PSxx-OMU0005CN

DC12~24V10% DC12~24V10% DC(+) DC(-) 8 DC12~24V10% DC12~24V10% DC(+) DC(-) 9 ( ) 10 11 -72No.PS-OMU0005CN-C No. / / 5m 12 1015 10 SI (kPaMPa) ( ) SI kPa,MPa 13 14 15 16 FUNC 17 -73No.PS-OMU0005CN-C No. 4m 4m FUNC 18 (Er13) 10 10 () 19 ( ) / () -74No.PS-OMU0005CN-C 80mA 7F.S.(3.5F.S.) 1 1 F.S. 1 -75No.PS-OMU0005CN-C ZSE20B() ZSE20BF() ISE20B() 0.0-101.0 kPa -100.0100.0

Compact Guide Cylinder End Lock Type SeriesMGP

11 17.8 10 7 18.5 63 LL With rear lock (mm) Standard strokes (mm) Bore size (mm) ML NN OA B C DA FA FB G GA GB GC H HA J K L MM 84.5 62.5 16 12 10 48 12.5 9 12.5 112 M6 24 24 34 M8 x 1.25 20 M8 x 1.25 6.6 32 25, 50, 75, 100 125, 150, 175 200, 250, 300 350, 400 91 69 16 12 10 54 14 10 14 120 M6 27 27 40 M8 x 1.25 20 M8 x 1.25 6.6 40 97 69 20 16 12 64 14 11 12 148 M8 32 32 46 M10 x 1.5 22

How to Order Series ZM Vacuum Ejector With Valve and Switch For details about certified products conforming to international standards, visit us at www.smcworld.com. 1

ZS-20-5A-50 . 1 pc.

4/5 Port Air Operated Valve SYJA3000 Series

B M3 x 0.5 (Piping port) 1.5 1.5 33 36 Manual override B P R R (35) 7 7 36 (2) 7 (13.5) 28.5 15 A 1 (Bleed port) 21 R2 P R1 13 4 8.2 15 10 10 10 M5 x 0.8 (Piping port) 11 14 14 15 (Bracket) 2 position double: SYJA3220-M3(-F) 2 position double: SYJA3240-M5 10 9 36 7.1 2 x M3 x 0.5 (Pilot port) 10 1.8 4 A B (For mounting) 2 x 3.2 1.5 1.5 22 7 8.2 2.5 (For manifold mounting) 2 x 1.8 2 x M3 x

Speed Exhaust Controller Series ASV Size: M3, M5, 1/8, 1/4, 3/8

8 10 8 10 10 12 10 12 10 12 10 R 1/8 23.4 27.4 39.8 45.8 17.6 14 R 1/4 25.4 31.4 39.8 45.8 17.6 12 R 1/8 26.7 30.7 45.3 52.8 24 14 R 1/4 28.7 34.7 45.3 52.8 24 17 R 3/8 30.4 36.7 45.3 52.8 24 17 R 1/4 33.8 39.8 49.6 55.6 30 17 R 3/8 35.5 41.8 49.6 55.6 30 22 R 1/2 37.6 45.8 49.6 55.6 30 Dimension with cover Reference dimension of R thread after installation.

Ejector Valve Unit, Series ZYY/ZYX

Air consumption flow rate l/min(ANR) 40 40 -80 -80 -80 -80 Vacuum pressure Vacuum pressure kPa Vacuum pressure kPa Vacuum pressure kPa Vacuum pressure kPa Air consumption Air consumption 30 30 -60 -60 -60 -60 20 20 -40 -40 -40 -40 Suction flow rate Suction flow rate 10 10 -20 -20 -20 -20 0 0 0.1 0.2 0.3 0.4 0.5 0.6 0 0 0.1 0.2 0.3 0.4 0.5 0.6 0 0 0 10 20 0 0 0 5 10 15 20 25 Supply pressure

XLA Series

Vale specifications Model XLA-16 XLA-25 XLA-40 XLA-50 XLA-63 XLA-80 XLA-100 XLA-160 Flange (valve) size 16 25 40 50 63 80 100 160 Actuating type Normally closed Fluid Vacuum of inert gas Operating temperature oC 5 to 60 (5 to 150 for high temperature type) Operating pressure Pa(abs) Atmospheric pressure to 1 x 10-6 Conductance l/s Note 1 5 14 45 80 160 200 300 800 Internal 1.3 x 10-10 for

XLA- ∗ -F7NJ ∗ - ∗ Series

Model XLA-16 XLA-25 XLA-40 XLA-50 XLA-63 XLA-80 XLA-100 XLA-160 Flange (valve) size 16 25 40 50 63 80 100 160 Actuating type Normally closed Fluid Vacuum of inert gas Operating temperature oC 5 to 150 Operating pressure Pa(abs) Atmospheric pressure to 1 x 10-6 Conductance l/s Note 1 5 14 45 80 160 200 300 800 Internal 1.3 x 10-10 for the standard material (FKM) at ambient temperatures , excluding

Ejector Valve Unit Series ZYY/ZYX 1

20 30 40 50 5 10 15 20 25 Supply pressure (MPa) Suction flow rate (l/min(ANR)) Supply pressure (MPa) Suction flow rate (l/min(ANR)) How to Read Flow Characteristics Graph The flow rate characteristics indicate the relationship between the vacuum pressure and the suction flow rate of the ejector, and show that when the suction flow rate changes the vacuum pressure also changes.

