PFA/PFW

(43.5) 2 1 42 4 3 4 Connector pin numbers Pin name Pin No. 2-3.4 43 DC (+) 1 NC 2 DC () 3 Flow direction OUT 4 Dimension L Model 100 PFW504 106 PFW520 16 Digital Flow Switch for Water Series PFW Dimensions (mm)/ Separate Type For Water 1in = 25.4mm Scale: 65% PFW540-m (N) 62 120 23 78.2 1.6 60 50 34 2-Piping port size 4-4.5 34 40 50 1 2 48 (43.5) 3 4 Connector pin numbers Pin names Pin

Stainless Steel 316

Pulling Strength Model Without inner sleeve With inner sleeve TU1208 140 N 500 N TU1065 140 N 450 N TU0805 110 N 250 N TU0604 80 N 180 N TU0425 50 N 160 N Reference: Thrust Force Occurring at 0.8 MPa Model Load TU0425 10 N TU0604 25 N TU0805 40 N TU1065 65 N TU1208 90 N Note 3) Please consult with SMC regarding applicable tube separately.

AV2000/3000/4000/5000

Grommet type only) With light/surge voltage suppressor (Not possible with grommet type) Port size Electrical entry 1/4 (AV2000 only) 3/8 (AV3000 only) 1/2 (AV4000 only) 3/4 (AV5000 only) 1 (AV5000 only) 02 03 04 06 10 G: Grommet Coil rated voltage 1 2 3 4 5 6 7 9 100 VAC (50/60 Hz) 200 VAC (50/60 Hz) 110 to 120 VAC (50/60 Hz) 220 VAC (50/60 Hz) 24 VDC 12 VDC 240VAC (50/60 Hz) Other D: Type

IDX-OM-W023

T 100 2 () 100 IDU Series 4-1 4 1 IDX-OM-W023 4 4-2-3 0 OFF 50 1015 ( 1 INOUT IDU Series 4-2 4 2 IDX-OM-W023 4 30 (2) 30 () O IDU Series 4-2 4 3 IDX-OM-W023 4 AD48-A 1 IDU8E/11E/15E1 ) 20193 20192SERIAL No.XPAD48 SMC WEB IDF-S0002 1 IDU8E/11E/15E1 C42FP-260S 1 IDU8E/11E/15E1 IDF-S1933 1 IDU8E/11E/15E1 2 IDU Series 4-2 4 4 IDX-OM-W023 5 5 5-1 3 ON OFF () 3 2

Fieldbus system PROFINET compatible SI Unit

Selects the over current detection for 100 msec after supplying power.

Fan Type Ionizer

Ground the F.G. cable with a resistance of 100 ohms or less +24V Brown +24VDC +24V Power supply Blue 0V 0V 24VDC F.G. Internal circuit Ground the F.G. cable with a resistance of 100 ohms or less OUTPUT PLC +24V INPUT Yellow Maintenance signal +24V Purple Error signal 12 - Doc. no. IZ*-OMT0002 3-2-2.

SI Unit for Vacuum Manifold

Pressure range parameter Table. 4-4 Pressure range parameter Name Range of values Default Description/Note Pressure range -100..+200 -100..+100 -100..+100 Set rated pressure range of pressure sensor. Refer to Section 5.2. Caution The Pressure range parameter should be set to match the actual pressure sensor specifications. 4.1.5.

DOC1020530

Target position: 100.000[mm] (=10 [m] = 186A0h) Target speed: 100[r/min] (=10 [0.01r/min] = 2710h) Acceleration time constant: 100 [ms] (= 64h) Deceleration time constant: 100 [ms] (= 64h) The setup value is as follows.

High Vacuum L Type Valve

Item XLH-25 XLH-40 XLH-50 Rated voltage of the heater 90 to 240 ACV Heater assembly number XLA25-60S-1 XLA25-60S-1 No. of heater assemblies 1 pc. 1 pc. H4 S y m b o l Initial power / Power 100 VAC 200/40 200/50 200 VAC 800/40 800/50 consumption (W) Heater assembly number XLA25-60S-1 XLA25-60S-2 XLA25-60S-2 No. of heater assemblies 1 pc. 1 pc. 1 pc.

VFS1000

model SF4 DZ 1 21 Coil rated voltage Manual override Individual pilot exhaust Electrical entry, Light/Surge voltage suppressor For VFS120 21 1 100 VAC, 50/60 Hz 2 200 VAC, 50/60 Hz 3 110 to 120 VAC (50/60 Hz) 4 220 VAC, 50/60 Hz 5 24 VDC 6 12 VDC 7 240 VAC, 50/60 Hz 9 Other Option Option Non-locking push type (Flush) Non-locking push type (Extended) Locking type (Tool required) Locking

5 Port Pilot Operated Solenoid Valve Series VFR2000 Rubber Seal, Plug-in/Non Plug-in How to Order Option Port size (P, A, B port) Thread type Electrical entry Rc Nil Nil Nil None Without sub-plate F: Plug-in type 01 1 8 F Z G With light/surge voltage supp

