Thermo-chiller/Rack Mount Type

Applicable model HRR012/018--10-T/MT*1 HRR012/018/024/030--20-T HRR012/018/024/030--20-MT1 Pump Rated flow (50/60 Hz)2, 3 L/min 7 (0.36 MPa)/10 (0.42 MPa) 10 (0.42 MPa)/14 (0.40 MPa) 10 (0.32 MPa)/14 (0.32 MPa) Maximum pump head (50/60 Hz) m 50 50 50 Output W 350 550 Circuit protector A 15 15 (10 A for standard) Recommended earth leakage breaker capacity A 15 Cooling capacity4 W The cooling

Basic Type/Direct Mount Type

Q N F I NA F N CC 0.1 + CY3B6 to 15 CY3B50, 63 (mm) B 17 25 35 36 46 60 70 86 100 0.007 0.043 30 32 CC 32 38 D 7.6 12 16.6 21.6 26.4 33.6 41.6 52.4 65.4 E 4 1.5 2 2 2 2 3 8 8 F 8 9 10 13 13 16 16 2 2 G 5 5 5.5 7.5 7.5 8 11 14 14 H 13.5 12.5 13 20 20.5 22 29 33 33 I 28 34 40 50 58 72 J 4.5 4.5 6 6 8 8 10 12 12 K 5 4 11 8 10 15 16 25 26 N 9.5 11 11 18 18.5 20 26 25 25 Q NN S 62 63 83 106 111

AS-FPQ/AS-FPG

A Note 1) 4 6 4 6 8 4 6 8 10 6 8 10 12 10 12 AS121FP-M5-04 AS121FP-M5-06 AS221FP-01-04 AS221FP-01-06 AS221FP-01-08 AS221FP-02-04 AS221FP-02-06 AS221FP-02-08 AS221FP-02-10 AS321FP-03-06 AS321FP-03-08 AS321FP-03-10 AS321FP-03-12 AS421FP-04-10 AS421FP-04-12 28 7 7 18.4 23.2 8 10.4 22.2 25 25.5 28.3 9.6 M5 x 0.8 12.2 29 8 8 19.4 24.2 12.8 32.4 17 17 18.4 25.3 10.4 27.4 32.4 31.4 36.4 14.2 12

CHKD/CHKG

8 x L counter bore J J A + Stroke M M Rod end male thread CHKDB20, 25 CHKDB32 to 100 Water resistant type S N g C B + Stroke h + Stroke A + Stroke Rod end male thread (mm) B C D E F G H J K L M P Q R A Bore size (mm) 20 51 43 8 12 10 M8 x 1.25 10 6 30 5.5 9.5 depth 5.4 43 1/8 16.5 6 25 53 45 8 14 12 M10 x 1.5 12 6 36 5.5 9.5 depth 5.4 49 1/8 17 8 32 61 51 10 18 14 M12 x 1.75 15 7 47 6.6

Cylinder with Lock Series CLS

Graph 1 30 20 10 The movement time is the time that is necessary for the load to travel the total movement distance from the start without any intermediate stops. 2.

Series MXP/MXPJ6 11- ø6, ø10, ø12, ø16 22- Air Slide Table

depth 2 2.5 Q QL 11-/22-MXPJ6-10 4 x M3 x 0.5 depth 3 F (mm) E F H J M Q QL S Z Model 23 25 38 27 37 28 8 5 44 11-/22-MXPJ6-51 30 35 53 42 47 37 11 10 59 11-/22-MXPJ6-10 833 Air Slide Table MXP/MXPJ6 1122Dimensions: MXP6 1122Air Preparation Equipment Pressure Control Equipment Flow Control Equipment Pressure Switches/ Pressure Sensors Directional Control Valves Air Grippers Modular F.

