Nozzle Type Ionizer

Input Discharge stop signal 50 ms or more 50 ms or more The error signal can be reset by turning the reset signal on and then off. ON OFF Input Reset signal Discharge signal (on when ions are being generated) ON OFF Output ON OFF When an error occurs, the signal is turned off. Output Error signal Error occurred Ions are still generated even when the maintenance signal is turned on.

CU

K J E Size variations Standard strokes Model Auto switch 20 30 40 50 100 60 70 80 90 C(D)U20 20 to 32 Direct mounting type auto switch C(D)U25 C(D)U32 Features 2 Free-Mounting Cylinder with Air Cushion Series CU 20, 25, 32 How to Order CU 32 32 50 50 A A F9BW With auto switch CDU Without auto switch Number of auto switches With auto switch (built-in magnet) 2 pcs. Nil S 1 pc.

90

50 0 0 0 10 20 30 40 50 0 10 20 30 40 50 Units used Units used Released into atmosphere IR Special bleeding structure No fixed throttle in the new design.

Microspeed Cylinder: Double Acting/Single Rod Series CQ2X ø 32, ø 40, ø 50, ø 63, ø 80, ø 100 Dimensions and auto switch details are equivalent to those of the standard double acting single rod cylinder.

Standard strokes (mm) Bore sizes (mm) 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 32, 40 50, 63 80, 100 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 Example) For CQ2XB40-57D, an 18mm spacer is installed inside a standard stroke CQ2XB40-75D cylinder. Specific Product Precautions Be sure to read before handling. Refer to pages 15 to 24 for safety instructions and precautions.

Speed Controller: Standard Type Elbow Type (Metal Body) AS Series

Refer to back page 50 for Safety Instructions and pages 543 to 546 for Flow Control Equipment Precautions. AQ ASV AK Made to Order VCHC ASR ASQ Grease-free (Seal: Fluorine Coated) + Throttle Valve (Without Check Valve) X21 Lubricant: Vaseline X12 Ex.) AS2200-01-X12 Ex.)

VXA31/32

VC Model VDW VQ Thread type Nil T F N Orifice size Rc NPTF G NPT 1 2 3 4 1.5 mm 2.2 mm 3 mm 4 mm VX2 VX Refer to the table (1) given below for availability. VX3 Port size 01 02 03 1 8 1 4 3 8 VXA Valve/Body 4 Common/Single unit Refer to the table (1) given below for availability.

Manifold Regulator Modular Type ARM2500/3000 Series

A C D E F G H B Composition of assembly Set nut (1349172) AP100 ARM2500 136314 30 34 70 5.4 15.4 55 2.3 M33 x 1.5 Bracket (B220) Inlet pressure (MPa) Set nut (131532) ARM3000 136414 75.5 8 41 40 6.5 53 2.3 M42 x 1.5 Bracket (B320) Note) Tighten the set nut securely and fix it.

Rated Flow Range: 21 (50 to 250 L/min), Flow Adjustment Valve: None, Thread: N (NPT), Port Size: 14 (1 1/2), Output Specification: F (OUT1: PNP; OUT2: Analog 4 to 20mA), Temperature Sensor: None, Lead Wire: Lead Wire w/M8 Connector, 3m, Unit Specification: F (Instantaneous Flow Rate: Gal/min; Accumulated Flow: Gal; Temp: °F), Bracket: None, Calibration Certificate: A (Calibration Certificate

A_HEC-OM-J017

01 3F 02 37 32 35 30 30 03 33 3F 0D 06 3F 0D Set at 25.0 deg.C 38 Offset setting (with writing EEPROM) F 01 3F 02 38 30 31 35 30 03 33 3F 0D 06 3F 0D Set at +1.50 deg.C HEC 6-1

XLC-25,40 ∗ -F7NJ ∗ - ∗ Series

F F Fn n n n (KF) () Heater (option) Auto switch H H H H J J J J G G G G B B B B A A A A A A A A Model A B C D E Fn G H J K XLC-25 50 120 48 1 12 40 26 39 27.5 8 XLC-40 65 171 66 2 11 55 41 63 36 9 8 XL-OMO0001-A 5 Guaranteed period and range The warranty period is 2 million cycles (under SMC endurance test conditions), 18 months after delivery or 12 months in service, whichever comes first

Serial Transmission System Series EX250 Series EX500

Nil Rc G NPT/NPTF F T DeviceNet DeviceNet CC-Link CC-Link PROFIBUS-DP PROFIBUS-DP Remote I/O AS-i CANopen Nil +COM. COM. N Note) Leave the box blank for the SI unit COM without input block (SD0).

