SL5200

0.10 30 0.21 15 20 0.14 0.07 10 0.03 10 0.07 5 0.00 0 0.00 0 0 20 40 60 80 100 120 Flow rate (slpm, N2) 0 1 2 3 4 5 6 7 8 9 10 Flow rate (slpm, N2) Hastelloy is a registered trademark of Haynes International.

AR20-B to AR60-B

*10 *10 *10 *10 *10 *7 For pipe thread type: NPT.

Lubrication Equipment

M5 1/8 3/8 1/2 3/4 1 10 20 30 40 50 60 B With bracket Thread Port size Rc(PT) NPT G(PF) N F 8 M5 X 0.8 1/8 1/4 3/8 1/2 3/4 1 M5 01 02 03 04 06 10 C R With bowl guard (Only AL2000) Flow direction: Right to left With drain cock and barb fitting (6, 4 for nylon) (AL3000 to AL6000) 3W AL3000 When specifying more than one option, please list alphabetically.

5 Port Air Operated Valve

to 50 (No freezing) VZA Not required Lubrication Free Mounting orientation VFA VFA 300/50 Impact/Vibration resistance (m/s2) Note 1) Note 1) Impact resistance: No malfunction to axis and right angle directions of main valve, each one time when pilot signal ON and OFF.

Precision Regulator

Description IR1000 IR1010 IR1020 IR2000 IR2010 IR2020/2120 IR3000 IR3010 IR3020/3120 P362030-201 Bracket P36201023 P36202028 Pressure gauge234 G33-2-01 G33-10-01 G43-2-01 G43-10-01 G43-2-01 G43-4-01 G43-10-01 G33-4-01 G43-4-01 1 A bracket and two mounting screws (M5 x 35) To mount the bracket, remove two body screws (M5 x 30) on the name plate on the opposite side and replace the attached

PFxx-OMO0007CN

) AC1000 V1 50 M(DC500 V ) CERoHS (RcNPTG) 1/81/4 3/8 1/2 ADCNBRSUSPBTPtlrFeNiOFC 250 g 290 g 100 g 1 0.927= 20L/min 3 420 (1 atm)65R.H. 0 (1 atm) 4 mm PVC 1.14 mm AWG23 0.72 mm -36No.PF-OMO0007CN () a(L/min) b(L/min) PF2A710 A 1 10 PF2A750 B 5 50 PF2A711 C 10 100 PF2A721 D 20 200 PF2A751 E 50 500 -37No.PF-OMO0007CN PF2A710/750 PF2A711/721/751 -38No.PF-OMO0007CN ()ZS-37

Plug-in Unit

Rated voltage 24 VDC Input and control unit power supply: 24 VDC 10% Solenoid valve power supply: 24 VDC + 10%/5% (with power drop warning at approx. 20 V) Power supply voltage range Communication power supply for DeviceNet 11 to 25 VDC How to Order EX500 G DN1 200 mA or less (Single GW unit) Current consumption Communication power supply for DeviceNet 50 mA or less Communication protocol

CYV

Impact acceleration [m/s] 5 0 50 100 150 200 250 300 Speed [mm/s] Relationship between speed and impact acceleration Features 1 in vacuum environments (1.3 x 10-Pa) Carefully designed for low particulate generation, low leakage, and low outgassing.

Direct Operated, 2 Port Solenoid Valve, For Water, Oil, Steam, Air, Series VX

[660] (164) 0.6 0.7 Critical pressure 0.65 [658] (158) 0.5 0.6 0.55 Sonic [656] (151) 0.5 0.4 0.45 [654] (143) 0.4 0.3 0.35 0.3 [650] (133) 0.2 0.25 0.2 [646] (120) 0.15 0.1 0.1 0.05 2 2 2 2 3 2 3 2 3 2 03 04 VX211 VX22 VX23 VX2 4 VX2 50 VX2 60-02 VX2 602 10 15 5 3 5 10 15 20 25 30 4.5 10 15 20 30 40 50 60 3 2 6 30 60 8 25 35 10 20 40 10 35 Flow rate Q kg/h Figures inside [ ] indicate

Air cylinder (Series compatible with secondary batteries)

L 100mm, or stroke 1 2 1 7 5 4 6 2 6 5 7 3 L L Fig. 9 Position for application of grease Table 10 Amount of grease units: g Stroke 40 50 63 80 100 P o s i t i o n f o r Bore g r e a s e At 100st 3 to 4 3 to 5 4 to 5 6 to 8 8 to 10 50st added 1 1 1.5 2 3 20 3-2-4. Mounting of seals 1) Rod seal, Cushion seal (Fig.9, ) Pay attention to the mounting direction of the seal.

VT307

Mounting orientation Unrestricted 150/50 m/s2 (2) Shock/Vibration resistance Enclosure Dustproof Grommet, Grommet terminal, Conduit terminal, DIN terminal 100, 200, 24 , 48 , 110 , 220 , 240 Electrical entry DC AC (50/60 Hz) Coil rated voltage (V) 24, 6 , 12 , 48 , 100 Allowable voltage fluctuation 15 to +10% of rated voltage 12.7 VA (50 Hz) 10.7 VA (60 Hz) 7.6 VA (50 Hz) 5.4 VA (60 Hz)

Series VC, Series VCS, Direct Operated 2 Port Solenoid Valve for Steam

/60Hz) Allowable voltage fluctuation 10% of rated voltage Coil insulation type Class H Power consumption W 50/60Hz VCS2: 4.9/4.1, VCS3: 7.7/6.6, VCS4: 10.5/9.3 Inrush VCS2: 22/19, VCS3: 36/30, VCS4: 45/37 Apparent power VA 50/60Hz Holding VCS2: 10/8, VCS3: 15/13, VCS4: 19/16 Note 1) In case of low pressure steam at a temperature of 120C or less, use FKM for the seal material.

