)Incremental A/B (800 pulse/rotation)/Z phase24 VDC o10%102Horizontal 4/Vertical 9113Non-magnetizing lock78524 VDC o10%

)Incremental A/B (800 pulse/rotation)/Z phase24 VDC o10%102Horizontal 4/Vertical 9113Non-magnetizing lock78524 VDC o10%

0.02 35 or less1050/20Ball screw + Belt (Motor parallel)Sliding bearing (LEYGlM), Ball bushing bearing (LEYGlL)41 to 104F (5 to 40C)90 RH or less (No condenstation)l2830Servo motor (24 VDC)Incremental A/B (800 pulse/rotation)/Z phase24 VDC ?10%404 (Horizontal)/6 (Vertical)590.33 (0.15) (Screw mounting), 0.37 (0.17) (DIN rail mounting)Non-magnetizing operation type4.53.624 VDC ?10%

0.021050/20Ball screw + Belt (Motor parallel)Sliding bushing (Piston rod)41 to 104F (5 to 40C)90 or less (No condensation)l2830Step motor (Servo/24 VDC)Incremental A/B (800 pulse/rotation)/Z phase24 VDC ?10%404 (Horizontal)/6 (Vertical)590.33 lbs ( 0.15 kg) (Screw mounting), 0.37 lbs (0.17 kg) (DIN rail mounting)Non-magnetizing operation type4.5 (20)3.624 VDC ?10%

0.021050/20Ball screw + Belt (Motor parallel)Sliding bushing (Piston rod)41 to 104F (5 to 40C)90 or less (No condensation)l2830Step motor (Servo/24 VDC)Incremental A/B (800 pulse/rotation)/Z phase24 VDC ?10%404 (Horizontal)/6 (Vertical)590.33 lbs ( 0.15 kg) (Screw mounting), 0.37 lbs (0.17 kg) (DIN rail mounting)Non-magnetizing operation type4.5 (20)3.624 VDC ?10%

0.021050/20Ball screw + Belt (Motor parallel)Sliding bushing (Piston rod)41 to 104F (5 to 40C)90 or less (No condensation)l2830Step motor (Servo/24 VDC)Incremental A/B (800 pulse/rotation)/Z phase24 VDC ?10%404 (Horizontal)/6 (Vertical)590.33 lbs ( 0.15 kg) (Screw mounting), 0.37 lbs (0.17 kg) (DIN rail mounting)Non-magnetizing operation type4.5 (20)3.624 VDC ?10%

0.021050/20Ball screw + Belt (Motor parallel)Sliding bushing (Piston rod)41 to 104F (5 to 40C)90 or less (No condensation)l2830Step motor (Servo/24 VDC)Incremental A/B (800 pulse/rotation)/Z phase24 VDC ?10%404 (Horizontal)/6 (Vertical)590.33 lbs ( 0.15 kg) (Screw mounting), 0.37 lbs (0.17 kg) (DIN rail mounting)Non-magnetizing operation type4.5 (20)3.624 VDC ?10%

0.021050/20Ball screw + Belt (Motor parallel)Sliding bushing (Piston rod)41 to 104F (5 to 40C)90 or less (No condensation)l2830Step motor (Servo/24 VDC)Incremental A/B (800 pulse/rotation)/Z phase24 VDC ?10%404 (Horizontal)/6 (Vertical)590.33 lbs ( 0.15 kg) (Screw mounting), 0.37 lbs (0.17 kg) (DIN rail mounting)Non-magnetizing operation type4.5 (20)3.624 VDC ?10%

0.021050/20Ball screw + Belt (Motor parallel)Sliding bushing (Piston rod)41 to 104F (5 to 40C)90 or less (No condensation)l2830Step motor (Servo/24 VDC)Incremental A/B (800 pulse/rotation)/Z phase24 VDC ?10%404 (Horizontal)/6 (Vertical)590.33 lbs ( 0.15 kg) (Screw mounting), 0.37 lbs (0.17 kg) (DIN rail mounting)Non-magnetizing operation type4.5 (20)3.624 VDC ?10%

0.021250/20Ball screw + Belt (Motor parallel)Sliding bushing (Piston rod)41 to 104F (5 to 40C)90 or less (No condensation)l4236Step motor (Servo/24 VDC)Incremental A/B (800 pulse/rotation)/Z phase24 VDC ?10%864 (Horizontal)/12 (Vertical)960.33 lbs ( 0.15 kg) (Screw mounting), 0.37 lbs (0.17 kg) (DIN rail mounting)Non-magnetizing operation type17.5 (78)524 VDC ?10%

0.1 to 0 MPa1.5 MPaAir/Non-corrosive, non-flammable gas12 to 24 VDC ?10%, Ripple (P-P)10% or less (With power supply polarity protection)1 output: 17 mA or less at 24 VDC, 2 output: 25 mA or less at 24 VDC5 ms or less?1% F.S. or lessIP40Operating: 0 to 60C, Stored: ?

10 to 0 kPa500 kPaAir/Non-corrosive, non-flammable gas12 to 24 VDC ?10%, Ripple (P-P)10% or less (With power supply polarity protection)1 output: 17 mA or less at 24 VDC, 2 output: 25 mA or less at 24 VDC5 ms or less?1% F.S. or lessIP40Operating: 0 to 60C, Stored: ?

10 to 0 kPa500 kPaAir/Non-corrosive, non-flammable gas12 to 24 VDC ?10%, Ripple (P-P)10% or less (With power supply polarity protection)1 output: 17 mA or less at 24 VDC, 2 output: 25 mA or less at 24 VDC5 ms or less?1% F.S. or lessIP40Operating: 0 to 60C, Stored: ?

10 to 0 kPa500 kPaAir/Non-corrosive, non-flammable gas12 to 24 VDC ?10%, Ripple (P-P)10% or less (With power supply polarity protection)1 output: 17 mA or less at 24 VDC, 2 output: 25 mA or less at 24 VDC5 ms or less?1% F.S. or lessIP40Operating: 0 to 60C, Stored: ?

10 to 0 kPa500 kPaAir/Non-corrosive, non-flammable gas12 to 24 VDC ?10%, Ripple (P-P)10% or less (With power supply polarity protection)1 output: 17 mA or less at 24 VDC, 2 output: 25 mA or less at 24 VDC5 ms or less?1% F.S. or lessIP40Operating: 0 to 60C, Stored: ?

10 to 0 kPa500 kPaAir/Non-corrosive, non-flammable gas12 to 24 VDC ?10%, Ripple (P-P)10% or less (With power supply polarity protection)1 output: 17 mA or less at 24 VDC, 2 output: 25 mA or less at 24 VDC5 ms or less?1% F.S. or lessIP40Operating: 0 to 60C, Stored: ?

2% F.S.or less, allowable load resistance: 300 or less with 12 VDC, 600 or less with 24 VDC12 to 24 VDC (ripple ?10% or less)20 mA or less (without load)IP65Operating: 0 to 50C, Stored: ?

2% F.S.or less, allowable load resistance: 300 or less with 12 VDC, 600 or less with 24 VDC12 to 24 VDC (ripple ?10% or less)20 mA or less (without load)IP65Operating: 0 to 50C, Stored: ?

changes in response to flow rate), and other error indicator12 to 24 VDC p10%30 mA or lessIP650 to 50oC (with no freezing and condensation)Operation, Storage: 35 to 85% R.H.

changes in response to flow rate), and other error indicator12 to 24 VDC p10%30 mA or lessIP650 to 50oC (with no freezing and condensation)Operation, Storage: 35 to 85% R.H.