sResponse timeHysteresisPower supply voltageResistancePF2A751Air, Nitrogen25 to 525 l/min25 to 525 l/min50 to 500 l/min5 l/min5 l/pulsel/min, CFM x 10-1l, ft3 x 10-10 to 50C?5% F.S. or less?2% F.S. or less?3% F.S. or less (15 to 35C, based on 25C), ?5% F.S. or less (0 to 50C, based on 25C)170 mA or less290 g1/2Heater type3-digit, 7-segment LED?

sResponse timeHysteresisPower supply voltageResistancePF2A751Air, Nitrogen25 to 525 l/min25 to 525 l/min50 to 500 l/min5 l/min5 l/pulsel/min, CFM x 10-1l, ft3 x 10-10 to 50C?5% F.S. or less?2% F.S. or less?3% F.S. or less (15 to 35C, based on 25C), ?5% F.S. or less (0 to 50C, based on 25C)170 mA or less290 g1/2Heater type3-digit, 7-segment LED?

sResponse timeHysteresisPower supply voltageResistancePF2A751Air, Nitrogen25 to 525 l/min25 to 525 l/min50 to 500 l/min5 l/min5 l/pulsel/min, CFM x 10-1l, ft3 x 10-10 to 50C?5% F.S. or less?2% F.S. or less?3% F.S. or less (15 to 35C, based on 25C), ?5% F.S. or less (0 to 50C, based on 25C)170 mA or less290 g1/2Heater type3-digit, 7-segment LED?

sResponse timeHysteresisPower supply voltageResistancePF2A751Air, Nitrogen25 to 525 l/min25 to 525 l/min50 to 500 l/min5 l/min5 l/pulsel/min, CFM x 10-1l, ft3 x 10-10 to 50C?5% F.S. or less?2% F.S. or less?3% F.S. or less (15 to 35C, based on 25C), ?5% F.S. or less (0 to 50C, based on 25C)170 mA or less290 g1/2Heater type3-digit, 7-segment LED?

sResponse timeHysteresisPower supply voltageResistancePF2A751Air, Nitrogen25 to 525 l/min25 to 525 l/min50 to 500 l/min5 l/min5 l/pulsel/min, CFM x 10-1l, ft3 x 10-10 to 50C?5% F.S. or less?2% F.S. or less?3% F.S. or less (15 to 35C, based on 25C), ?5% F.S. or less (0 to 50C, based on 25C)170 mA or less290 g1/2Heater type3-digit, 7-segment LED?

sResponse timeHysteresisPower supply voltageResistancePF2A751Air, Nitrogen25 to 525 l/min25 to 525 l/min50 to 500 l/min5 l/min5 l/pulsel/min, CFM x 10-1l, ft3 x 10-10 to 50C?5% F.S. or less?2% F.S. or less?3% F.S. or less (15 to 35C, based on 25C), ?5% F.S. or less (0 to 50C, based on 25C)170 mA or less290 g1/2Heater type3-digit, 7-segment LED?

sPower supply voltageResponse timeHysteresisResistancePF2A310/3115 to 105 l/min5 to 105 l/min1 l/min1 l/pulsel/min, CFM x 10-1l, ft3 x 10-10 to 999999 l?5% F.S. or less?1% F.S. or less?1% F.S. or less (15 to 35C, based on 25C)?

sPower supply voltageResponse timeHysteresisResistancePF2A310/3115 to 105 l/min5 to 105 l/min1 l/min1 l/pulsel/min, CFM x 10-1l, ft3 x 10-10 to 999999 l?5% F.S. or less?1% F.S. or less?1% F.S. or less (15 to 35C, based on 25C)?

sPower supply voltageResponse timeHysteresisResistancePF2A310/3115 to 105 l/min5 to 105 l/min1 l/min1 l/pulsel/min, CFM x 10-1l, ft3 x 10-10 to 999999 l?5% F.S. or less?1% F.S. or less?1% F.S. or less (15 to 35C, based on 25C)?

sPower supply voltageResponse timeHysteresisResistancePF2A310/3115 to 105 l/min5 to 105 l/min1 l/min1 l/pulsel/min, CFM x 10-1l, ft3 x 10-10 to 999999 l?5% F.S. or less?1% F.S. or less?1% F.S. or less (15 to 35C, based on 25C)?

