Slider Type Ball Screw Drive/11-LEFS Series

Dimensions: Ball Screw Drive 11-LEFS40 6H9 depth 7 ( ) +0.030 0 (170) 106 Body mounting Note 1) reference plane 60 4 x M8 x 1.25 thread depth 13 LEF 58 LEJ LEL 74 7 6H9 depth 7 ( ) +0.030 0 LEM L Cable length 250 LEY A (Table traveling distance) Note 2) 86 (165) (86) 90 13 88 [(90)] (3.1) Stroke (90) [88] 61 LES [Origin] Note 4) Origin Note 3) 4 [2] 2 [4] 65 48.5 20 LEPY LEPS (68) 8 20 31

Series 10-VQD1000 4 Port Direct Operated Poppet Solenoid Valve

6.5 15 2 2 2 2 2 8 0.5 0.5 P=11 10 M5: M5 thread 2n-M5 4(A), 2(B) port 4 L2 35 L1 38 42 M plug connector (M) Air Preparation Equipment Pressure Control Equipment Flow Control Equipment Pressure Switches/ Pressure Sensors Stations 1 2 3 4 5 n D side U side Direct manual override (Non-locking) 24 15 43 L plug connector (L) n: Stations Dimensions n L 11 12 13 14 15 16 17 18 19 20 28 20 39 31

Support Guide/11-LEFG Series

Body fixed A Maintenance Warning L Model Screw size Max. tightening torque [Nm] A [mm] L [mm] LEFl16 M3 0.6 3.5 20 LEFl25 M4 1.5 4.5 24 LEFl32 M5 3.0 5.5 30 LEFl40 M6 5.2 6.6 31 Maintenance frequency Perform maintenance according to the table below.

Series AK1000

Intermediate flow (Tied-diaphragm) AZ AK KT BP Diaphragm Valves Check Valves Vacuum Generators Flow Switches Technical Data/ Glossary of Terms Precautions SL AP Recommendations Regulators Option High inlet pressure Changes from the standard type are: AK1410T AK1415T Option Other Parameters HR Source pressure Proof pressure (Inlet) Burst pressure Vacuum to 3000 psig (20.7 MPa) 4500 psig (31

Series AP500

High inlet pressure Changes from the standard type are: 30 0.21 AP1210 AP1215 Option Other Parameters Vacuum to 3000 psig (20.7 MPa) ) 4500 psig (31 MPa) 9000 psig (62 MPa) HR Source pressure 20 0.14 Proof pressure (Inlet) Burst pressure 10 0.07 ) 3/4 inch face seal fittings rated to 2400 psig (16.5 MPa) maximum.

Basic Type/Direct Mount Type

B Counter bore depth C T T HP Y 0 -0.1 Note 1) L 2 x P (Piping port) 4 x J x E TC 4 x 3.2 X F WP WP D GW QW 4 x LD PW WS GP 4 x 6.5 CY3R6 2 x 4 x MM Thread depth M Switch rail W K HS Z + Stroke Q + Stroke G G HR CR CY3R25 to 63 Note 1) 50, 63: L 0 0.2 CY3R10 to 20 (mm) A 7 9 10.5 9 8.5 10.5 10 14 15 F 5.5 6.5 8 9 8.5 10.5 13 17 18 HC 18 25 31 38 43 54 66 84 96 HP 10.5 14 17 24 23.5 29 36

AZ1000

Intermediate flow (Tied-diaphragm) AZ AK KT BP Diaphragm Valves Check Valves Vacuum Generators Flow Switches Technical Data/ Glossary of Terms Precautions SL AP Recommendations Regulators Option High inlet pressure Changes from the standard type are: AZ1415T AZ1410T Option Other Parameters HR Source pressure Proof pressure (Inlet) Burst pressure Vacuum to 3000 psig (20.7 MPa) 4500 psig (31