SFOD-OMT0012

Step data writing to the controller will begin. 34 No.SFOD-OMT0012-A f) Completion Writing is completed when the progress bar disappeared.

Rated Flow Range: 21 (50 to 250 L/min), Flow Adjustment Valve: None, Thread: N (NPT), Port Size: 14 (1 1/2), Output Specification: F (OUT1: PNP; OUT2: Analog 4 to 20mA), Temperature Sensor: None, Lead Wire: Lead Wire w/M8 Connector, 3m, Unit Specification: F (Instantaneous Flow Rate: Gal/min; Accumulated Flow: Gal; Temp: °F)

Rated Flow Range: 21 (50 to 250 L/min), Flow Adjustment Valve: None, Thread: N (NPT), Port Size: 12 (1 1/4), Output Specification: F (OUT1: PNP; OUT2: Analog 4 to 20mA), Temperature Sensor: None, Lead Wire: N (w/o Lead Wire w/M8 Connector), Unit Specification: F (Instantaneous Flow Rate: Gal/min; Accumulated Flow: Gal; Temp: °F), Bracket: None, Calibration Certificate: A (Calibration Certificate

Rated Flow Range: 21 (50 to 250 L/min), Flow Adjustment Valve: None, Thread: N (NPT), Port Size: 14 (1 1/2), Output Specification: F (OUT1: PNP; OUT2: Analog 4 to 20mA), Temperature Sensor: T (Temperature Sensor), Lead Wire: Lead Wire w/M8 Connector, 3m, Unit Specification: F (Instantaneous Flow Rate: Gal/min; Accumulated Flow: Gal; Temp: °F)

Rated Flow Range: 21 (50 to 250 L/min), Flow Adjustment Valve: None, Thread: N (NPT), Port Size: 14 (1 1/2), Output Specification: F (OUT1: PNP; OUT2: Analog 4 to 20mA), Temperature Sensor: None, Lead Wire: N (w/o Lead Wire w/M8 Connector), Unit Specification: F (Instantaneous Flow Rate: Gal/min; Accumulated Flow: Gal; Temp: °F), Bracket: None, Calibration Certificate: A (Calibration Certificate

Rated Flow Range: 21 (50 to 250 L/min), Flow Adjustment Valve: None, Thread: N (NPT), Port Size: 12 (1 1/4), Output Specification: F (OUT1: PNP; OUT2: Analog 4 to 20mA), Temperature Sensor: T (Temperature Sensor), Lead Wire: Lead Wire w/M8 Connector, 3m, Unit Specification: F (Instantaneous Flow Rate: Gal/min; Accumulated Flow: Gal; Temp: °F)

Series CM2X-Z 10- ø20, ø25, ø32, ø40 Low Speed Cylinder 11- Double Acting, Single Rod

Nil S n G Rubber bumper only Cylinder stroke (mm) Rod end thread Nil F Male rod end Female rod end Model Cushion Bore size (mm) 20 25 32 40 20 25 32 40 Action Standard stroke (mm) Auto switch mounting Port size Lubrication Model Rubber 10-CM2X20 10-CM2X25 10-CM2X32 10-CM2X40 11-CM2X20 11-CM2X25 11-CM2X32 11-CM2X40 Relief type Vacuum suction type 1/8 25, 50, 75, 100, 125, 1/4 Non-lube Double

Rated Flow Range: 21 (50 to 250 L/min), Flow Adjustment Valve: None, Thread: N (NPT), Port Size: 12 (1 1/4), Output Specification: F (OUT1: PNP; OUT2: Analog 4 to 20mA), Temperature Sensor: None, Lead Wire: N (w/o Lead Wire w/M8 Connector), Unit Specification: F (Instantaneous Flow Rate: Gal/min; Accumulated Flow: Gal; Temp: °F)

Rated Flow Range: 21 (50 to 250 L/min), Flow Adjustment Valve: None, Thread: N (NPT), Port Size: 12 (1 1/4), Output Specification: F (OUT1: PNP; OUT2: Analog 4 to 20mA), Temperature Sensor: T (Temperature Sensor), Lead Wire: N (w/o Lead Wire w/M8 Connector), Unit Specification: F (Instantaneous Flow Rate: Gal/min; Accumulated Flow: Gal; Temp: °F)