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5 Port Pilot Operated Solenoid Valve Metal Seal, Plug-in/Non Plug-in Series VZS3000 For details about certified products conforming to international standards, visit us at www.smcworld.com.

DOZ is not available. 2 Other Option Electrical entry 3 position closed center G: Grommet Lead wire length 300 mm L: L plug connector With lead wire LN: L plug connector Without lead wire LO: L plug connector Without connector D: DIN terminal 3 3 position exhaust center 4 M: M plug connector With lead wire MN: M plug connector Without lead wire MO: M plug connector Without connector DO:

https://www.smcpneumatics.com/pdfs/vzs3000_valve.pdf

Smooth Vent Valve

Do not tighten the initial air supply flow any further than the minimum supply flow position, as this may result in component damage, or in increased time needed to attain a vacuum in the vacuum chamber due to a decline in the displacement capabilities of the gas accumulation part (bellows chamber). 1.

https://www.smcpneumatics.com/pdfs/xvd2.pdf

SGC321B-1620Y-5DO

Model: 3 (SGC300), Valve Type: 1 (Normally Closed), Seal Material: B (FKM), Pressure Range: 16 (0 to 1.6 MPa), Thread: Rc, Port Size: 20 (3/4), Pilot Valve: Y (0.35 W Type, V116), Voltage: 5 (24 VDC), Electrical Entry: DO (DIN Terminal Without Connector)

https://www.smcpneumatics.com/Part-Builder-Links_ep_2458-1.html?https://partbuilder.smcpneumatics.com/product-search-results/SGC321B-1620Y-5DO

SGC321B-16T20Y-5DO

Model: 3 (SGC300), Valve Type: 1 (Normally Closed), Seal Material: B (FKM), Pressure Range: 16 (0 to 1.6 MPa), Thread: T (NPTF), Port Size: 20 (3/4), Pilot Valve: Y (0.35 W Type, V116), Voltage: 5 (24 VDC), Electrical Entry: DO (DIN Terminal Without Connector)

https://www.smcpneumatics.com/Part-Builder-Links_ep_2458-1.html?https://partbuilder.smcpneumatics.com/product-search-results/SGC321B-16T20Y-5DO

SGC221A-16N15Y-3DO

Model: 2 (SGC200), Valve Type: 1 (Normally Closed), Seal Material: A (NBR), Pressure Range: 16 (0 to 1.6 MPa), Thread: N (NPT), Port Size: 15 (1/2), Pilot Valve: Y (0.35 W Type, V116), Voltage: 3 (110 VAC (115 VAC) 50/60 Hz), Electrical Entry: DO (DIN Terminal Without Connector)

https://www.smcpneumatics.com/Part-Builder-Links_ep_2458-1.html?https://partbuilder.smcpneumatics.com/product-search-results/SGC221A-16N15Y-3DO

SGC321A-16N20Y-3DO

Model: 3 (SGC300), Valve Type: 1 (Normally Closed), Seal Material: A (NBR), Pressure Range: 16 (0 to 1.6 MPa), Thread: N (NPT), Port Size: 20 (3/4), Pilot Valve: Y (0.35 W Type, V116), Voltage: 3 (110 VAC (115 VAC) 50/60 Hz), Electrical Entry: DO (DIN Terminal Without Connector)

https://www.smcpneumatics.com/Part-Builder-Links_ep_2458-1.html?https://partbuilder.smcpneumatics.com/product-search-results/SGC321A-16N20Y-3DO

SGC321A-1620Y-5DO

Model: 3 (SGC300), Valve Type: 1 (Normally Closed), Seal Material: A (NBR), Pressure Range: 16 (0 to 1.6 MPa), Thread: Rc, Port Size: 20 (3/4), Pilot Valve: Y (0.35 W Type, V116), Voltage: 5 (24 VDC), Electrical Entry: DO (DIN Terminal Without Connector)

https://www.smcpneumatics.com/Part-Builder-Links_ep_2458-1.html?https://partbuilder.smcpneumatics.com/product-search-results/SGC321A-1620Y-5DO

Is it possible to change the pressure gauge port size to mount a different pressure gauge or fitting on an AR10-M5-A (Rc1/16)?

Note) Do not apply pressure higher than the max. display pressure to the pressure gauge during pressure adjustment; otherwise, the pressure gauge may be damaged.

https://www.smcpneumatics.com/Part-Builder-Links_ep_2458-1.html?https://smccatalog.partbuilder.smcpneumatics.com/support/faq/en-jp/?ca_id=vacuum-regulators&fa_id=10959

Is it possible to change the pressure gauge port size to mount a different pressure gauge or fitting on an AR10-M5-A (Rc1/16)?

