SMC Corporation of America
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3 ISA-21-() 4 1 3 2 ISA-21-2/3(8 ) ISA-21-4/5/6(14 ) / / / / M12 -37No.PS-OMT0001CN-E 3 () ISA3-A DC+ OUT1 OUT2 DCISA3-B DC+ OUT1 OUT2 DCVX2 (2 )VX2 -38No.PS-OMT0001CN-E 3 ISA-21ISA-12ZS-31-B ISA-16ZS-31-C ISA-15 ISA-20 2.6 ISA-14 -39No.PS-OMT0001CN-E 3 () ISA-21ISA-12ZS-31-B ISA-16ZS-31-C ISA-15 ISA-20 E210-U01 2 ISA-17 2.6 Y200T-A -40No.PS-OMT0001CN-E

In the unlikely event that malfunction is caused by ground, please disconnect the unit from ground. 31 These safety instructions are intended to prevent hazardous situations and/or equipment damage. These instructions indicate the level of potential hazard with the labels of Caution, Warning or Danger.

VZM550-01-30R/B/G/Y-X219 Panel mounting hole 31 1.5 1.5 30.5 M5 x 0.8 25.5 3 (Pilot exhaust port) 0.8 to 7.5 (112) (143) PE R2 P R1 Symbol 13.6 (B) 2 (A) 4 86.5 35 19.8 17 13.6 B A 35 10.8 14 12 3 (R2) 1 (P) 5 (R1) 1.6 18 13 3 21 25 0.5 MPa supply 14.7 10.8 VM VM T.T.

Refer to the switch output modes list for the relationship between the set values and operation (page 31).

This produuct Your system Circulating fluid temperature 31 Serial communication Discharge temperature 31 Circulating fluid display temperature Heat 31 radiation 1 Circulating fluid set temperature 30 Offset temperature 30 1 5.4 Description of the Screen HRS Series 5-34 DOC1001322 Chapter 5 Display and Setting of Various Functions Example of MODE 2 When the offset temperature is -1oC, circulating

This produuct Your system Circulating fluid temperature 31 Serial communication Discharge temperature 31 Circulating fluid display temperature Heat 31 radiation 1 Circulating fluid set temperature 30 Offset temperature 30 1 HRL Series 5.4 Description of the Screen 5-31 HRX-OM-Y098 Chapter 5 Display and Setting of Various Functions Example of MODE 2 When the offset temperature is -1oC, circulating

(The rack has a specified mounting direction, so this should be checked when removing it from the body.) 33 30 31 26 29 25 23 18 21 22 19 21 31 17 15 3 10 14 26 11 5 12 19 9 12 14 1 11 26 4 2 6 15 4 36 - Assembly procedure 1. Apply the grease provided in the seal kit to parts shown in Table (17).

Type 31 How to Order Applicable solenoid valve Note) SY113--M3 SY113A--M3 SY123--M3 SY123A--M3 Applicable blanking plate assembly SY100-77-1A SS3Y1 31 05 Stations 02 2 stations P R 20 20 stations R port M5 x 0.8 P port M5 x 0.8 Note) SY113(A) and SY123(A) cannot be mounted on the same manifold.

Pressure Switch for Vacuum: ZSE2-0RIndicator light (Red) Pressure setting trimmer Indicator light (Red) Pressure setting trimmer ZSE2-0RZSE2-0R-L ZSE2-0R-C ZSE2-0R-CL ZSE2-0R-CN L SET H L SET H 15 15 9 9 2 x M2.5 x 41L Mounting thread 2 x M2.5 x 41L Mounting thread 25 25 31 31 600(3000) 42 600(3000) 49.5 40 40 3 3 20 20 18 18 16 16 13 11 13 11 9 9 Vacuum supply port 3.3 Vacuum supply port

D D 10 14 B B 24 31 A 8 11 A 7 10 Model ZP3-T035U;K3-B3 ZP3-T035U;K6-B3 Note) ;in the table indicates the pad material "N, S, U, F, GN, GS."

D D 10 14 B B 24 31 A 8 11 A 7 10 Model ZP3-T035U;K3-B3 ZP3-T035U;K6-B3 Note) ;in the table indicates the pad material "N, S, U, F, GN, GS."

Type 31 How to Order Applicable solenoid valve Note) SY113--M3 SY113A--M3 SY123--M3 SY123A--M3 Applicable blanking plate assembly SY100-77-1A SYJ SS3Y1 31 05 VK Stations VZ 02 2 stations P R 20 VT 20 stations R port VP M5 x 0.8 P port M5 x 0.8 VG Note) SY113(A) and SY123(A) cannot be mounted on the same manifold.

