71 53 B A 58 31 8 16 16 125 With flow rate adjustment 25 30 Breathing port Breathing port PB PB PA PA M5 x 0.8 x 5 Pilot port Rc1/8 (NPT1/8) Pilot port LVP50-16A1 N LVP50-16A2 Basic type, with flow rate adjustment LVP6 78 58 90 4 x 6.5 40 58 Max. 35 Adjustment knob 2 x 6 Pilot port 34 (45) Lock nut Breathing port M5 x 5 Pilot port PB Breathing port PA PB 27.5 LVP60-A2 150 PA (32) (26) 36.5

Rotary Actuator Ｃ ( Ｄ ) ＲＡ１＊＊＊３０～１００－＊＊Ｚ

Load Rotary actuator Flexible coupling Bearing Fig. (9) Flexible coupling 28 - Piping and operating direction Fig. (10) shows piping ports of the rotary actuator. Table (9) shows the port size. Table (9) Port size Size Port size 30 M5 50 Rc1/8 63 Rc1/8 B Port 80 Rc1/4 100 Rc3/8 A Port Fig. (10) Port location A fixed throttle is installed inside the actuator port.

DOC1001947

Construction Seal method: Sealant For R, NPT thread Seal method: Gasket seal For M5, 10-32UNF Meter-out Meter-in Meter-out Seal method: Face seal For G thread Meter-out Component Parts No.

Rubber Seal, 5 Port Solenoid Valve, Series SZ3000

C4 C6 M5 L4 L6 B4 B6 4 One-touch fitting 6 One-touch fitting The "" symbol indicates mounting. Put the "" symbol at the beginning of part numbers for solenoid valves, etc., which are to be mounted. M5 x 0.5 4 elbow fitting assembly (upward) Valve stations are numbered from station 1 on the D side.

Speed Controller: Standard Type Series AS In-line Type 1

Free flow Controlled flow Model Port size Applicable cylinder bore size (mm) Effective area (mm2) Effective area (mm2) Flow rate (/min (ANR)) Flow rate (/min (ANR)) Weight (g) 4.7 AS1000-M3 M3 x 0.5 20 0.3 20 0.3 2.5, 4, 6 33 AS1000-M5 M5 x 0.8 90 1.4 80 1.2 6, 10, 16, 20, 25 90 AS2000-01 1/8 340 5.2 250 3.8 20, 25, 32, 40 115 AS2000-02 1/4 340 5.2 250 3.8 130 AS3000-02 1/4 810 12.3 810 12.3

Floating Joint: Standard Type JA Series

55000 0.5 0.5 0.5 0.5 0.5 0.5 0.75 1 1.25 2 2.5 3 Basic type, Flange type, Foot type Mounting Operating range Center of sphere Operating range Axial center 5 Semi-standard/Thread nominal size -5 to 60C JA20-8-100 JA25-10-150 JA32-10-100 JA40-12-125 JA40-12-150 JA40-12-175 JA50-16-150 JA63-16-200 JA80-20-250 JA100-24-300 JA100-27-150 JA125-27-200 JA160-33-200 20 25 32 32, 40 40 32, 40 50

Compact Guide Cylinder ø 12, ø 16, ø 20, ø 25, ø 32, ø 40, ø 50, ø 63, ø 80, ø 100 MGP Series

Bore size 12 12 mm 40 40 mm 16 16 mm 50 50 mm 20 20 mm 63 63 mm 25 25 mm 80 80 mm 32 32 mm 100 100 mm Auto switch Nil Without auto switch (Built-in magnet) *: For applicable auto switches, refer to the table below. Port thread type Nil M5 x 0.8 Rc TN NPT TF G Cylinder stroke [mm] Refer to Standard Strokes on page 433. *: For bore sizes 12 and 16, only M5 x 0.8 is available.

PFxx-OMX0002

Product number Suitable screws Tightening torque Thread depth PF3A703H Equivalent to M4 1.5 Nm 10 7 PF3A706H Equivalent to M5 3 Nm 10 8 PF3A712H Equivalent to M6 5.2 Nm 10 9 Prepared by the user.

EX500-GPN2_eng

One branch of manifold valves/input unit can be connected to 32 outputs/32 inputs.

Microspeed Cylinder: Double Acting/Single Rod Series CQ2X ø 32, ø 40, ø 50, ø 63, ø 80, ø 100 Dimensions and auto switch details are equivalent to those of the standard double acting single rod cylinder.