Note) Do not apply pressure higher than the max. display pressure to the pressure gauge during pressure adjustment; otherwise, the pressure gauge may be damaged.

https://www.smcpneumatics.com/Part-Builder-Links_ep_2458-1.html?https://smccatalog.partbuilder.smcpneumatics.com/support/faq/en-jp/?ca_id=combination-units&fa_id=10972

TIH13B-16

, Applicable Tube Size: Inch Size, Specification: Standard Product, Maximum operating pressure(MPa): 1, Operating Temperature(°C): Air, Inert Gas: -20 to 200 / Water: 0 to 100 (Do Not Freeze)

https://www.smcpneumatics.com/Part-Builder-Links_ep_2458-1.html?https://inventory.partbuilder.smcpneumatics.com/vona2/detail/221006395705/?HissuCode=TIH13B-16

TIH13BU-16

, Applicable Tube Size: Inch Size, Specification: Standard Product, Maximum operating pressure(MPa): 1, Operating Temperature(°C): Air, Inert Gas: -20 to 200 / Water: 0 to 100 (Do Not Freeze)

https://www.smcpneumatics.com/Part-Builder-Links_ep_2458-1.html?https://inventory.partbuilder.smcpneumatics.com/vona2/detail/221006395705/?HissuCode=TIH13BU-16

TIH13N-16

, Applicable Tube Size: Inch Size, Specification: Standard Product, Maximum operating pressure(MPa): 1, Operating Temperature(°C): Air, Inert Gas: -20 to 200 / Water: 0 to 100 (Do Not Freeze)

https://www.smcpneumatics.com/Part-Builder-Links_ep_2458-1.html?https://inventory.partbuilder.smcpneumatics.com/vona2/detail/221006395705/?HissuCode=TIH13N-16

TIH13R-16

, Applicable Tube Size: Inch Size, Specification: Standard Product, Maximum operating pressure(MPa): 1, Operating Temperature(°C): Air, Inert Gas: -20 to 200 / Water: 0 to 100 (Do Not Freeze)

https://www.smcpneumatics.com/Part-Builder-Links_ep_2458-1.html?https://inventory.partbuilder.smcpneumatics.com/vona2/detail/221006395705/?HissuCode=TIH13R-16

TIH19B-16

, Applicable Tube Size: Inch Size, Specification: Standard Product, Maximum operating pressure(MPa): 0.7, Operating Temperature(°C): Air, Inert Gas: -20 to 200 / Water: 0 to 100 (Do Not Freeze)

https://www.smcpneumatics.com/Part-Builder-Links_ep_2458-1.html?https://inventory.partbuilder.smcpneumatics.com/vona2/detail/221006395705/?HissuCode=TIH19B-16

TIH19BU-16

, Applicable Tube Size: Inch Size, Specification: Standard Product, Maximum operating pressure(MPa): 0.7, Operating Temperature(°C): Air, Inert Gas: -20 to 200 / Water: 0 to 100 (Do Not Freeze)

https://www.smcpneumatics.com/Part-Builder-Links_ep_2458-1.html?https://inventory.partbuilder.smcpneumatics.com/vona2/detail/221006395705/?HissuCode=TIH19BU-16

TIH19N-16

, Applicable Tube Size: Inch Size, Specification: Standard Product, Maximum operating pressure(MPa): 0.7, Operating Temperature(°C): Air, Inert Gas: -20 to 200 / Water: 0 to 100 (Do Not Freeze)

https://www.smcpneumatics.com/Part-Builder-Links_ep_2458-1.html?https://inventory.partbuilder.smcpneumatics.com/vona2/detail/221006395705/?HissuCode=TIH19N-16

TIHA01B-16

, Applicable Tube Size: Inch Size, Specification: Standard Product, Maximum operating pressure(MPa): 1, Operating Temperature(°C): Air, Inert Gas: -20 to 200 / Water: 0 to 100 (Do Not Freeze)

https://www.smcpneumatics.com/Part-Builder-Links_ep_2458-1.html?https://inventory.partbuilder.smcpneumatics.com/vona2/detail/221006395705/?HissuCode=TIHA01B-16

TIHA01BU-16

, Applicable Tube Size: Inch Size, Specification: Standard Product, Maximum operating pressure(MPa): 1, Operating Temperature(°C): Air, Inert Gas: -20 to 200 / Water: 0 to 100 (Do Not Freeze)

https://www.smcpneumatics.com/Part-Builder-Links_ep_2458-1.html?https://inventory.partbuilder.smcpneumatics.com/vona2/detail/221006395705/?HissuCode=TIHA01BU-16

TIHA01N-16

, Applicable Tube Size: Inch Size, Specification: Standard Product, Maximum operating pressure(MPa): 1, Operating Temperature(°C): Air, Inert Gas: -20 to 200 / Water: 0 to 100 (Do Not Freeze)

https://www.smcpneumatics.com/Part-Builder-Links_ep_2458-1.html?https://inventory.partbuilder.smcpneumatics.com/vona2/detail/221006395705/?HissuCode=TIHA01N-16

TIHA01R-16

, Applicable Tube Size: Inch Size, Specification: Standard Product, Maximum operating pressure(MPa): 1, Operating Temperature(°C): Air, Inert Gas: -20 to 200 / Water: 0 to 100 (Do Not Freeze)

https://www.smcpneumatics.com/Part-Builder-Links_ep_2458-1.html?https://inventory.partbuilder.smcpneumatics.com/vona2/detail/221006395705/?HissuCode=TIHA01R-16