Aluminum High Vacuum Angle Valve

(b) XLC50, 63, 80, 100, 160/ Air operated D E C E C E XLA Fn (KF flange) Fd (K flange) (a) XL XL XLQ (c) XM XY J DK XSA H B XVD A XGT G CYV A (mm) J A B C D E Note 1) Fn Fd G H K Model XLC-50 XLC-63 XLC-80 XLC-100 XLC-160 70 183 80 31 10.5 75 52 77 29 10.5 95 88 209 100 39 11 87 70 76.5 36 9 110 90 250 117 45.5 11 114 83 105 44 9 130 108 317.5 154 55 11 134 102 139 58 9 180 138 339 200 65

XM, XY

to 40/Angle type C D L2 (KF flange) Fn Fc C (Fc) L1 (CF flange) J H B G A A (mm) Model A 110 120 171 B 38 48 66 C 1 1 2 D 30 40 55 Fn 34 70 Fc 17 26 41 G 40 39 63 H J P.C.D L1 6 x 4.4 6 x 6.6 L2 XMC-16 XMC-25 XMC-40 40 50 65 26 28 36 P.C.D 27 P.C.D 58.7 XMC-50 to 80/Angle type C L2 D Fd Fc L1 (KF flange) Fn C (K flange) (CF flange) H J K B G A A (mm) Model A 183 209 250 B 80 100 117 C 31

1

3/8 XSA2-43V 67 22 25 11.5 5 10 78 67.5 54 61.5 67.5 59.5 61.5 XSA3-32S 63 31.5 40 24.5 1/4 32 35 52.5 28 69.5 57.5 104.5 73.5 XSA3-32V 56 XSA3-43S 64.5 31 3/8 XSA3-43V 67 82.5 72 58.5 66 72 64 66 5 Normal Close High Vacuum Solenoid Valve XSA Series Dimensions: (Rc, NPT) Female Thread Grommet: G Female thread type D 300 G F C H E P Fitting size 2 1 Q B 2 x M5 thread depth M A Q Grommet

Non-contact Gripper

Air supply port Urethane pad Recommended sensor Pressure sensor PSE540 Series Flow sensor PFMV Series For the method of selecting and using a sensor, refer to the operation manual. 728 Non-contact Gripper XT661 Series Low Profile Cyclone Type (-X260) Made to Order Low profile Thickness: 1.8 mm Weight: Approx. 1.3 g* Outer body diameter (mm) 20 25 Air consumption [L/min (ANR)] 31 31 * Outer

100

Exhaust block surface to be held (Width across flats 35) 31 ZL1/ZL3/ZL6 Series Specific Product Precautions 2 Be sure to read this before handling the products. Refer to the back cover for safety instructions.

ZP3

Form w 1 Material e Buffer spec. r Buffer stroke t Vacuum inlet M5 x 0.8 Effective thread depth 4 3 42 24.5 11 6 48 27 14.5 10 58 31 20.5 N S U F GN GS J K A ZP3 Y 04 06 08 B B5 15 61 44.5 10 20 68.5 52 JB K Dimensions Per Vacuum Inlet: One-touch Fitting 20 B Model 4 D E F Fitting part min. hole size Fitting part no. Vacuum inlet direction q Pad dia.

Rotary Cylinder Series MRQ Size: 32, 40 1

. + 5 95 (mm) E Mounting screw Y Q Stroke 1 to 4 6 to 9 11 to 14 16 to 19 21 to 24 26 to 29 31 to 39 41 to 49 51 to 65 66 to 74 76 to 90 91 to 99 1 to 4 6 to 9 11 to 14 16 to 19 21 to 24 26 to 29 31 to 39 41 to 49 51 to 65 66 to 74 76 to 90 91 to 99 Size 58.5 ( 5 Stroke)/2 61 ( 10 Stroke)/2 61 ( 15 Stroke)/2 63.5 ( 20 Stroke)/2 61 ( 25 Stroke)/2 63.5 ( 30 Stroke)/2 63.5 ( 40

RSH

mechanism+ cancel cap+ lever detection switch Stroke W Bore (mm) R S T U V WB X Y q SRSH Bore size A, #2 (#2+#5) : RSH Bore size -lll-D 50 30 72 40 21 2 5.5 15.5 32 5 10 24 SRSH Bore size A, #3 (#3+#5) : RSH Bore size -lll-C SRSH Bore size A, #4 (#4+#5) : RSH Bore size -lll-S 63 30 87.5 47 24.5 3.5 6.4 16 38.5 5 10 24 SRSH Bore size B, #1 (#1+#5) : RSH Bore size -lll-DC 80 40 109 54 31

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

1.0 5.5 1 7.5 12 +0.08 0 6 1.25 8.5 M10 x 1.25 14 +0.08 0 7.5 2 10 M12 x 1.25 16 11.5 3 14.5 M14 x 1.5 +0.08 0 Trunnion mounting taps for the width across flats NA are not attached to 80 and 100 types. 18 (mm) Bore size (mm) Stroke range (mm) 20 25 32 40 50 63 80 100 GA GB H H1 I J K KA MM A AL B1 C D E F 35 12 26 12 5 M4 x 0.7 depth 7 5 M8 x 1.25 Up to 200 14 13 8 15.5 2 18 12 6 40 12 31