CJP

B C E G H K MM NN 5 st 10 st F 15 st R 5 st 10 st S 15 st W Q 5 st 10 st Z Bore size (mm) 6 10 15 A 15 st M3 x 0.5 3.5 3 8.5 9 41.5 26.5 34.5 19.5 27.5 12.5 3 6 32.5 13.9 25.5 12 18.5 7 M10 x 1.0 9 M4 x 0.7 3.5 5 12 46 28 39 21 32.5 14.5 4 6 34 22 27 19 20.5 10 M15 x 1.5 13 12 M5 x 0.8 4.2 6 14 50 29 43.5 22.5 37.5 16.5 5 7 36 31 29.5 27 23.5 12 M22 x 1.5 20 19 6-2-16

7

retainer Wear ring Cushion seal Cushion valve seal Magnetic field resistant auto switch Rc1/4 Hexagon socket head cap screw M4 x 0.7 x 14 L 2 pcs. per switch 2 pcs. per switch Low carbon steel wire rod Rolled steel Rolled steel Resin Urethane NBR NBR Hexagon socket head cap screw 28 M4 x 0.7 x 8 L Steel wire Zinc chromated Hexagon socket head cap screw 29 M3 x 0.5 x 16 L Steel wire D30 31

Series MHR2 11- 2 Finger Rotary Actuated Air Gripper 22- Size: 10, 15, 20, 30

Switch: MDHR2-10R 11223 x M3 x 0.5 thread depth 6 P.C.D.24 (Mounting thread) MDHR2-10E port location 112233.4 B 32 36 120 120 D A 32 +0.02 2 x 3 0 depth 6 9.5 Finger closing port Finger opening port M3 x 0.5 M3 x 0.5 25 25 Finger closing port M3 x 0.5 M3 x 0.5 (A, B common view) Finger opening port M3 x 0.5 thread depth 4 4 x M3 x 0.5 thread depth 6 (A, B common view) Vacuum suction port 31

Series MXP/MXPJ6 11- ø6, ø10, ø12, ø16 22- Air Slide Table

Auto switch operating range Auto switch operating range 15 40.5 20.5 Model Model 25 50.5 30.5 30 59 39 10 35 15 25 46.5 34.5 30 55 43 10 31 19 15 36.5 24.5 A B A B A B A B A B A B 11-/22-MXP10 11-/22-MXP10 11-/22-MXP12 11-/22-MXP12 3 5 11-/22-MXP16 11-/22-MXP16 832 Air Slide Table MXP/MXPJ6 11221122Dimensions: MXPJ6 5 C 11-/22-MXPJ6-5 depth 2.5 2.5 7 H 5 3 3.5 4 x M3 x 0.5

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

1.0 5.5 1 7.5 12 +0.08 0 6 1.25 8.5 M10 x 1.25 14 +0.08 0 7.5 2 10 M12 x 1.25 16 11.5 3 14.5 M14 x 1.5 +0.08 0 Trunnion mounting taps for the width across flats NA are not attached to 80 and 100 types. 18 (mm) Bore size (mm) Stroke range (mm) 20 25 32 40 50 63 80 100 GA GB H H1 I J K KA MM A AL B1 C D E F 35 12 26 12 5 M4 x 0.7 depth 7 5 M8 x 1.25 Up to 200 14 8 13 15.5 2 18 12 6 40 12 31

15

76 75 30 1 5.5 11 62 12.5 17.5 73 14 9 23 92 23 DCY1SG20-Z RJ1007LN 40 1.5 73 M6 x 1 Rc1/8 NPT1/8 G1/8 70 90 90 38 4.5 9 16.5 21.5 M10 x 1 87 18.5 13.5 32 111 23 CY1SG25-Z RJ1412LN 40 1.5 73 M6 x 1 Rc1/8 NPT1/8 G1/8 70 99 90 42 4.5 9 16.5 21.5 M14 x 1.5 96 18.5 13.5 32 111 44 -X CY1SG32-Z RJ2015HN M8 x 1.25 Rc1/8 NPT1/8 G1/8 40 75 119 110 50 3 5.5 11 91 18.5 24.5 M20 x 1.5 116 18.5 12.5 31