ZSP1

With Connector/How to Order ZS-10-A Without lead wire (Connector 1 pc. Socket 3 pcs.) ZS-10-5AWith lead wire Lead wire length Nil Note) When ordering switch with 5 m long lead wire, Indicate both part numbers. Ex.) ZSP1-0X-15CN 1 pc.

Air Suction Filter Series ZFA 1

Pitch (Section F-F') Port size (The above diagram is for ZFA200) ZFA100 Port size Symbol Model A B 19 18 24 28 1 8 1 4 ZFA200 L1 1 Number of manifold stations Model Symbol 2 56 68 76 88 3 74 86 104 116 4 92 104 132 144 5 110 122 160 172 6 128 140 188 200 7 148 158 216 228 8 164 176 244 256 9 182 194 272 284 10 200 212 300 312 38 50 48 60 ZFA100 L2 L1 L2 ZFA200 13-10-3

ASP-X352

Body size Metric size Inch size 3 4 5 6 1/8 1/4 3/8 1/2 07 09 11 13 06 08 10 12 6mm 8mm 10mm 12mm 1/4 5/16 3/8 1/2 Thread size Universal type 01 02 03 04 1/8 1/4 3/8 1/2 With One-touch fitting Uni-fit thread form Dimensions Models TUBE O.D. d L3 Applicable tubing O.D.

06-rebh-e

Contents Bore size (mm) REBH15-PS REBH25-PS REBH15-PS REBH25-PS 15 25 Set of left nos. @9, #0, #1, #2, #3, #4, #5 @9 #0 #1 #2 #3 #4 #5 Wear ring A Special resin Wear ring B Special resin Note) Cushion seal #5 may be difficult to be replaced. Seal kit includes a grease pack (10 g). Order with the following part number when only the grease pack is needed.

Electric Actuator/Slider Type Motor Parallel Type Series LEFS LEFS16, 25, 32, 40 Step Motor (Servo/24 VDC) Servo Motor (24 VDC) ®

Symbol LEFS16 LEFS25 LEFS32 LEFS40 A 10 12 16 20 B 5 6 8 10 Stroke [mm] 100 100 to to 1000 1000 Refer to the applicable stroke table. [UL-compliant products] When conformity to UL is required, the electric actuator and controller/driver should be used with a UL1310 Class 2 power supply.

Electro

4 60 PSI (4kg|/cm') 6 90 PSI (6kglicm") lnput Current 0-4-20mADC(standard) . l 1 5 m A D C ' 2 2 1 0 m A D C ' 3 5 2 5 m A D C *4 10 50 mADC ' Special Order o ,,' Ogeration'/ Construction Model MmOO(Lever type) Single acting, Normal operation When the input current increass, the armature witt be subjected to a clockwise torque, pushing the flapper lever to the teft.

PFM3.eng

Selection of connected sensor [ 10] 10 L/min (PFM510) [F 0] [Un i] Unit selection function [ L] L/min The zero clear function has been performed while the fluid is flowing. "Er4" will be displayed for 1 second. Perform the zero clear function again under no flow conditions. Attaching the connector to the sensor wire Strip the sensor wire as shown. Do not cut the insulator.

11-cuj-e

Grease pack part no.: GR-L-005 (5 g) 50

VT307N-OMV0001

VT307N-OMV0001 3 / / VT/O 307 VT/O 307-**1-** 23 / 4 5 5 5 5 56 6 6 78 9 10 -1No.VT307N-OMV0001 1) 2) (ISO/IEC) (JIS) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO 4413: Hydraulic fluid power -General rules relating to systems IEC 60204-1: Safety of machinery -Electrical equipment of machines (Part 1: General requirements) ISO 10218