RZQ

43 31.5 43.5 28.5 40.5 30 42 34 46 33 45 50 29.5 40 33.5 44 34 44.5 31 41.5 32.5 43 36.5 47 35.5 46 RB 63 33 43 37 47 37.5 47.5 34.5 44.5 36 46 40 50 39 49 J D-A7H,A80H D-F7,D-F79F D-J79,J79W D-F7W D-F7BAL D-F7NTL DD-F7V D-F7WV D-F7BAVL D-A9V D-J79C D-A79W D-P5DWL D-F9BAL D-A73C D-A80C D-M9V D-F9WV D-A7,A80 Bore size (mm) -X 20U U U U U U U U U U 32 31.5 32.5 38.5 35 38 34 27 29 26.5 Data

Compact Cylinder

M8 9 21 22.5 56.5 74 50 5 45 56.5 9 6 12 80 100 50 120 M8 50 10 31 M8 Single clevis bracket Hexagon socket head cap screw (accessory) CL CD hole H9 CZ M CX M CU CZ CW RR (mm) Hexagon socket head cap screw Bore size (mm) -0.2 -0.6 CDH9 CL CU CW CX CZ M RR 20 25 32 40 50 63 8 3 12 20 16 35 22 9 M5 8 3 12 20 16 40 26 9 M5 10 5.5 12 22 26 45 32.5 9.5 M6 12 5.5 15 25 28 51 38 12 M6 12 6.5 15

CJP

B C E G H K MM NN 5 st 10 st F 15 st R 5 st 10 st S 15 st W Q 5 st 10 st Z Bore size (mm) 6 10 15 A 15 st M3 x 0.5 3.5 3 8.5 9 41.5 26.5 34.5 19.5 27.5 12.5 3 6 32.5 13.9 25.5 12 18.5 7 M10 x 1.0 9 M4 x 0.7 3.5 5 12 46 28 39 21 32.5 14.5 4 6 34 22 27 19 20.5 10 M15 x 1.5 13 12 M5 x 0.8 4.2 6 14 50 29 43.5 22.5 37.5 16.5 5 7 36 31 29.5 27 23.5 12 M22 x 1.5 20 19 6-2-16

MLGC

150 108 140 M 8 135 110 4 9 9 104 86.5 16 15 62 88 37 29 160 176 125 165 M 8 160 75, 100, 125, 150, 200, 250, 300 110 4 9 9 104 86.5 16 15 62 88 37 30 160 176 125 165 M 8 160 115 4 12 11 142 95 19 18 67 190 210 135 96 200 M10 42 194 35 J K L U I O T GR N S W P GL GQ M Q R V Bore size (mm) 20 25 32 40 93 60 5.5 80 35 16 4 25 26 50 M5 x 0.8 4 50 14 53 105 M6 x 1 112 103 70 9 95 40 20 7 32 31

08-cs1-e

Rod seal CS1-180A-PS Piston seal CS1-200A-PS 24, 29 and 31 are non-replaceable parts, so they are not included in the seal kit.

Size: 1/2, Model Combination: AW+AL, Port Size: 1/2, Size 41, Accessory: Float Auto Drain, N.C., Size 31 & 41, Pressure Relief Valve: w/o Valve, Option: Metal Bowl w/Sight Glass, Size 31 & 41, Handle Orientation: -

Size: 3/8, Model Combination: AF+AR, Port Size: 3/8, Size 31, Accessory: None, All Sizes, Pressure Relief Valve: Downstream Valve, Option: Metal Bowl w/Sight Glass, Size 31 & 41, Handle Orientation: -

Size: 3/8, Model Combination: AF+AR+AL, Port Size: 3/8, Size 31, Accessory: None, All Sizes, Pressure Relief Valve: w/o Valve, Option: Metal Bowl w/Sight Glass, Size 31 & 41, Handle Orientation: Upward Handle

Size: 1/2, Model Combination: AF+AR+AL, Port Size: 1/2, Size 41, Accessory: Float Auto Drain, N.C., Size 31 & 41, Pressure Relief Valve: Downstream Valve, Option: Metal Bowl w/Sight Glass, Size 31 & 41, Handle Orientation: -

Size: 1/2, Model Combination: AF+AR, Port Size: 1/2, Size 41, Accessory: Float Auto Drain, N.C., Size 31 & 41, Pressure Relief Valve: Downstream Valve, Option: Metal Bowl w/Sight Glass, Size 31 & 41, Handle Orientation: -

Size: 1/2, Model Combination: AF+AR, Port Size: 1/2, Size 41, Accessory: Float Auto Drain, N.O., Size 31 & 41, Pressure Relief Valve: w/o Valve, Option: Metal Bowl w/Sight Glass, Size 31 & 41, Handle Orientation: -