2 Finger, 3 Finger, 4 Finger Air Gripper Parallel Type Series MHS

100 0.2MPa 0.2MPa 50 50 0.1MPa 0.1MPa 0 0 10 10 20 20 30 30 40 40 50 50 Gripping point L mm Gripping point L mm MHS2-50D MHS2-50D F 400 400 Internal gripping Pressure 0.6MPa Pressure 0.6MPa 300 300 Gripping force N 0.5MPa 0.5MPa Gripping force N 0.4MPa 0.4MPa 200 200 0.3MPa 0.3MPa 1N: Approx. 0.102kgf 1MPa: Approx. 10.2kgf/cm2 0.2MPa 0.2MPa 100 100 0.1MPa 0.1MPa 0 0 20 20 40 40 60 60 Gripping

17

Maximum Allowable Moment MY1B/M1 MY1B/M2 MY1B/M3 200 300 400 500 40 50 100 30 200 20 50 40 30 100 10 20 40 50 3 4 5 30 10 20 Moment Nm Moment Nm Moment Nm 2 5 4 3 10 1 MY1B40 MY1B40 5 4 3 2 MY1B40 MY1B40 MY1B40 MY1B40 0.3 0.4 0.5 MY1B32 1 2 MY1B32 MY1B32 MY1B25 0.2 1 0.5 0.4 0.3 MY1B25 MY1B25 0.1 0.4 0.5 0.2 0.3 0.05 0.04 0.03 0.2 0.1 0.02 0.06 0.1 100 200 300 400 500 1000 1500 100 200 300

Electric Actuator / Low profile slider type

Move M Spee Position Accel Decel PushingF TriggerLV PushingS mm/s mm mm/s2 mm/s2 % % mm/s % mm mm mm 0 Absolute 100 100.00 3000 3000 0 0 0 100 80.00 90.00 1.00 Position[mm] c The INP output signal is turned on from 100[mm] -1[mm]=99[mm] 100 Speed[mm/s] b 0 ON (INPOutput condition) INP Output signal OFF In posn[mm] k 101 99 0 10 20 30 40 50 60 70 80 90 100 Stroke [mm] Position[mm] c The AREA

CE

MVGQ CC RB Cylinder Stroke J Standard stroke (mm) Manufacturable stroke range 25 DModel 100 75 50 -X CEP1B12 0 to 150 CEP1B20 0 to 300 20But, as for stroke over 100 mm, its accuracy will be 0.05 mm.

Compact Cylinder

(Note: Reed auto switches for 100 VAC and 100 VDC are not within the specification.

Stroke Reading Cylinder and Counter

SET MODE SD SG RD RS-232C COM S.STOP OUT1OUT2OUT3OUT4OUT5 100 to 240 VAC 1 t 1 10 x 106 100 kHz Counting speed f = = = 10 Hz 7 10 4 x 4.5 33.5 104 BCD output connector 2) UP/DOWN input Input wave form conditions: At a maximum of 100 kHz, the UP/DOWN wave form should be as shown below. 125 +12 V 10% UP pulse +12 V 10% DOWN pulse 64 59 3) 15 mA when BCD is output (Refer to page 676.) 668

VCC

(Equivalent tightening torque: T) 18.8 13.8 11.8 5.8 2.8 0.5 8.6 11 G1/4 (mm) Part no.

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Rod cover Tolerance h9 Clean room series Series 10-, 11-CUJ Two auto switches can be installed even for 4mm strokes.

Process Pump

Viscosity Transfer is possible up to about 100 mPas.

SI unit for DeviceNet ®

Maximum cable length for network Communication speed Drop line length Cumulative Drop Thick cable Thin cable 500 kbps 100 m 100 m 39 m max 250 kbps 250 m 100 m 78 m max 6 m or less 125 kbps 500 m 100 m 156 m max Terminating resistors DeviceNet requires a terminating resistor to be installed at each end of the trunk.

AIR COMBINATION

Note 5) If the compressor is small (0.75 kW, discharge flow is less than 100 L/min[ANR]), air leakage from the drain cock 11 Option / Semi-standard : Select one each for a to l. Option / Attachment / Semi-standard symbol : When more than one specification is required, indicate in alphanumeric order.

VDW

2 3 4 5 n U side VDW23-GVDW23-GVDW23-GVDW23-G70 31.5 21 18.5 (OUT port) n-1/8 n-M5 x 0.8 11 P = 22 11 4.5 1.5 54 6 32 6 (19.5) 9.5 11 9.5 11 4-M4 x 0.7 46 10 24 10 When w/o bracket, M3 threads at both ends (4 positions) can be used for other purposes.

Process Valve

(mm) Symbol 1 2 3 Note 2) Port size Rc 100 VAC 50/60 Hz 200 VAC 50/60 Hz 110 VAC 50/60 Hz 220 VAC 50/60 Hz 24 VDC 12 VDC 240 VAC 50/60 Hz 1 2 3 Note 1) 4 Symbol Nil: Non-locking push type N.C. 1 MPa N.C. 0.5 MPa N.O. 1 MPa C.O. 1 MPa Note) 4 Note 2) A: Non-locking push type A (projecting) 1 6A 8A 10A 1 8 1 4 3 8 5 6 Note 2) 7 Valve size 1 to 4 7 Note 2) 11 15 11 10A 3 8 B: Slotted locking

Electric Actuator / High Rigidity Slider Type 《 AC servo motor ・ Motorless 》

Specification 1.1 AC servo motor 1.1.1 How to order L E J S 100 T9 B 500 T X400 Lead [mm] Motor type Stroke [mm] H 50 200 200 T9 AC servo motor to to A 25 1500 1500 B 10 *Refer to the applicable stroke table.

ZL3-OM00601

Vacuum Pressure switch for vacuum with for compound pressure switch energy saving function pressure Rated pressure range [kPa] -101 to 0 -100 to 100 Set / display pressure range [MPa] -101 to 10 -105 to 105 Proof pressure [kPa] 500 Lowest configurable increment [kPa] 0.1 Applicable fluid Air, non-corrosive gas and non-flammable gas Power supply voltage: [VDC] 12 to 24 10%, ripple (p-p), 10%

NAAMS Standards Compliant

Clamping block Fulcrum L Bore size: 50 Bore size: 63 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 50 100 150 200 250 300 10 9 8 7 6 5 4 3 2 1 0 50 100 150 200 250 300 Allowable load mass [kg] Allowable load mass [kg] 15 15 105 30 30, 45, 60 105 90 120 120 75 90 45, 60 75 Arm opening angle: 135 Arm opening angle: 135 Distance to the center of gravity [mm] Distance to the center of gravity [mm] Bore

20,000 (Refer to page 71 for limit according to work load and duty ratio.)o0.021250/20Ball screwLinear guide5 to 4090 or less (No condensation)100 W/;40AC servo motor (100/200 VAC)Motor type S2, S3, S4: Incremental 17-bit encoder (Resolution: 131072 p/rev) Motor type S6, S7, S8: Absolute 18-bit encoder (Resolution: 262144 p/rev)4514528445Non-magnetizing lock1316.324 VDC 010%

20,000 (Refer to page 71 for limit according to work load and duty ratio.)o0.021250/20Ball screwLinear guide5 to 4090 or less (No condensation)100 W/;40AC servo motor (100/200 VAC)Motor type S2, S3, S4: Incremental 17-bit encoder (Resolution: 131072 p/rev) Motor type S6, S7, S8: Absolute 18-bit encoder (Resolution: 262144 p/rev)4514528445Non-magnetizing lock1316.324 VDC 010%

Air Suction Filter Series ZF Prevent from occurring vacuum equipment trouble due to ZA dust from vacuum pad ZX Port size ZR Air flow Filtration Series Features Page (μm) Applicable tubing O.D. (l/min(ANR)) ZM Screw-in for one-touch fittings ZMA ZQ ZFA 

How to Order ZFB 100 04 IN/OUT applicable tubing O.D.

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Rating symbol DC 24 VS V100-61-5-05 24 VDC DC 12 VS V100-61-5-06 12 VDC 100/110 VS V100-61-4-01 100 VAC 200/220 VS V100-61-4-02 200 VAC 100/110 VS V100-61-4-01 110 VAC 200/220 VS V100-61-4-02 220 VAC 240 VS V100-61-4-07 240 VAC With Light/Surge Voltage Suppressor Rated voltage Part no.