Process Valve

Model Main port 1(A), 2(B) A B C D E F G H I J K L M N P Q R S T U VNB2-10A VNB2-15A VNB3-20A VNB4-25A 3 8 1 2 3 4 1 144.5 55 125.5 52 26 4.5 24.3 2.3 25 34 63 42 28 14 72.5 80.5 75 80 84.5 124 60.5 73 135.5 151.5 137 153 156 172 62 72 31 36 5.5 6.5 28.3 33.3 2.3 2.3 30 35 43 49 80 90 50 60 35 44 17.5 22 84 100 92 108 84 90 89 95 93.5 99.5 Port size: 10A, 15A, 20A, 25A Vacuum pilot K L N

Aluminum High Vacuum Angle Valve

(b) XLC50, 63, 80, 100, 160/ Air operated D E C E C E XLA Fn (KF flange) Fd (K flange) (a) XL XL XLQ (c) XM XY J DK XSA H B XVD A XGT G CYV A (mm) J A B C D E Note 1) Fn Fd G H K Model XLC-50 XLC-63 XLC-80 XLC-100 XLC-160 70 183 80 31 10.5 75 52 77 29 10.5 95 88 209 100 39 11 87 70 76.5 36 9 110 90 250 117 45.5 11 114 83 105 44 9 130 108 317.5 154 55 11 134 102 139 58 9 180 138 339 200 65

XM, XY

to 40/Angle type C D L2 (KF flange) Fn Fc C (Fc) L1 (CF flange) J H B G A A (mm) Model A 110 120 171 B 38 48 66 C 1 1 2 D 30 40 55 Fn 34 70 Fc 17 26 41 G 40 39 63 H J P.C.D L1 6 x 4.4 6 x 6.6 L2 XMC-16 XMC-25 XMC-40 40 50 65 26 28 36 P.C.D 27 P.C.D 58.7 XMC-50 to 80/Angle type C L2 D Fd Fc L1 (KF flange) Fn C (K flange) (CF flange) H J K B G A A (mm) Model A 183 209 250 B 80 100 117 C 31

1

3/8 XSA2-43V 67 22 25 11.5 5 10 78 67.5 54 61.5 67.5 59.5 61.5 XSA3-32S 63 31.5 40 24.5 1/4 32 35 52.5 28 69.5 57.5 104.5 73.5 XSA3-32V 56 XSA3-43S 64.5 31 3/8 XSA3-43V 67 82.5 72 58.5 66 72 64 66 5 Normal Close High Vacuum Solenoid Valve XSA Series Dimensions: (Rc, NPT) Female Thread Grommet: G Female thread type D 300 G F C H E P Fitting size 2 1 Q B 2 x M5 thread depth M A Q Grommet

Non-contact Gripper

Air supply port Urethane pad Recommended sensor Pressure sensor PSE540 Series Flow sensor PFMV Series For the method of selecting and using a sensor, refer to the operation manual. 728 Non-contact Gripper XT661 Series Low Profile Cyclone Type (-X260) Made to Order Low profile Thickness: 1.8 mm Weight: Approx. 1.3 g* Outer body diameter (mm) 20 25 Air consumption [L/min (ANR)] 31 31 * Outer

100

Exhaust block surface to be held (Width across flats 35) 31 ZL1/ZL3/ZL6 Series Specific Product Precautions 2 Be sure to read this before handling the products. Refer to the back cover for safety instructions.

ZP3

Form w 1 Material e Buffer spec. r Buffer stroke t Vacuum inlet M5 x 0.8 Effective thread depth 4 3 42 24.5 11 6 48 27 14.5 10 58 31 20.5 N S U F GN GS J K A ZP3 Y 04 06 08 B B5 15 61 44.5 10 20 68.5 52 JB K Dimensions Per Vacuum Inlet: One-touch Fitting 20 B Model 4 D E F Fitting part min. hole size Fitting part no. Vacuum inlet direction q Pad dia.