LFE-OMZ0013

K Key-lock function Function that prevents changes to the settings of the product (disables button operation). The resolution of set and display values. If the minimum setting unit is 1 L/min, the display will change in 1 L/min steps, e.g. 10..11..12 L/min. M Minimum setting unit O Operating fluid temperature Range of fluid temperature that can be used by the product.

DOC1003077

K Operation start D status setting Sets operation start status. Select with [] or [] keys pump/fan operation disabled) 2: Start up in the RUN mode after the power is turned on.

HEC-OM-Y008

Corporation All Rights Reserved D Air filter (air inlet) J Circulating fluid OUT (Rc1/4) E Filter cover K Circulating fluid IN/Drain (Rc1/4) F Screws for filter maintenance L PE connector(M4) M Power supply cable (Accessory, with Ferrite core)

High Vacuum L Type Valve

to 150 for high temperature type) Operating pressure Pa(abs) Atmospheric pressure to 1 x 10-6 Conductance l/s Note 1) 5 14 45 80 160 200 Internal 1.3 x 10-10 for the standard material (FKM) at ambient temperatures , excluding gas permeation Leakage Pam3/s External 1.3 x 10-11 for the standard material (FKM) at ambient temperatures , excluding gas permeation Flange type KF (NW) KF (NW), K

High Vacuum L Type Valve

to 150 for high temperature type) Operating pressure Pa(abs) Atmospheric pressure to 1 x 10-5 Conductance l/s Note 1) 5 14 45 80 160 200 Internal 1.3 x 10-10 for the standard material (FKM) at ambient temperatures , excluding gas permeation Leakage Pam3/s External 1.3 x 10-10 for the standard material (FKM) at ambient temperatures , excluding gas permeation Flange type KF (NW) KF (NW), K

XLA Series

for high temperature type) Operating pressure Pa(abs) Atmospheric pressure to 1 x 10-6 Conductance l/s Note 1 5 14 45 80 160 200 300 800 Internal 1.3 x 10-10 for the standard material (FKM) Leakage at ambient temperatures , excluding gas permeation Pam3/s External 1.3 x 10-11 for the standard material (FKM) at ambient temperatures , excluding gas permeation Flange type KF (NW) KF (NW) , K

XLA- ∗ -F7NJ ∗ - ∗ Series

Bonnet assembly (Maintenance part) (excluding the body, external seal and accessories) Auto switch (Option) Thermal resistance magnet (for auto switch) Pilot port 7 Heater (Option) Bellows holder (Material: SUS304) External seal (Maintenance part) 3 6 Bellows (Material: SUS316L) 5 Valve (Material: SUS304) 2 Valve seal (Maintenance part) C D J 4 C E E Body (Material: A6063) (KF flange) (K

XLC-25,40 ∗ -F7NJ ∗ - ∗ Series

() Port (closed by applying pressure) 1 ) ( Bonnet assembly (maintenance part) () (SUS304) () Pilot Port (opened by applying pressure) 7 Heater (option) Bellows holder (material: SUS304) 3 () (SUS316L) External seal (maintenance part) 6 (SUS304) Bellows (material: SUS316L) 5 Valve (material: SUS304) () 2 Valve seal (maintenance part) 4 (A6063) C C C C D D D D Body (material: A6063) K

XLDV Series

Atmospheric pressure to 1 x 10-6 Main pumping 14 45 80 160 200 300 800 Conductance l/s Note 1 Initial pumping 0.53 28 2.511 48 418 6.531.5 6.531.5 Internal 1.3 x 10-10 for the standard material (FKM) at ambient temperature, excluding gas permeation Leakage Pam3/s External 1.3 x 10-11 for the standard material (FKM) at ambient temperature, excluding gas permeation Flange type KF(NW) KF(NW),K(

IP8101 Series

lever angle Set button 1s Mode button 1s Fig. 44-1 Balance current being output Fig. 44-2 No.DIG-31900-OM002 58 K Mode button 1s Set button 1s Set button 1s Normal end See fig. 44 for details After balance Current adjustment Balance current being evaluated Set button 1s Balance current readjustment Fig. 44-3 L Mode button 1s Set button 1s Readjustment necessary Normal end Set button

Pressure Sensor for General Fluids

Current consumption 10 mA or less Protection Protected against inverse connection Analogue output: 4 to 20mA Maximum load impedance: Analogue output Output type Analogue output: 1 to 5 V Output impedance: Approx. 1 k 500 or less (at 24 VDC) 100 or less (at 12 VDC) Analogue output Accuracy (Ambient temperature at 25 oC) 1.0%F.S. Linearity 0.5%F.S. Repeatability 0.2%F.S.