VCW

) 10 is available only for N.C.

Table of Contents - Tubing

(Example) 10-TFU0425B-2 TFU0425-2-50 (100)-X3 TFU0425-3-50 (100)-X3 TFU0604-2-50 (100)-X3 TFU0604-3-50 (100)-X3 TFU0805-2-50 (100)-X3 TFU0805-3-50 (100)-X3 2 3 2 3 2 3 4 2.5 6 4 8 5 50m or 100m roll B (Black), W (White), R (Red), BU (Blue), Y (Yellow), G (Green), C (Transparent), YR (Orange) TUB-12 Clean Tubing: Polyolefin Tubing How to Order Designed to be used for blow-off and washing

High Pressure Coolant Valve

Rc G NPT NPTF Nil F N T None With bracket Nil B Valve type 1 3 N.C./3.5 MPa N.C./7.0 MPa Electrical entry/With light/surge voltage suppressor D DIN terminal Seal material DZ DIN terminal with light/surge voltage suppressor A B NBR seals FKM seals Rated voltage Valve size Port size 3 2 1 100 VAC 50/60 Hz 200 VAC 50/60 Hz 110 VAC 50/60 Hz 220 VAC 50/60 Hz 10A 15A 20A 25A 1 2 3 4 3 8 1 2 3 4

3-Screen Display High-Precision Digital Pressure Switch Air 1.0 MPa/1.6 MPa ISE70 ISE71

ISE7m/7mG Series Dimensions Without bracket Bracket A (Interchangeable with ISE70/ISE75(H)) (Part no.: ZS-50-A) 48 49 10 (40.1) 34 (26) 15 14 6.5 80.4 70.4 (11.4) 8 1.6 46 25 60 Bracket B (Part no.: ZS-50-B) 49 24 Piping port 02: Rc1/4 N02: NPT1/4 F02: G1/4 (ISO 1179-1) 6 24 24 22 2 x M4 thread depth 5 15 12 5.5 6.5 1.6 32 25 42 Lead wire with M12 connector (Part no.: ZS-31-B) 5000 (38.6

VCA

Air temperature (C) 60 20 10 0 10 30 40 50 Correction factor 0.94 1.08 1.06 1.04 1.02 0.98 0.97 0.95 Features 2 Direct Operated 2 Port Solenoid Valve for Air Series VCA Series VC How to Order Valves (Single Type) VC A 2 1 1 G 3 02 For air Option Series None Foot type bracket Nil F 2 3 4 Class 2 Class 3 Class 4 When only brackets are required, refer to Table 2 below.

Smooth Cylinder Series CG1Y ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 Specifications and auto switch information not provided below are the same as those of the low friction, double acting, single rod type of Series CG1  Q .

7.5 Up to 300 16.5 17 10 19.5 2 22 14 8 40 12 38 12 6 5.5 M10 x 1.25 M5 x 0.8 depth 8 Up to 300 20 17 12 19.5 2 22 18 10 50 13 47 13 8 6 M14 x 1.5 M6 x 1 depth 12 Up to 300 26 19 16 27 2 30 25 14 58 14 58 14 11 7 M18 x 1.5 M8 x 1.25 depth 16 Up to 300 32 27 20 32 2 35 30 18 58 14 72 14 11 7 M18 x 1.5 M10 x 1.5 depth 16 Up to 300 38 27 20 32 2 35 32 18 71 20 89 20 13 10 M22 x 1.5 M10 x 1.5

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type 1

Applicable cylinder bore size (mm) Elbow type Universal type Port size Metric size Inch size 12 10 8 6 4 3.2 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" AS131FG-M5 AS121FG-M5 M50.8 6, 10, 16, 20 AS231FG-01 AS221FG-01 20, 25, 32 R 1/8 AS231FG-02 AS221FG-02 20, 25, 32, 40 R 1/4 AS331FG-02 AS321FG-02 40, 50, 63 R 1/4 AS331FG-03 AS321FG-03 40, 50, 63 R 3/8 AS431FG-04 AS421FG-04 63, 80, 100 R 1/2

IDUS/IDFS

3m3/min (22kW equivalent compressor), the amount of condensed water per unit of time is 15.2 x 3 x 60 = 2736g/h. 6 7 8 3 1 2 3 4 5 Dew Point Conversion Chart 60 50 40 30 Pressure dew point C 20 10 1.5MPa 1.3MPa 1.1MPa 0.9MPa 0.7MPa 0.5MPa 0.3MPa 0.1MPa Atmospheric pressure 0 -40 -30 -20 -10 -60 -50 -60 -50 -40 -30 -20 -10 0 10 20 30 Atmospheric pressure dew point C 14-18-10 11 Series IDUS