Manifold Regulator Modular Type ARM2500/3000 Series

SRF Flow rate (L/min (ANR)) Example of mounting ITV Pressure Characteristics (Representative Value) Initial setting P1 = 0.7 MPa P2 = 0.2 MPa Q = 20 L/min (ANR) Bracket IC ITVH Set nut Outlet pressure (MPa) ITVX PVQ VY1 VBA VBAT Model Part no.

AS

Dimensions Meter-out type Meter-in type F E D B A C J G K H L B Model A MIN. MAX. MIN. MAX.

20

1 Note Component Parts i u r e q w Description No. Material o Body L Body R Main valve Valve guide Nozzle holder Port Elbow Cover Ring Arm Spring Main valve seal Lever 1 2 3 4 5 6 7 8 9 10 11 12 13 PBT PBT PBT POM t Aluminium alloy Aluminium alloy Anodized Anodized Only for the VMG12 PBT Stainless steel Stainless steel PBT !4 Stainless steel !5 !0 HNBR PBT !

5 Port Pilot Operated Solenoid Valve Metal Seal, Plug-in/Non Plug-in Series VZS3000 For details about certified products conforming to international standards, visit us at www.smcworld.com.

Note Platinum silver Platinum silver Black Black q Description Sub-plate Body Aluminum die-casted Stainless steel w e Mounting bolt and gasket are not attached. : Thread type Spool/Sleeve Adapter plate Thread Type r Resin t Resin End plate Nil Standard Rc y Resin Piston NPT N Option T NPTF G F Replacement Parts Description Material Part no. No.

Slit Valve

The product should be operated after thoroughly reading the manual and understanding its contents. 530 Slit Valve XGT Series Construction i u w q !2 t !0 y r !1 OPEN o e CLOSE OPEN For 200 mm wafer For 300 mm wafer XGT22 XGT31 XGT22 (200 mm wafer type) Component Parts XLA No.

In-line Air Filter

Applicable filter Element size Quantity ZFC-EL-1 ZFC1 5 x 3 x L11 10 ZFC-EL-2 ZFC3 6 x 4 x L25 10 2 Cover Resin PBT 2 ZFC-EL-3 ZFC5 12 x 8 x L20 10 3 Element Sintered resin 1 ZFC-EL-4 ZFC7 16 x 12 x L25 10 4 O-ring HNBR 2 5 Bracket Resin PBT 1 w OUT e w One-touch fitting r q IN r One-touch fitting t Element Replacement Procedure 1.

ZSE5/ISE5

~~===rr-N"~e-_ ~~ =4It PNP, and analog output.

Series: SS5Y3 (SY3000 Manifold), Model: 10S6 (Side-Ported, Serial Interface, EX600), SI Unit: Q (DeviceNetâ„¢), SI Unit Common, End Plate: 4 (Negative Common, M12 Connector), I/O Unit Stations: 1 Station, Valve Stations: 4 Stations, P,E Port, SUP/EXH Assembly: E (Port Location D Side, Internal Pilot, Built-in Silencer), A,B Port Size: N1 (ø1/8" One-touch Fitting), Mounting: D (DIN Rail Mounting

Series: SS5Y3 (SY3000 Manifold), Model: 10S6 (Side-Ported, Serial Interface, EX600), SI Unit: Q (DeviceNetâ„¢), SI Unit Common, End Plate: 4 (Negative Common, M12 Connector), I/O Unit Stations: 1 Station, Valve Stations: 4 Stations, P,E Port, SUP/EXH Assembly: E (Port Location D Side, Internal Pilot, Built-in Silencer), A,B Port Size: N1 (ø1/8" One-touch Fitting), Mounting: D (DIN Rail Mounting

Pilot: External Pilot, Voltage: 24VDC, Lead Wire: Grommet Lead Wire 0.3m, Surge Suppressor: None, Port Size: 1/2, Thread: G, Passage: External Pilot (N.O/N.C), Option: Continuous Duty, CE Compliant: -

Pilot: External Pilot, Voltage: 24VDC, Lead Wire: Grommet Lead Wire 0.3m, Surge Suppressor: None, Port Size: 1/2, Thread: NPTF, Passage: External Pilot (N.O/N.C), Option: Continuous Duty, CE Compliant: -

Pilot: External Pilot, Voltage: 220VAC 50/60HZ, Lead Wire: Grommet Lead Wire 0.3m, Surge Suppressor: Surge Suppressor, Port Size: 3/4, Thread: NPT, Passage: External Pilot (N.O/N.C), Option: Continuous Duty, CE Compliant: -

Pilot: External Pilot, Voltage: 100VAC 50/60HZ, Lead Wire: Grommet Lead Wire 0.3m, Surge Suppressor: None, Port Size: 1, Thread: NPT, Passage: External Pilot (N.O/N.C), Option: Continuous Duty, CE Compliant: -

Pilot: External Pilot, Voltage: 24VDC, Lead Wire: DIN Connector, Surge Suppressor: None, Port Size: 3/4, Thread: NPT, Passage: External Pilot (N.O/N.C), Option: Continuous Duty, CE Compliant: -

Pilot: External Pilot, Voltage: 24VDC, Lead Wire: DIN Connector, Surge Suppressor: None, Port Size: 1, Thread: NPT, Passage: External Pilot (N.O/N.C), Option: Continuous Duty, CE Compliant: -

Pilot: External Pilot, Voltage: 110VAC 50/60HZ, Lead Wire: DIN Connector, Surge Suppressor: None, Port Size: 3/4, Thread: NPT, Passage: External Pilot (N.O/N.C), Option: Continuous Duty, CE Compliant: -

Pilot: External Pilot, Voltage: 24VDC, Lead Wire: Grommet Lead Wire 0.3m, Surge Suppressor: None, Port Size: 1/2, Thread: NPT, Passage: External Pilot (N.O/N.C), Option: Continuous Duty, CE Compliant: -

Pilot: External Pilot, Voltage: 24VDC, Lead Wire: Grommet Lead Wire 0.3m, Surge Suppressor: None, Port Size: 1, Thread: NPT, Passage: External Pilot (N.O/N.C), Option: Continuous Duty, CE Compliant: -

Pilot: External Pilot, Voltage: 110VAC 50/60HZ, Lead Wire: DIN Connector, Surge Suppressor: None, Port Size: 1, Thread: NPT, Passage: External Pilot (N.O/N.C), Option: Continuous Duty, CE Compliant: -

Pilot: External Pilot, Voltage: 110VAC 50/60HZ, Lead Wire: DIN Connector, Surge Suppressor: Light & Surge Suppressor, Port Size: 1, Thread: NPT, Passage: External Pilot (N.O/N.C), Option: Continuous Duty, CE Compliant: -