SMC Corporation of America
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Caution 4 XSA-OMS0001-A (5) Leakage voltage Particularly when using a resistor in parallel with a switching element and using a C-R element (surge voltage suppressor) to protect the switching element, take note that leakage current will flow through the resistor, C-R element, etc., creating a possible danger that the valve may not turn off. passes through the C-R device.

D ZS-24-D X X X ZS-35-C X X X X X E ZS-35-D X X ZS-35-F X X X X X + F ZS-35-G X X 1/ 1 ZS-24-A A M35 L,M45 L 2 ZS-24-B B M45 L, 2 ZS-24-D D M35 L,M45 L 2 ZS-35-C (01,N01) ZS-35-D (W1,WF1,M5,C4,C6) ZS-35-F +(01,N01) ZS-35-G +(W1,WF1,M5,C4,C6) -10No.PS-OMM0006CN-E M8(3 ) 01 N M L ISE40A 1/ 2 ISE40A -0.11.000 MPa Y ZSE40A 0.0-101.3 kPa K + T + 1 01 R1/8(M5) N01 NPT1/8(M5) A A

By chamfering as shown in the following table, machining of threads is easier and effective for burr prevention. 2Specific Product Precautions5 Caution (2) Connection thread: R, NPT First, tighten the fitting by hand, then use a wrench appropriate for the hexagon flats of the body to tighten it a further two or three turns. For a tightening torque guide, see the table below.

Since Series CHM does not have an air release valve, release air from components other than the cylinder (e.g. from piping, etc.). 20 + 50 n 2 2 20 65 10 D-H7LF (n = 2, 4, 6 ) D-B5 D-B6 D-G5NTL 15 + 50 n 2 2 15 75 10 2. When operating a cylinder for the first time, be sure to release the air at low pressure.

Flow direction Right Down With element service indicator AMP220 Rc NPT AMP320 AMP420 G Features 1 Exhaust Cleaner for Clean Rooms Series AMP How to Order AMP 2 0 2 03 Optional specifications Body size None Flow direction RightDown With element service indicator Nil R T 2 3 4 1/4 standard 3/8 standard 1/2 standard Element construction Accessories (optional) Nil None 2 2 stage B With

Note 2) This pressure switch detects pressure and converts the data into analog output. When the product is used as a vacuum switch, a pressure sensor controller Series PSE300 (CAT.ES100-56) is necessary.

Flow direction Right Down With element service indicator AMP220 Rc NPT AMP320 AMP420 G 2 Exhaust Cleaner for Clean Rooms Series AMP How to Order AMP 2 0 2 03 Optional specifications Body size None Flow direction RightDown With element service indicator Nil R T 2 3 4 1/4 standard 3/8 standard 1/2 standard Element construction Accessories (optional) Nil None 2 2 stage B With bracket

Flow direction Right Down With element service indicator AMP220 Rc NPT AMP320 AMP420 G 2 Exhaust Cleaner for Clean Rooms Series AMP How to Order AMP 2 0 2 03 Optional specifications Body size None Flow direction RightDown With element service indicator Nil R T 2 3 4 1/4 standard 3/8 standard 1/2 standard Element construction Accessories (optional) Nil None 2 2 stage B With bracket

Before machinery/equipment is restarted, take measures to prevent unexpected operation and malfunction. 2) Vacuum pads are excluded from this 1 year warranty. A vacuum pad is a consumable part, so it is warranted for a year after it is delivered.

proportional valve (VEP type) Current 5 (R1) 4 (A) 1(P) 2 (B) 3 (R2) IRV Simplifying circuit design Space-saving and piping work eliminated 2 (A) 1 (P) Selection of inlet pressure or atmosphere 3 (R) 5 (R1) 4 (A) VEX1 1(P) 2 (B) 3 (R2) SRH SRP SRF System Diagram ARX20 Power amplifier VEA25 VCHR Control circuit Voltage Current ITV 0 to 5 VDC 4 (A) IC 2 (B) PVQ Electro-pneumatic proportional

Refer to page 7-2-5. 2-M3 x 0.5 (Port size) M3 x 0.5 (Relief port: 10See above) (Vacuum port: 11See above) 3.5 20Data C + Stroke 3 B + Stroke A + Stroke Without auto switch With auto switch A B C A B C Bore size (mm) 24 18 29 23 11.5 16.5 6, 8, 10 7-2-7 7 Series CUJ Construction Double acting !3 w e q !1 r y o e t !

4 $7 $6 y %0 %1 CLS CLQ #3 #2 !8 @0 @2 @1 @7 RLQ @3 r MLU o #5 !6 $3 $4 MLGP Component Parts Component Parts Material No.

Compressed air, nitrogen, oxygen or argon can be used as a fluid. 2. Do not use compressed air which includes chemi3.

ARP No load voltage [V peak] Max. current rating [A] 0 to 20 [V] 5.0 IR-A 100 IR Over 20 [V] to 30 [V] Peak voltage 2) A circuit using max. 30 [Vrms] or less (42.4 [V peak]), which is powered by UL1310 or UL1585 compatible Class-2 power supply. 4.

single converter, use a valve unit with individual cylinders as shown in Fig. 2.

A side (2) 2 Sol. B side 3 COM (1) Ground Position Model Left Center Right (1) (3) VFR610 A side COM (2) VFR620 A side COM B side 3 VFR640 5 A side COM B side Can be used as either +COM or -COM. Applicable terminal: 1.25-41.25-4M A side terminal block B side terminal block A side B side 8 VFR6000-OMA0001-B VFR6000 Series Specific Product Precautions 2 Be sure to read before handling.

Conditions and environments outside of the given specifications, or use outdoors or in a place exposed to direct sunlight. 2.

(Representative valve) Ambient and operating air temperature -5 to 60 oC (No freezing) C(dm3/(sbar)) 0.6 [1(P) 2(A)] , 0.5 [2(A)3(R)] Flow rate characteristics b 0.2 [1(P) 2(A)] , 0.15 [2(A)3(R)] Port size Rc, NPT, G1/8 ON timing ON upon the set delay Output method Normal close Reset Resets by exhausting the input signal pressure Weight 480g *) The dispersion is shown excluding the first

R1/8, NPT1/8, G1/8 13 1/2 R1/4, NPT1/4, G1/4 17 11/16 When there is any possibility of having oscillation or rotation of the body A, have the tubing secured when using the product. R3/8, NPT3/8, G3/8 22 7/8 R1/2, NPT1/2, G1/2 27 1-1/16 (4)For M5, 10-32UNF Tightening method First, tighten it by hand, then give it an additional 1/6 turn to 1/4 turn with a wrench.

1/2 BP-13S BP-14S BP-15S 34.5 27.5 22 120 50 AIR VENT 10 G1/4 10 92 7 R3.5 2-Rc P 102 (43) A I N INLET OUTLET B (108) Intermediate holder Note) Installed only for FQ1012 when two L250 elements are used. 84 Model A B P No. of elements 1/2, 3/4 1/2, 3/4, 1 3/4, 1 FQ1010 FQ1011 FQ1012 L125 x 1 L250 x 1 L250 x 2 204 332 593 267 395 656 DRAIN G1/4 Pull-out min. 40 5 Series FQ1 Made to Order Consult