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Approx. 45 g Bracket LFE-2-D Tapping screw 3 x 10, 4 pcs. Approx. 70 g LFE-3-D Tapping screw 3 x 10, 4 pcs. Approx. 70 g -12No.LFE*-OMZ0012 Summary of Product Parts Body Lead wire and M12 connector (4 pins) (Option) Connector Piping port Piping port Bracket (Option) Description Function Connector The part to which Lead wire and M12 connector are connected.

Also, it should be noted that the discharge rate will be less than the normal condition. 2) Air consumption Air consumption Caution Air consumption L/min[ANR] 0 5 10 15 20 25 30 35 40 45 L/min[ANR] -If the compressor output is selected based on air consumption, 0.75kW per 100L/min (ANR) is the guide. 1 2 3 4 5 6 7 8 9 10 Hz Cycle Hz 15 3) Viscosity characteristics With reference to the

1sec OFF time How to Set Digital switch 3 digits Setting accuracy 2% Pulse repetition cycle Possible to set 1 or 2 cycles Operation Single Continuous operation of a single unit Temporary Stop / Start Operation Interlinking Cascade transmission Ground connection It is recommended to ground with resistance of 100 ohms or less Ambient temperature 0 to 50oC (no condensation) Ambient humidity 45

1sec OFF time How to Set Digital switch 3 digits Setting accuracy 2% Pulse repetition cycle Possible to set 1 or 2 cycles Operation Single Continuous operation of a single unit Temporary Stop / Start Operation Interlinking Cascade transmission Ground connection It is recommended to ground with resistance of 100 ohms or less Ambient temperature 0 to 50oC (no condensation) Ambient humidity 45

direct operated poppet valve 2-port direct operated poppet valve 3-port direct operated poppet valve Type of actuation Normally closed Universal Universal Fluid*1 Air, Nitrogen Operating pressure range [MPa] 100 kPa to 0.2 Proof pressure [MPa] 0.6 Ambient and fluid temperatures [C]*2 0 to 50 C [dm3/(sbar)] 0.25 0.12 0.5 Cv 0.07 0.032 0.14 b 0.25 0.25 0.3 Flow rate [L/min (ANR)] at 0.2 MPa*4 45

Dimensions Type R Installation type 372 4 x M5 mounting hole 342 58 34 12 6 72 50 149 2 492 Type J Handy type LQ-GJ 36 76 117 30 49 127 37.5 43 63 Type K Handy type 45 LQ-GK 36 SET POS.

RUN/STOP signal function by remote Acoustic noise 45 to 60dBA (variable fan speed control) 2 RS-232C RD A contact input between pins 4 and 8 of the connector (Alarm, RUN/ STOP, Communication connector) can be used to RUN/STOP(RDY) the product.

XLA-16-2 XLA-25-2 XLA-40-2 XLA-50-2 XLA-63-2 XLA-80-2 16 25 40 50 63 80 5605150 -6 Pa(abs) 110 l/s 1 5 14 45 80 160 200 10 FKM1.310 3/s Pam -11 FKM1.310 KFNW KFNW KDN SUS316L,SUS304,FKM MPa(G) 0.40.7 3 2 0.5MPa 31 61 220 390 680 1420 cm M5 Rc1/8 kg 0.28 0.47 1.1 1.7 3.1 5.1 1 21 9 XL-OMY0001 4-2 XLA-25-2 XLA-40-2 XLA-50-2 AC90240V XL1A25-60S-1 XL1A25-60S-1 1 1 H4 AC100V 200

XLC-16 XLC-25 XLC-40 XLC-50-1 XLC-63-1 XLC-80-1 XLC-100-1 XLC-160-1 16 25 40 50 63 80 100 160 560(5150) -5 Pa (abs) 110 l/s 1 5 14 45 80 160 200 300 800 10 (FKM) 1.310 Pam 3/S -11 (FKM) 1.310 KF(NW) KF(NW)K(DN) SUS316LSUS304FKM() 2 MPa (G) 0.30.6 0.40.6 cm 3 3 0.5MPa 38 91 430 280 500 1000 2300 3700 M5 Rc 1/8 Rc1/4 kg 0.28 0.46 1.1 1.4 2.3 4.0 8.7 14.5 1) 2) Y-VAC2 3) 1 7 XL-OMV0002

Chemraz VALQUA.CO.JP R ULTIC ARMOR 25 40 50 63 80 100 160 H4100 XLA25-60S-1 XLA25-60S-1 XLA25-60S-2 XLA25-60S-3 XLA25-60S-2 XLA25-60S-2 (2 ) (3 H5120 XLA25-60S-1 XLA25-60S-2 XLA25-60S-2 XLA25-60S-3 XLA25-60S-2 XLA25-60S-2 XLA25-60S-2 2 3 4 XLD-80H5 2 XLA25-60S-2 8 XL-OMY0002 4. 4-1 XLD-25 XLD-40 XLD-50 XLD-63 XLD-80 XLD-100 XLD-160 25 40 50 63 80 100 160 [] 5605150 -6 Pa abs 110 14 45

Specifications Model XLDV-25 XLDV-40 XLDV-50 XLDV-63 XLDV-80 XLDV-100 XLDV-160 Flange (valve) size 25 40 50 63 80 100 160 Actuating type Normally closed Fluid Vacuum of inert gas Operating temperature oC 5 to 60 Operating pressure Pa Atmospheric pressure to 1 x 10-6 Main pumping 14 45 80 160 200 300 800 Conductance l/s Note 1 Initial pumping 0.53 28 2.511 48 418 6.531.5 6.531.5 Internal 1.3

XLH-16 XLH-25 XLH-40 XLH-50 16 25 40 50 5150 -6 Pa (abs) 110 l/s 1 5 14 45 80 10 FKM1.310 3/s Pam -11 FKM1.310 KFNW SUS316L,FKM Nm 0.1 0.15 0.35 0.5 5 7 10 13 0.23 0.41 1.05 1.62 1) 3-2.

Specifications Model XLJ-25-*G1 XLJ-40-*G1 Flange (valve) size 25 40 Actuating type Normally closed (vacuum pilot) Fluid Evacuation with inert gas Operating temperature oC 540 Direction of exhaust Fixed Note 1 Operating pressure Pa (abs) Atmospheric pressure to 110-2 Conductance l/s Note 2 12 45 Operating power voltage 100VAC, 200VAC,110VAC,220VAC,230VAC,240VAC,24VDC,12VDC Electrical entry

Tension bolt Table 3 Guideline of the wing nut tightening amount Model FGES L A FGES L B FGES L C Element size (mm) 65 to 70 250 65 to 70 500 65 to 70 250 65 to 70 750 65 to 70 250 Wing nut tightening amount 26 to 30 40 to 45 33 to 38 51 to 55 27 to 44 Wing nut tightening amount (mm) 11/12 FGX-OM-L008-A 5-4 [Mount O-ring and cover] (1) Set O-ring to the case (2) Rotate the cover clockwise

Set the handle in a position which does not interfere with either IN side or Latch Latch (slanted by 45 degrees) 5 [Mounting of the cover] Positioning mark Set O-ring to the case. Mount the tube gasket to the cover. on the cover Rotate the cover clockwise pushing down to the end so that the positioning mark for the cover and the case meet.

For example, when the power supply voltage is stopped for 1 hour and 45 minutes, the accumulated time will be 1 hour. When the power supply voltage is turned on again, the accumulation starts from 1 hour. When calibration is performed again, the recorded data is reset. 10 (Recording example) 7.

Usable stroke by buckling strength Usablestroke by Mounting style buckling strength (cm) Pressure Symbol and sketch (MPa) Symbol of bracket Rod side Frang e F Head side flange 103 92 113 Foot: 79 70 86 L G 66 58 72 45 38 47 33 27 34 26 22 27 96 83 106 Center Clevis trunnion 71 61 76 CD T 59 50 62 135 119 147 101 89 111 84 74 91 Rod side Frang e F Head side flange 301

MXQA-A1687 MXQ16B MXQB-A1687 MXQ20(A) MXQA-A2087 MXQ20B MXQB-A2087 MXQ25(A) MXQA-A2587 )MXQ6B MXQ6(C) Nm MXQ6(A) RJ0603 0.85 MXQ8(A,C) MXQ6B RJ0603 0.85 MXQ12(A,C) MXQ8B RJ0805 1.67 MXQ16(A) MXQ12B RJ1006 3.14 MXQ20(A) MXQ16B RJ1007H 3.14 MXQ25(A) MXQ20B RH1410 10.8 12 2-8 kg RJ MXQ6(A) 0.6 0.6 0.6 MXQ8(A,C) 1 1 1 1 MXQ12(A,C) 2 2 2 1 MXQ16(A) 4 4 4 2.5 MXQ20(A) 6 6 6 5 MXQ25(A) 9 9 9 5.5 2 45

60204-1: Safety of machinery -Electrical equipment of machines (Part1:General requirements) ISO 10218-1992: Manipulating industrial robots -Safety JIS B 8370: JIS B 8361: JIS B 9960-1: -(1:) JIS B 8433-1993: *2) 1. 2. 3. 1. 2. 3. 4.2 MGP series 113) 3) 1 1 () 4 2 T (d=) 2 T 2 2 RSQ 400mm (mm) 3 1mm MGPM MGPL (mm) MGPS (mm) (mm) 10% 25% 140% (/MGPM50) MGPS MPGM 50 30 25 80 45

[Example] Rotary table: 180o Switch operating angle: 90o When the switch is mounted at the rotation end As shown in the left figure above, when the magnet rotates in the arrow direction, the switch turns on at the position where 45 degrees away from the the rotation end where the switch is mounted.