VQC 1 2 3 100 VAC, 50/60 Hz 200 VAC, 50/60 Hz 3 Electrical entry VQZ 110 to 120 VAC, 50/60 Hz G: Grommet E: Grommet terminal T: Conduit terminal D, Y: DIN terminal 4 3 position exhaust center 220 VAC, 50/60 Hz 5 6 24 VDC 12 VDC SQ 4 7 240 VAC, 50/60 Hz Note) VFS 9 Other 3 position pressure center Option Note) L and M plug connectors: Max. 220 VAC VFR 5 L: L plug connector M: M plug

VG342

Option VG Rated voltage Pilot valve assembly for VG342 100 VAC, 50/60 Hz 200 VAC, 50/60 Hz 110 VAC, 50/60 Hz 220 VAC, 50/60 Hz 1 2 3 VP3 Light/Surge voltage suppressor Nil None 4 External pilot S With surge voltage suppressor (Only grommet type is available.) 24 VDC 12 VDC 5 6 (A) 2 Z With light/surge voltage suppressor (Except grommet type) 7 240 VAC, 50/60 Hz 9 Other 1 (P) 3 (R) Option

High Pressure Coolant Valve: 3.5 MPa, 7.0 MPa VNH Series

./7.0 MPa Electrical entry/With light/surge voltage suppressor D DIN terminal Seal material DZ DIN terminal with light/surge voltage suppressor A B NBR seals FKM seals Rated voltage Valve size Port size 3 2 1 100 VAC 50/60 Hz 200 VAC 50/60 Hz 110 VAC 50/60 Hz 220 VAC 50/60 Hz 10A 15A 20A 25A 1 2 3 4 3 8 1 2 3 4 4 1 7 6 5 24 VDC 12 VDC 240 VAC 50/60 Hz Semi-standard For other rated voltages

Large Size 3 Port Solenoid Valve VP3145/3165/3185 Series Rubber Seal

N.O. 1 2 3 100 VAC, 50/60 Hz 200 VAC, 50/60 Hz 110 VAC, 50/60 Hz 220 VAC, 50/60 Hz 24 VDC 12 VDC 240 VAC, 50/60 Hz Note) N.O. valve operates properly only when appropriate pressure is applied to the pilot.

OMS0020

Controller version (the time in the bracket indicates the schedule for switching) Function Ver 2.0 Ver2.1 to Ver2.4 Ver2.5 (August 2014) (Sept. 2015) (June 2020) Corresponding card motor 6 types LAT3M-50 LAT3M-50 LAT3F-50 LAT3F-50 Alarm history count 4 points 4 points 20 inputs Communication speed 19200bps 2,400bps 2,400bps 9,600bps 9,600bps 19,200bps 19,200bps 38,400bps 38,400bps 57,600bps

3 Port Air Operated Valve

(Convertible) Standard 0.2 to 1.0 Operating pressure range (MPa) For vacuum 100 kPa to 0.2 Pilot pressure (MPa) 0.2 to 1.0 (Equivalent to the operating pressure or more) Ambient and fluid temperature (C) 10 to 50 (No freezing) Lubrication Not required Mounting orientation Unrestricted Impact/Vibration resistance (m/s2) Note) 300/50 Note) Impact resistance: No malfunction to axis and right

Step Motor Controller With Step data Teaching Function (Servo / 24VDC)

Move Speed Position Accel PushingF T riggerL V PushingSp Moving F Area1 Area2 In posn mm/s2 mm/s mm mm/s2 mm/s mm mm mm 0 Absolute 100 20.00 1000 1000 0 0 0 100 18.00 22.50 0.5 1 Absolute 50 10.00 1000 1000 70 60 5 100 6.0 12.0 1.5 63 Absolute 20 5.00 500 500 0 0 0 100 3.0 8.0 1.2 6.

Digital Flow Switch (Remote type sensor unit)

Min. load impedance: 100 k (Output impedance: 1 k) Analogue output Current output: 4 to 20 mA, Accuracy: 2%F.S. or less Max. load impedance: 300 or less with 12 VDC, 600 or less with 24 VDC Supply voltage 12 to 24 VDC 10% Power consumption (No load) 20 mA or less Enclosure IP65 Environment Operating temperature range Operation: 0 to 50 C, Storage: -25 to 85 C (no condensation or freezing

XMA/XYA Series

Exterior dimensions C D XMA Series Angle Valve Fd Fn Fc C Fc L1 KF Flange K Flange CF Flange ( K ) ( K F ) ( C F ) L2 H B G A A Unit:mm Model n Fd Fc H P.C.D L1 L2 XMA-16 40 103 38 1 30 34 17 40 P.C.D 27 6x4.4 XMA-25 50 113 48 1 40 26 39 XMA-40 65 158 66 2 55 70 41 63 P.C.D. 58.7 6x6.6 XMA-50 70 170 79 2 75 52 68 XMA-63 88 196 100 3 87 95 114 70 69 P.C.D. 92.1 8x8.4 XMA-80 90 235 117 3 114

VT325

(Values at the initial period) VT325-C VT325-G JIS Symbol Solenoid Specifications Grommet, Conduit, DIN terminal, Conduit terminal 100, 200 VAC, 50/60 Hz, 24 VDC 15 to +10% of rated voltage 75 VA 60 VA 27 VA 17 VA 12 W Electrical entry Coil rated voltage Allowable voltage fluctuation 50 Hz 60 Hz 50 Hz 60 Hz Inrush AC Apparent power (3) Holding DC Power consumption (3) Note 3) At rated voltage