M5 x 0.8 for CQ2X 32-5 Auto switch specifications Lead wire length (m) Load voltage Direct mounting Rail mounting Indicator light Special function Wiring (output) Electrical entry Applicable load None (N) Type 32 to 100 32 to 100 0.5 (Nil) 3 (L) 5 (Z) DC AC In-line In-line Perpendicular Perpendicular 3-wire (NPN equiv.) 5V A76H A96V A96 IC circuit 200V A72H A72 Yes Reed switch Grommet

ZQ-OM01301

valve ZQ1-CV 7 V port fitting VVQ1000-50A-C4 (1) Specifications 50A-M5 Without fitting (M5x0.8) 50A-C3 3.2 (Straight) (1) 50A-C4 4 (Straight) Clip (10 pcs. are included in one set) 50A-C6 6 (Straight) A A F1-LC3 3.2(Elbow) ZK1-CP-A F1-LC4 4 (Elbow) 8 Bracket assembly ZQ1-BK1-A 24 - Doc.

Series M Miniature Fittings M3, R(PT) 1/8, M5

M3 male -M3 male M-3N P. 92 M5 M5 M-5ALHN-6 P. 91 Bulkhead union M-5E 6/4 P.90 Panel mount connection. M5 female -M5 female Plug Barb elbow(H) For soft nylon tube. Body rotates at 360 around the stud axis. 3.18/2.18 M-5ALHU-3 To plug unused M3 port.

3

For a 10 orifice (VXS23/Port size 1/4), P 0.05 MPa The optimum size for a pressure differential of P 0.2 MPa and a flow of 50 L/min will be the VXS23 (10 orifice, port size 3/8). 500 400 VXS26 25 Cv = 12 300 VXS25 20 Cv = 9.2 200 VXS24 15 Cv = 5.3 Flow rate Q [L/min] 100 VXS23 Port size 3/8 10 Cv = 2.8 VXS23 Port size 1/4 10 Cv = 2.4 50 40 30 25 20 10 0.01 0.02 0.03 0.04 0.05 0.1 0.2 0.3

VQZ100V-OMT0001

AN120-M5 KJS04-M5 VQZ200/2000 KQ2S06-01S INA-25-46 IN-457-32(6 ) VQZ300/3000 KQ2H08-02S AN101-01 KQ2H06-01S 3 3 3 3 VQZ VQZ VQZ VQZ 82 82 82 82 ,N.C.

ZPT

06 6 08 8 10 10 13 13 16 16 20 20 1 8 NPT N01 1 8 NPTF T01 1 8 25 25 32 32 40 40 50 50 Material Pad type (Refer to Table (1) for applications.)

Air Gripper for Collaborative Robots

) (mm) 10 18 - 4-2. 3-port solenoid valve Specifications Solenoid specifications Model No.

V

0.35 NCDRB1BW10 0.55 0.73 0.35 0.02 0.39 50 0.94 0.12 1.14 0.75 0.98 0 5-40 M5 (10-32NOM) -0.00015 -0.0014 (0.2) M3 -0.00045 3/16 0.47 NCDRB1BW15 0.71 0.73 0.39 0.02 0.59 50 1.14 0.16 1.34 0.94 0.98 0 5-40 M5 (10-32NOM) -0.01 -0.0017 (0.2) M3 -0.00017 15/64 9/16 NCDRB1BW20 0.79 0.98 0.39 0.02 0.79 50 1.42 0.18 1.65 1.32 1.00 0 8-32UNC 10-32UNF -0.00015 -0.0016 (0.28) -0.00045 5/16 5/8 NCDRB1BW30

NAMUR Interface 3 Port Solenoid Valve Series VFN200N 1

A 24 V100 M5 thread 8 deep, with or without insert depending on base material. SY 32 SYJ A' VK Coding stud.

NAMUR Interface 3 Port Solenoid Valve VFN200N Series [Option]

A 24 M5 thread, depth 8 With or without insert depending on base material. 32 A' Coding stud M5 x 10 DIN913-45H 12 2 8 M5 Drive flange face G1/4 DIN/ISO228/1 19.5 5.5 Solenoid valve flange face O-ring 16 x 2 1.5 IP 3 IW 1301 AW The solenoid valve can be attached with 2 mounting bolts.

Compact Proportional Solenoid Valve Series PVQ

Series PVQ10 Dimensions L plug connector PVQ13-L--M5 & + ! ! ' "()* % "#$ % ! ! ' ()* ( + #$ ( + Interface "#$ % & ' "()* % & ' M plug connector PVQ13-M--M5 , . & + ! ! ' "()* % "#$ % ! !