 () 911:P368010-27 7 9:P368010-26 () 32 () 33 Revision history A 2021.7.30 13-2-37-27-3 B 2022.4.25 8.(3)8.(6) 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications