M L K J H E t W1 W2 M 14 20 25 29 37 49 58 69 89 100 117 136 14.5 20.5 24.5 30.5 36.5 48.5 6 7 7 9 9 10 11 16 21 24 32 41 10 17 22.5 24.5 27 30 16 21 26 32 41 50 17 24 28 36 43 55 8 8 8 8 13 13 1/8" 1/4" 3/8" 1/2" 3/4" 1" LQ3P1A LQ3P2A LQ3P3A LQ3P4A LQ3P5A LQ3P6A 1/4 (E) (E) L Panel Aperture (K) Straight Union : LQ3U (mm) Inch Size H Model Tubing O.D.
SY7000 With light/surge voltage suppressor Response time (ms) (at the pressure of 0.5 MPa) With light/surge voltage suppressor Response time (ms) (at the pressure of 0.5 MPa) Type of actuation Without light/surge voltage suppressor 12 or less Type of actuation Without light/surge voltage suppressor 31 or less Type R, U Type S, Z 12 or less 15 or less 2 position single 10 or less 10 or less 13
Orifice size mm Series Symbol 1 2 2 3 4 1 1.6 2 3 4 200 1 1.8 300 13 Compact Direct Operated Series VDW200/300 3 Port Solenoid Valve for Water and Air Standard Specifications Valve construction Direct operated poppet Fluid Note 2) Water (except waste water or agricultural water), Air, Low vacuum Valve specifications Coil specifications Burst pressure MPa (psi) 2.0 (290) Ambient temperature
FKM (Standard seal material) Pilot torque Nm 0.1 % 0.15 % 0.35 % 0.5 % Handle revolutions 5 7 10 13 Service life (million cycles) 10 XMH 0.31 (0.35) 0.57 1.35 (1.71) 2.02 Weight kg Note 2) XYH 0.62 1.37 2.42 Note 1) Conductance is the value for the molecular flow of an elbow having the same dimensions. Note 2) Figures in ( ) indicates the weight of CF, conflate fittings.
Valve model Port size L J H G F E D C A B VCW20-12-01A VCB2 1/8, 1/4 13 6 4.5 5 12.8 12.8 30 25 40 34 VCW30-12-02A 1/4, 3/8 19 7 5.5 6 19 19 40 30 52 42 VCB3 VCW30-12-04A 1/2 23 7 5.5 6 23 23 44 36 56 48 VCW40-12-02A 1/4, 3/8 19 7 5.5 6 23 23 40 30 42 52 VCW30-12-04A VCB4 1/2 23 7 5.5 6 23 23 44 36 56 48 VCW40-12-06A 3/4 26 7 5.5 6 28.2 28.2 53 44 56 65 Two mounting screws (for mounting
suction flow rate l/min (ANR) Model S M H ZMA05H 0.5 12 18 ZMA07H 0.7 24 23 0.5MPa ZMA10H 1.0 46 36 2 stage diffuser ZMA13H 1.3 95 40 ZMA07M 0.7 16 20 ZMA10M 1.0 0.35MPa 26 32 ZMA13M 1.3 70 36 ZMA13S 1.3 75 38 1 stage diffuser 0.45MPa ZMA15S 1.5 90 45 Series ZMA How to Order ZMA 07 1 H K 5 T14 C Nozzle diameter Switch lead wires (connector type) 0.5mm 0.7mm 1.0mm 1.3mm 1.5mm 05 07 10 13
Refer to CAT.E824A "Pressure Switch" Series ZR How to Order Ejector Systems ZR1 20 S 25 M Z 1 5 K1 D1 Ejector unit nozzle size 1.0mm 10 Digital vacuum switch specifications (D1, D2, D3) 1.3mm 13 Symbol Lead wire length 1.5mm 15 Applicable switch Output specifications 25 (L) Lead wire length 0.6 (3.0) m 1.8mm NPN output 18 D1 D2 26 (L) Lead wire length 0.6 (3.0) m Analog output 2.0mm 20 65
25MM MXS CLEAN ROOM, ACTUATOR, MXS/MXJ GUIDED CYLINDER, I5, 25MM MXS CLEAN ROOM, 8.92872 lb, ModelABEAuto switch operation range StrokeStroke 10203040507510012515010203040507510012515013-MXS252337.527.517.517.520.536.552.585.5100.535.5(33)25.5(23)15.5(13)15.5(13)18.5(16)34.5(32)50.5(48)83.5(81)98.5(96)8
)15.5(13)18.5(16)34.5(32)50.5(48)83.5(81)98.5(96)8
)15.5(13)18.5(16)34.5(32)50.5(48)83.5(81)98.5(96)8
)15.5(13)18.5(16)34.5(32)50.5(48)83.5(81)98.5(96)8
)15.5(13)18.5(16)34.5(32)50.5(48)83.5(81)98.5(96)8
Lateral vacuum inlet with adapter, Pad diameter: 1.5, 2, 3.5, 4, 6, 8, 10, 13, 16, Pad type: flat, flat with groove, bellows, Pad material: NBR, FKM, silicone rubber, urethane rubber, conductive NBR, conductive silicone rubber, Lateral Vacuum Inlet, w/buffer, VACUUM PAD, ZP, ZP2, ZP3, M30, 13 lb
Vertical vacuum entry with adapter, Pad diameter: 1.5, 2, 3.5, 4, 6, 8, 10, 13, 16, Pad type: flat, flat with groove, bellows, Pad material: NBR, FKM, silicone rubber, urethane rubber, conductive NBR, conductive silicone rubber, Vertical Vacuum Inlet, w/buffer, VACUUM PAD, ZP, ZP2, ZP3, M30, 13 lb
Vertical vacuum entry with adapter, Pad diameter: 1.5, 2, 3.5, 4, 6, 8, 10, 13, 16, Pad type: flat, flat with groove, bellows, Pad material: NBR, FKM, silicone rubber, urethane rubber, conductive NBR, conductive silicone rubber, Vertical Vacuum Inlet, w/buffer, VACUUM PAD, ZP, ZP2, ZP3, M30, 13 lb
)15.5(13)18.5(16)34.5(32)50.5(48)83.5(81)98.5(96)8
The Display Refer to Trouble No.13 measurement unit cannot be changed. Refer to Trouble No.14 Buttons do not work. The body of the Refer to Trouble No.15 pressure switch has become loose. Refer to Trouble No.16 There is noise. Refer to Trouble No.17 Copy function error. Not able to copy.
The Display Refer to Trouble No.13 measurement unit cannot be changed. Refer to Trouble No.14 Buttons do not work. The body of the Refer to Trouble No.15 pressure switch has become loose. Refer to Trouble No.16 There is noise. Refer to Trouble No.17 Copy function error. Not able to copy. Copy error [Er13] is displayed on the copy destination pressure switch.
The Display Refer to Trouble No.13 measurement unit cannot be changed. Refer to Trouble No.14 Buttons do not work. The body of the Refer to Trouble No.15 pressure switch has become loose. Refer to Trouble No.16 There is noise. Refer to Trouble No.17 Copy function error. Not able to copy.
This is affected by noise etc. 11 Supply pressure fluctuates. 12 Pilot pressure (for external pilot type) fluctuates. 13 8 VY-OMK0001-C Air leakage detected from the P2 port. Air leakage There is bleed from Port P2 during operation, but this is not an error. Abnormal amount of air leakage is found from the 3 (R) port.