Precautions 1

(n 2) 2 D-C7 D-C80 15 + 45 10 15 50 50 + 45 (n 2) (n = 2, 4, 6...) D-H7 D-H7W D-H7NF (n 2) 2 15 + 45 10 15 60 60 + 45 (n 2) (n = 2, 4, 6...) D-C73C D-C80C D-H7C (n 2) 2 15 + 50 10 15 65 65 + 50 (n 2) (n = 2, 4, 6...) (n 2) 2 D-B5/B64 D-G5NTL 15 + 50 75 + 55 (n 2) 10 15 75 (n = 2, 4, 6...) (n 2) 2 20 + 50 D-B59W 75 + 55 (n 2) 15 20 75 (n = 2, 4, 6...)

CJ2-Z 10-/11- Series 21-/22- ø10, ø16 Air Cylinder

CJ2-Z Series 10, 16 Air Cylinder 10-/1121-/22RoHS How to Order Cushion Clean series 10 11 Relief type Vacuum suction type Nil A Rubber bumper (Standard) Air cushion 10 D L 16 60 A R C J 2 M9BW Z B 21 D L 16 60 R C J 2 M9BW Z B Number of auto switches Nil Built-in magnet Head cover port location Nil S n 2 pcs. 1 pc. n pcs.

MGP

2-Rc 3/8 (plug) DL GA GC 2-Rc 3/8 PB GB J JA 10 WB Q PA + Stroke C + Stroke B + Stroke A + Stroke WA Z JB 6H7 depth 10 FA FB S K E G 6H7 depth 10 With front lock 7 6 HN 10 5 6H7 DM 23 b a Section XX detail e c d End lock mechanism (Locking type manual release) T-slot dimensions (mm) 30 Bore size (mm) a b c d e With rear lock 13.3 20.3 12 8 22.5 80 15.3 23.3 13.5 10 30 100 (mm) Standard stroke

3

Operating Range (mm) Auto switch model Bore size 12 16 20 25 32 40 50 63 D-M9/M9V D-M9W/M9WV D-M9A/M9AV D-A9/A9V 6.5 5 5 5 5.5 5 4 3 11 9.5 9.5 9 9 10 7.5 6 D-F7/J79 D-F7V/J79C D-F7W/F7WV D-J79W D-F79F/F7BA D-F7BAV/F7NT 7.5 6.5 6.5 6 6 6 Since this is a guideline including hysteresis, not meant to be guaranteed (assuming approximately 30% dispersion).

Brake mechanism added

11 D-G5/K59/G5W D-K59W/G5BA D-G5NT/G59F D-G39/K39 D-G39C/K39C D-A5/A6 5 6 6.5 6.5 7 D-B5/B64 D-A59W 13 13 14 15 14 9 9 10 10 11 D-B59W 14 14 17 16 18 D-A9 and D-A9V cannot be mounted on 50.

Compact Cylinder with Solenoid Valve/

Minimum Stroke for Auto Switch Mounting (mm) D-M9 10 D-M9V 5 D-M9W 15 D-M9WV 10 D-A9 10 D-A9V 5 Number of auto switches mounted Bore size (mm) 32 1, 40 50 2, 63 1 10 5 15 15 10 10 2 1 The outline dimensions for 5 mm stroke will be the same as those for 10 mm stroke. 2 The outline dimensions for 10 mm stroke will be the same as those for 15 mm stroke. 7 Prior to Use Auto Switches Common Specifications

Non-rotating Double Double Power Power Cylinder Cylinder (without Series MGZ Series MGZR non-rotating mechanism)

(Same surface) 50 50 50 D-A9 2 pcs. (Different surfaces) 15 15 15 1 pc. 15 15 10 2 pcs. (Same surface) 25 25 25 D-A9V 2 pcs. (Different surfaces) 10 10 10 1 pc. 5 5 5 2 pcs. (Same surface) 30 30 30 D-M9V 2 pcs. (Different surfaces) 10 10 10 1 pc. 5 5 5 2 pcs. (Same surface) 55 55 55 D-M9 D-M9W 2 pcs. (Different surfaces) 15 15 15 1 pc. 15 15 10 2 pcs.

Table of Contents

C D E F Dimensions Part no.

90

ZK2 CH A 2 04 L A KQ2P 06 Applicable stations 02 04 06 08 10 For 2 stations manifold For 4 stations manifold For 6 stations manifold For 8 stations manifold For 10 stations manifold d Model and dimensions D Applicable size d 6 8 1/4" 5/16" Weight (g) Note A L D Symbol 06 08 07 09 White White Orange Orange 18 20.5 18 20.5 35 39 35 39 8 10 8.5 10 1 2 1 2 Connector type 1 2 D sub-connector (

CRBB-OM00004

Rotary actuator with vertical angle adjustment unit Part number for joint unit Size For D-M9 Excluding auto switch CRBW---A D-M9 Size Size CRBW---AM 10 P611070-1M P611070-1 10 P811010-3 10 P211070-10 15 P611090-1M P611090-1 15 P811020-3 15 P211090-10 20 P611060-1M P611060-1 20 P811030-3 20 P211060-10 30 P611080-1M P611080-1 30 P811040-3 30 P211080-10 40 P611010-1M P611010-1 40 P811050-3