IDX-OM-W093

)2 60Hz 6.1 8.6 12.8 15.5 m3/min 50Hz 5.6 8.0 11.6 14.3 3 60Hz 6.5 9.1 13.6 16.4 10 0.7 MPa 35 40 32 /AC200V (50Hz) /AC200/220V (60Hz) () 10%4 7-2 200V 770/910 1260/1590 1770/2170 2270/2960 5) 50/60Hz W 200V 790/970 1150/1380 1700/2160 2330/2980 200V 4.2/4.6 6.7/7.9 9.7/10.9 11.8/14.8 5) 50/60Hz A 200V 3.0/3.2 4.3/4.4 6.5/6.8 8.9/9.1 (30mA) 6) A 200V 10 15 20 30 200V 15 20 10 R410AHFC

KG

(mm) (1) D L Applicable tubing Nylon Urethane KGR04-08 KGR04-06 1.8 2.0 3.3 3 2.5 3 4.7 4 6 8 10 4 8 10 12 10 12 12 16 16 17.5 18 18.5 21 34.5 36.5 39.5 37 37 39.5 42 41 42 44.5 50.5 50.5 10.4 16 5.6 4 KGR04-10 12.8 KGR06-04 KGR06-08 KGR06-10 KGR06-12 KGR08-10 KGR08-12 KGR10-12 KGR10-16 KGR12-16 4 4 12.8 17 6 18.5 Applicable fitting size d 13.1 10.4 15.2 20 4.0 4.6 33 8 15.2 20 18.5 26.1

Series AS-FM/AS-M/ASD-FM

0.8 Upstream pressure 0.5MPa 20 10 50 0.15 0.3 Flow rate l/min (ANR) Flow rate l/min (ANR) Flow rate l/min (ANR) 40 0.6 Effective area mm Effective area mm Effective area mm 0.1 0.2 30 0.4 10 5 20 0.1 0.05 0.2 10 0 0 0 0 0 Number of needle revolutions 5 10 Number of needle revolutions 5 10 10 20 0 Number of needle revolutions 2 Speed Controller for Low Speed Operation Series AS-FM Construction

KQ-OMS0022

Tubing size Tensile force of tubing (N) 3.2, 1/8'' 5 4, 5/32'' 8 6, 1/4'' 12 8, 5/16'' 20 10, 3/8'' 30 12, 1/2'' 35 16 50 7 - Caution (1) Chamfer dimension for female thread of the connection thread Confirming to ISO 16030 (air pressure fluid dynamics connection ports and stud ends), the chamfer dimensions shown below are recommended.

Digital Gap Checker

Function number Function name Default setting Page F 0 (Unit) Units selection [ PA] kPa Page 47 ISA3-F: [ 20] ISA3-G: [ 50] ISA3-H: [ 50] Switch point ISA3-F: [ 3] ISA3-G: [ 20] ISA3-H: [ 20] F 1 (oUt1) OUT1 setting Page 48 Hysteresis Display colour [ SoG] Green when ON, Orange when OFF F 2 (oUt2) (Not available) [. -] Page 50 F 6 ( FSt) Display value compensation [ 0.0] Compensated value

PSE540/560

to 60C, Stored: 20 to 70C (No condensation or freezing) Operating humidity range Operating/Stored: 35 to 85% RH (No condensation) Resistance Withstand voltage 250 VAC for 1 minute between live parts and case Insulation resistance 50 M between live parts and case (at 50 VDC) 10 to 150 Hz at whichever is smaller of 1.5 mm amplitude or 20 m/s2 acceleration, Vibration resistance in X, Y, Z directions

MIW/MIS

10, 20, 30 mm 3 5 160 20 MIS12-20D 30, 50 mm 190 30 MIS12-30D 30, 50 mm 300 10 MIS20-10D MIS D5 15 355 20 MIS20-20D Made to Order (For detailes, refer to page 2020.) 30 410 MIS20-30D -X Symbol Specifications 30 800 MIS25-30D 10 15 -X4 -X5 -X63 -X79 Heat resistant (-10 to 100C) Individual -X 50 1000 MIS25-50D Fluororubber seal 30 1350 MIS32-30D Fluorine grease 18 50 50 1650 MIS32-50D Grease

EXxx-OMO0027

) 1 Operating temperature range -10 to 50 oC (Max. surrounding air temperature rating: 50 oC) 2 Environment Storage temperature range -20 to 60 oC Operating humidity range 35 to 85%R.H.

EXxx-OMN0037CN

V10 M FE 3(UL508) CE UL(CSA)RoHS 290 g 1M12 (4 ) 2 3UL 0~50 -19No.EX-OMN0037CN-A (1)2 010 V05 V020 mA 15 V420 mA AD (ab) AD (0b) [V] [mA] 16 10 [V] [mA] 16 10 15 V 420 mA 010 V 05 V 020 mA 0FFF 4095 5.25 21 0FFF 4095 10.5 5.25 21 0F1C 3868 5 20 0F3D 3901 10 5 20 0800 2048 3 12 0800 2048 5.25 2.625 10.5 00E4 228 1 4 0 0 0 0 0 0 0 0.75 3 Byte0 Byte1 CH0 15 14 13 12 11 10 9 8 7

EXxx-OMQ0016

) Operating temperature range -10 to 50 oC Environment Storage temperature range -20 to 60 oC Operating humidity range 35 to 85%R.H.

EXxx-OMK0006

Baud rate Max. bus cable length 1 Mbit/s 25 m 800 kbit/s 50 m 500 kbit/s 100 m 250 kbit/s 250 m 125 kbit/s 500 m 50 kbit/s 1000 m 20 kbit/s 2000 m 10 kbit/s 5000 m -10No.EX-OMK0006-C Bus cable and termination resistors The cables, connectors, and termination resistors used in CANopen networks shall meet the requirements defined in ISO 11898.