Applicable air dryer Port size Rc A B C D E Weight [kg] 555 617 IDF6E I D F 31 IDF-BP300 IDF1E IDF-BP304 1.5 IDF-BP301 IDF2E 628 443 1.6 IDF-BP302 IDF3E 642 445 549 440 129 3.3 IDF8E 627 647 IDF11E 3/4 187 3/8 56 114 21 IDF-BP316 IDF15E1 1 41 210 710 774 136 5.3 IDU-BP305 IDU3E 3/8 202 506 572 100 1.6 I D U Refrigerant R407C (HFC) IDF D IDU-BP306 IDU4E 1/2 175 603 625 110 2.3 31 IDU-BP307

D D 10 14 B B 24 31 A 8 11 A 7 10 Model ZP3-T035U;K3-B3 ZP3-T035U;K6-B3 Note) ;in the table indicates the pad material "N, S, U, F, GN, GS."

2030 10 1% * -7No.PS-OMG0005CN-E 0 01 28 C2 PSE56 0 (01MPa) (1) C2 1 (0-101kPa) 3 (-100100kPa) *PSE200 4 (0500KPa) (15V) 01 R1/8(M5) 28 (420mA) 02 R1/4(M5) C01 Rc1/8 N01 NPT1/8(M5) N02 NPT1/4(M5) A2 URJ1/4 B2 TSJ1/4 ZS-28-C 1 Rc1/4 ZS-31-X175 1 NPT1/4 ZS-31-X186 1 Rc1/8 ZS-31-X188 1 NPT1/8 ZS-31-X189 1 15[V]F.S.=514[V] (1F.S.40.010.04[V]) F.S. ( 25[]ON-OFF (1K 1M A/D 5V A/D

No. 20() 31 ,20 ,31 CEU5 , , 31 5 - CEU5 (X4) 90,4 ,1 2 A B 11 12 11 10 10 (4 ) 1 (1 ) 90/UPDOWN 90UPDOWN 1 /,, (4 ) 5 ,5 ,4 (4 ) ,20 20 (31 ) 5 ,,31 ( ,No.) ,(),S.STOP , (RS-232C BCD ) ,,RS-232CBCD (,,, ,) (/) RS-232C RS-232C ,PLC(RS-232C )CEU5 BCD (CEU5*B-*) BCD PLC , 6 - 4 CEU5 CEU5-D CEU5P CEU5P-D CEU5B CEU5B-D CEU5PB CEU5PB-D (DIN ) ,, LCD() 6 (),(/) 2ROM

D E F G H I ZS-31-X188 20 9 R1/8 R1/8 14 1.5 ZS-31-X189 20 9 NPT1/8 NPT1/8 14 1.5 ZS-31-X175 29 13 R1/4 R1/4 17 1.6 ZS-31-X186 29 13 NPT1/4 NPT1/4 17 1.6 -14No.PS-OMG0006-D Revision history A: For B: Complete revision C: Contents revised in several places. D: Contents revised in several places.

COB-ID 1th_data 2th_data 3th_data 4th_data 5th_data 6th_data 7th_data 8th_data 420h 12 34 56 78 9A BC DE FF Output status of Slave1 and Slave2 COB-ID 1th_data 2th_data 3th_data 4th_data 5th_data 6th_data 7th_data 8th_data 6320h/01h 32 bit (Output 0 to 31 bit ) 6320h/02h 32 bit (Output 32 to 63 bit) 420h (Slave1) 12 34 56 78 9A BC DE FF 0007h/00h 32 bit 6320h/01h 32 bit (Output 0 to 31 bit

RSG-L Bore size: 40, 50 Workpiece transfer direction 36 (12) 98 + Stroke 31 M45 x 1.5 (Rc 1/8, NPT 1/8, G 1/8) 13.5 14 16 16 7.5 2 10 9 (Rc 1/8, NPT 1/8, G 1/8) 60 0 0.05 20 R38 24 25 14 A 80 60 8 38 18 80 60 67 + Stroke 110 + Stroke 4 x 9 through 177 + 2 stroke Built-in One-touch fittings Tubing O.D.

55 103 115 152 56 90 M10 x 1.5 depth 20 M14 x 2 depth 25 17 depth 12 Long Stroke Bracket Mounting Stroke Bracket mounting stroke Bore size (mm) 20 25 32 40 50 Bore size (mm) 20 25 32 40 50 Bore size (mm) 20 25 32 40 50 Stroke range (mm) Q O P R S T U V W X Y Z R Y 100 st or more M6 x 1 depth 9 1/8 12 12 26 12 82 48 40 39 71 157 14 79 250 to 400 125 st or more M6 x 1 depth 13 1/8 12 12 31