15

Operating Range Auto Switch Mounting Bracket (Switch spacer) Auto switch model Bore size (mm) 6 to 40 Auto switch model Bore size (mm) 6 10 15 20 25 32 40 D-M9 D-M9V D-M9W D-M9WV D-M9A D-M9AV D-M9 D-M9V D-M9W D-M9WV D-M9A D-M9AV 3 3 2.5 2.5 3 2.5 3 BMY3-016 D-A9 D-A9V D-A9 D-A9V 5.5 5.5 5.5 5.5 5.5 5.5 6 Note) Values which include hysteresis are for guideline purposes only, they are not a

Plate Cylinder with Lock Series MLU

model D-A7 D-A80 D-A73C D-A80C 32 40 50 Number of auto switches D-P5DWL D-F7V D-J79C D-F7WV D-F7BAVL D-A7, A80 D-A7H, A80H D-A73C, A80C 13 13 13 13 Different side(s) 20 Same side 75 D-A79W 13 14 13 14 2 pcs. 1 pc. 5 5 10 5 15 10 15 15 D-F7, J79 D-F7V, J79C D-F7W, F7WV D-J79W, F7NTL D-F7BAL, F7BAVL D-F79F 20 Only size 40 and 50 can be mounted. 7 6.5 6.5 6.5 D-F7LF 7.5 7 5 7 7 5 D-P5DWL

MU

CU Minimum Stroke for Auto Switch Mounting (mm) D-A7lH, A80H D-F7lW, J79W D-A79W D-F7l, J79 D-F7BA, F7NT D-F7lF CQS D-A7l D-A80 D-A73C D-A80C Number of auto switches D-F7lV D-J79C D-F7lWV CQ2 MU 2 pcs. 5 10 15 15 1 pc. 5 5 10 15 Construction Component Parts No.

Plate Cylinder

7 7 7 3 3 3 3 63 7.5 7.5 7.5 7.5 3.5 3.5 3.5 3.5 Minimum Stroke for Auto Switch Mounting D-M9 D-M9V D-A9 D-A9V D-M9W D-M9WV D-A9AL D-A9AVL Number of auto switches mounted 1 10 10 2 10 15 Operating Range Auto switch model Size 25 32 40 50 63 D-M9/M9V D-M9W/M9WV D-M9AL/M9AVL 5.5 5.5 5.5 5 5 D-A9/A9V 7.5 8 8 7 6.5 Since the operating range is provided as a guideline including hysteresis

Clamp Cylinder with Lock

Auto switch model Auto switch 63 32 40 50 9 4 7 11 32 40 50 63 D-A93 D-M9B D-M9BW D-B54 8 4 6.5 10 8 3.5 5.5 10 8 4 5 9 D-A93 D-M9B D-M9BW D-B54 Note) Note) Note) Note) qBMA2-032 wBJ3-1 qBMA2-040 wBJ3-1 qBMA2-050 wBJ3-1 qBMA2-063 wBJ3-1 BA-32 BA-04 BA-05 BA-06 Since this is a guideline including hysteresis, not meant to be guaranteed. (Assuming approximately 30% dispersion.)

VQ5000

U D U D Note) Indicate on a manifold specification h i f i d i 10 Base Mounted Type Series VQ5000 Electrical wiring specifications Standard wiring D sub connector assembly (AXT100-DS25) wire colors 015 030 050 D sub connector Terminal No. Polarity Lead wire color Dot marking 1 2 3 .

New

Torr (mmHg) 10-12 10-11 10-10 10-9 10-8 10-7 10-6 10-5 10-4 10-3 10-2 10-1 1 10 102 3. Mount a valve with its coil position upward, not downward. 10-12 10-11 10-10 10-9 10-8 10-7 10-6 10-5 10-4 10-3 10-2 10-1 1 101 102 103 104 105 106 107 108 109 Pa Vacuum piping direction: if the system uses a vacuum pump, we ask that you install the vacuum pump on the secondary side.

5 Port Solenoid Valve, Series VQC

Connector wiring diagram (mixed wiring) Connector type manifold 6 A 4 A 3 A 1 A 5 B 2 B Output 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 The use of multi-pin connectors to replace wiring inside manifold blocks provides flexibility when adding stations or changing

High Rigidity Slider Type Ball Screw Drive/11-LEJS Series

LEF Auto switch model D-M9NV D-M9N D-M9B D-M9BV D-M9PV D-M9P Electrical entry direction In-line Perpendicular In-line Perpendicular In-line Perpendicular LEJ LEJ Wiring type 2-wire 3-wire NPN PNP Output type LEL Applicable load IC circuit, Relay, PLC 24 VDC relay, PLC Power supply voltage 5, 12, 24 VDC (4.5 to 28 V) LEM Current consumption 10 mA or less Load voltage 24 VDC (10 to 28 VDC

MQQ

RR CL + Stroke RR 15 6.5 12 8 6 10 A + Stroke 18 8 16 10 9 16 20 10 20 10 10 20 20 18 36 12 10 25 22 18 36 12 10 28 8 Series MQQ Accessory Dimensions Rod end thread adapter Rod end nut d NN MM Rod D C C B H E F A B H Applicable bore size (mm) Applicable bore size (mm) Part no.