Speed Controller with One-touch Fitting for Clean Room Series AS-FPQ/AS-FPG

A Note 1) 4 6 4 6 8 4 6 8 10 6 8 10 12 10 12 AS121FP-M5-04 AS121FP-M5-06 AS221FP-01-04 AS221FP-01-06 AS221FP-01-08 AS221FP-02-04 AS221FP-02-06 AS221FP-02-08 AS221FP-02-10 AS321FP-03-06 AS321FP-03-08 AS321FP-03-10 AS321FP-03-12 AS421FP-04-10 AS421FP-04-12 28 7 7 18.4 23.2 8 10.4 22.2 25 25.5 28.3 9.6 M5 x 0.8 12.2 29 8 8 19.4 24.2 12.8 32.4 17 17 18.4 25.3 10.4 27.4 32.4 31.4 36.4 14.2 12

11- Series MXP/MXPJ6 Air slide table 22- ø6, ø10, ø12, ø16

2-M3 x 0.5 (Plug: M-3P) 6 (fitting seat surface dimension) 170.05 M3 x 0.5 Vacuum suction port Stroke: S M 1 Mounting base side B D Piping port 2-M3 x 0.5 A 5 5.5 A 3.2 J 2.4 Z Section AA 3.5 Depth 2 2.5 +0.030 0 7 +0.030 0 Depth 2 2.5 Q QL 11-/22-MXPJ6-10 4M3 x 0.5 depth 3 F (mm) E F H J M Q QL S Z Model 23 25 38 27 37 28 8 5 44 11-/22-MXPJ6-51 30 35 53 42 47 37 11 10 59 11-/22-MXPJ6-10

ZPT/ZPX

27 9 9 35 35 M18 x 1.5 M18 x 1.5 9 Width across flats 16 Rc 1/8 9 10 Width across flats 16 Rc 1/8 10 Hexagon width across flats 21 J Hexagon width across flats 21 J Width across flats 37 4-M4 x 0.7 Width across flats 24 28 45 I I 3-M3 x 0.5 H H 10 10 G G F F E E Y Y 3 4 18 34 C C A A Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650)

MXH

San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 17 CX 38 39 15 19 10 18 19 18 D5 -X 5.5 10 5.5 5.5 NS 4 209 10.5 8.5 31 + Stroke 39.5 + Stroke 16 Data 4-M3 x 0.5 Depth 4.8 5 + Stroke 10 (mm) Stroke (mm) NS LA LB LT J 5 42 14 10 4 10 42 14 4 10 15 24 52 4 20 20 24 20 52 4 25 62 30 30 4 30 62 30 4 30 40 45 72 6 20

MXH Series Compact Slide

socket head set screw) 4-M5 x 0.8 x 4l Guide rail width 5 3-M4 x 0.7 through Bottom hole dia. 3.3 6-6 counter bore depth 3.3 4-M3 x 0.5 Depth 5.5 2-M5 x 0.8 6.5 5 4-M3 x 0.5 Depth 4.8 17 38 39 15 19 10 18 19 18 5 5.5 10 5.5 5.5 NS 4 9 10.5 8.5 31 + Stroke 39.5 + Stroke 16 4-M3 x 0.5 Depth 4.8 5 + Stroke 10 Stroke (mm) NS LT LB LA J 5 42 14 10 4 10 42 14 4 10 15 24 52 4 20 20 24 20 52

240

NS 14 14 24 24 30 30 45 55 60 LT 42 42 52 52 62 62 72 82 92 LB 20 25 30 LA 10 10 20 20 30 30 20 25 30 J 4 4 4 4 4 4 6 6 6 Stroke (mm) 5 10 15 20 25 30 40 50 60 24 Compact Slide MXH Series Dimensions: 10 LT MXH MXH 19 11 MXS MXQ 11 LA LB J x M4 x 0.7 Depth 6 MXQ 3 x M5 x 0.8 through Pilot hole dia 4.3 2 x 3 x 7.5 counterbore depth 4.4 MXF 2 x 2 x M5 x 0.8 Cylinder port (With plug for port)

MY1

10 1.