PSxx-OMS0004CN

OUT() DC(-) DC(+) PSE57--28 420 mA N.C. 500 (24 V ) 100 (12 V ) OUT() DC(-) -13No.PS-OMS0004CN-D (A/D ) () 20 2030 -14No.PS-OMS0004CN-D PSE570 PSE573 PSE574 01MPa -100100 kPa 0500 kPa 3.0MPa 600 kPa 1.5MPa oC) oC) (25 ) 2F.S.(050 3F.S.(050 oC) oC) 3F.S.(-1060 4F.S.(-1060 PSE57PSE57--28 DC1224 V1010% 10 mA 420 mA 15 V 1 k 500 (24 V ) 100 (12 V ) (25 oC) 1.0F.S. 0.5F.S. oC)

Pressure Sensor for General Fluids

Current consumption 10 mA or less Protection Protected against inverse connection Analogue output: 4 to 20 mA Maximum load impedance: Analogue output Output type Analogue output: 1 to 5 V Output impedance: Approx. 1 k 500 or less (at 24 VDC) 100 or less (at 12 VDC) Analogue output Accuracy (Ambient temperature at 25 oC) 2.5%F.S. Linearity 0.5%F.S. Repeatability 0.5%F.S.

CEx-OMQ0010

j k L 2. 7. 8. 1. 9. 2. 10. 11. ()70% ()35% 1. 15% 1. 2. 3 3. () 1. 0.1~1.0MPa 0.3~0.5MPa 0~60 ()35% 2. ) 1. 1. 2. 2. 3. 1. 1. ( 2. 6 ) 3. 2. 50% 4. (6 ) 3. 5. 4. () 0.5 5. 1 2 3. F.G. 1. 4. 1 ISO VG32 1. 2. 1. 2. 3. 1. 2 1. 2. 2. 14.5mT CE2 1.5~2 15,000 18cm 3. 4. IP65 5.

MONOSASHI-KUN WITH BRAKE CONTROLLER

Place where damages of thunder are expected. k. Place where vibration or impact is directly 6. Consider possible loss of power sources. given to the products. Measures should be taken to protect against human injury and machinery damage in the event that there is a loss of air pressure, electricity or hydraulic power. l.

CEx-OMQ0013

k. l. 2. 8. ,,, 9. 1. 10. 2. 11. 3. 1. 1. 0.11.0MPa 0.30.5MPa :060 2. 3 2. 1. 3. 5 2. 35% 1. ( 6 ) ()70% ()35% 2. 50% ( 6 ) 15% 3. 1. 4. () 0.5 3. 5. F.G. 4. 1. 1. 2. 2. 3. 1. 1. 2. 2 3. 2. 1.52 4. 5. 1. 1ISO VG32 1. 2. 1. 2. 3. 1. 2. 1. 2. 14.5mT CE2 3. 15,000 18cm 4. 3. 4. IP65 5. (DC1224V) 1. 1-1 CEU2 1 2 32 32 1 16 P1 P2 P3 .

CEx-OMG0106

Place where damages of thunder are expected. k. Place where vibration or impact is directly 6. Consider possible loss of power sources. given to the products. Measures should be taken to protect against human injury and machinery damage in the event that there is a loss of air pressure, electricity or hydraulic power. l.

MRQB-OM0002

A 4.4 4.4 5 B C E A D F 4.5 32 5.7 40 4.8 4-4. 4.5 4.6 (POSI LOCK) ISEL(MECHALOCK) NBK(Clamp Lock) 32 PSL-K-12 MA-12-26 CLH-1218 40 PSL-K-14 MA-14-28 CLH-1423 17 4-5. 4.6 4-6. 4.74.7 2 4.7 32 Rc1/8 Rc1/8 M50.8 40 Rc1/8 Rc1/8 M50.8 4.7 , A) , , , B) , ,1.52 18 5. 5. 5. 5. ,, 5-1.

Parallel Type Air Gripper

boss assembly Mounting thread for the adapter MHZ2-M MHZ-A1009 MHZ-A1609 MHZ-A2009 MHZ-A2509 Seal MHZ2-E MHZ-A1010 MHZ-A16010 MHZ-A2010 MHZ-A2510 Lever assembly MHZ-AA1004 MHZ-AA1604 MHZ-AA2004 MHZ-AA2504 3 * Finger option: 1= Side tapped, 2= Through hole, 3= Flat type fingers Replacement part/Grease pack part no.: GR-S-010 (10 g) * End boss type: W= One-touch-fitting for coaxial tubing, K=

MHx-OMU0057

MHZ-A1008 MHZ-A1608 MHZ-A2008 MHZ-A2508 Ass'y MHZ2-M MHZ-A1009 MHZ-A1609 MHZ-A2009 MHZ-A2509 MHZ2-E MHZ-A1010 MHZ-A16010 MHZ-A2010 MHZ-A2510 Ass'y MHZ-AA1004 MHZ-AA1604 MHZ-AA2004 MHZ-AA2504 3 1= 2= 3= /GR-S-010 (10g) W= K= M=M5 E= Assy E 17 - 32,40 / / / / 11 1 12 2 13 3 14 C 4 15 A 5 16 6 17 NO 7 18 NC 8 19 NBR 9 20 NBR 10 21 NBR MHZ2-32 MHZ2-40 MHZ32-PS MHZ40-PS