Vacuum Pad

Stroke (M) Buffer specification Symbol Stroke 20, 25 35, 50 10 10 mm V V 20 20 mm V V J Rotating K Non-rotating Specifications Pad diameter Buffer specification Stroke [mm] Tightening torque [Nm] Mounting Spring reactive force [N] At 0 stroke At full stroke 20, 25 J/K 10, 20 2.5 to 3.5 M10 x 1 1.0 3.0 35, 50 J/K 10, 20 6.5 to 7.5 M14 x 1 2.0 5.0 Precautions Be sure to read this before handling

Thermo-chiller

x V x C x iT it m x C x (T0 Tt) it Q = = 1 x 150 x 4.186 x 103 x 10 900 = = 6977 [J/s] 7.0 [kW] m x C x (T0 Tt) it x 860 x V x 60 x C x iT it x 860 Q = = Cooling capacity = Considering a safety factor of 20%, 7.0 [kW] x 1.2 = 1 x 150 x 60 x 1.0 x 103 x 10 15 x 860 8.4 [kW] = Q x t: Heat capacity [kJ] Thermo-chiller Water bath 6977 [W] = 7.0 [kW] 20C Cooling capacity = Considering a safety

Rotary Gripper Series MRHQ

10 Gripping force N Gripping force N 8 8 0.5MPa 0.5MPa 0.5MPa 0.5MPa 6 6 0.4MPa 0.4MPa 0.4MPa 0.4MPa 4 4 0.3MPa 0.3MPa 0.3MPa 0.3MPa 2 2 0 10 20 30 40 50 0 10 20 30 40 50 Gripping point L mm Gripping point L mm MRHQ16S MRHQ16C 40 40 Pressure 0.6MPa Pressure 0.6MPa Gripping force N Gripping force N 30 30 0.5MPa 0.5MPa 20 20 0.4MPa 0.4MPa 0.3MPa 0.3MPa 10 10 0 10 20 30 40 50 60 0 10 20 30

AS-FPQ/AS-FPG

A Note 1) AS121FP-M5-04 AS121FP-M5-06 AS221FP-01-04 AS221FP-01-06 AS221FP-01-08 AS221FP-02-04 AS221FP-02-06 AS221FP-02-08 AS221FP-02-10 AS321FP-03-06 AS321FP-03-08 AS321FP-03-10 AS321FP-03-12 AS421FP-04-10 AS421FP-04-12 4 6 4 6 8 4 6 8 10 6 8 10 12 10 12 28 7 7 18.4 23.2 8 10.4 22.2 25 25.5 28.3 9.6 M5 x 0.8 12.2 29 8 8 19.4 24.2 12.8 32.4 17 17 18.4 25.3 10.4 27.4 32.4 31.4 36.4 14.2 12

33

Outlet: 60 Hz Outlet: 60 Hz 20 20 0.1 0.1 10 10 Outlet: 50 Hz Outlet: 50 Hz Return port Allowable operating range Return port Allowable operating range 0 0 0 5 10 15 20 25 30 0 5 10 15 20 25 30 Circulating fluid flow rate [L/min] Circulating fluid flow rate [L/min] 202 Thermo-chiller Basic Type HRSE Series Dimensions HRSE012/018/024-A-10/20/23 Ventilation air outlet Ventilation air inlet

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

Y GC 12 15 J M14 x 2 M16 x 2 MM M8 x 1.25 M10 x 1.25 A 212 245 B 17 19 C 10.5 12.5 CH 41.5 47.0 G 27.0 29.5 GA 25.0 27.5 GB 37.5 39.5 H 124 149 K 28 32 L 250 290 LD 11 14 LH 57 65 LL 87 100 LW 168 200 M 15 16 N 47 50 NC 44 60 NE 122 147 NH 60 70 Bore size (mm) 50 63 SS 10 13 NW 118 142 PA 120 140 PB 186 220 PG 10 12 PP 26 42 Q 380 436 QQ 28 30 QW 90 110 RR 35 49 TT 35 43 UU 24 28 VV 28 30

energy saving effect

Cooling Capacity HRSH100-A-20/40HRSH100-W-20/4014 16 Ambient temperature 32C Facility water temperature 32C 14 12 Cooling capacity [kW] Cooling capacity [kW] 10.5 10 11.5 12 10 Ambient temperature 43C 8 8 Facility water temperature 40C 6 6 Ambient temperature 45C 4 4 2 2 0 0 5 10 15 20 25 30 35 5 10 15 20 25 30 35 Circulating fluid temperature [C] Circulating fluid temperature [C] HRSH150