EXxx-OMS0026CN

PCA-1558823 7/8 6 m PCA-1558836 7/8 2 m PCA-1558849 7/8 6 m PCA-1564927 M12 B code2 mSPEEDCON PCA-1564930 M12 B code6 mSPEEDCON PCA-1564943 M12 B code2 mSPEEDCON PCA-1564969 M12 B code6 mSPEEDCON TM (8)EtherNet/IP PCA-1446566 M12 D code5 mSPEEDCON EX9-AC010EN-PSRJ M12 D code-RJ451 m EX9-AC020EN-PSRJ M12 D code-RJ452 m EX9-AC030EN-PSRJ M12 D code-RJ453 m EX9-AC050EN-PSRJ M12 D code-RJ455 m

VNH

N O P Q R S T U V VNH1 -10A A B VNH2 -15A A B VNH3 -20A A B VNH4 -25A A B M5 x 0.8 depth 5.5 M6 x 1 depth 6 M8 x 1.25 depth 6 M8 x 1.25 depth 6 202.5 232 267 286.5 29 36 48 51 25 30 35 38 30 40 50 56 37 43 50.5 58.5 75 100 126 141 88 118 148 163 34 44.5 60.5 66.5 10.5 16 19.5 15.5 62 6 x 8 7 x 10 9 x 12 9 x 12 20 24 24 70 92 109 17-4-34 5 Series VNH High Pressure Coolant Valve 3.5 MPa, 7.0

PROFINET Compatible Fieldbus System

(M3 thread) (It is recommended to ground with resistance of 100 ohms or less) Accessories Hexagon socket head cap screw (M3 x 30): 2 pcs. Connects the SI unit and the valve manifold. Seal cap: 1 pc.

Digital Flow Switch for Deionized Water and Chemicals Series PF2D

Panel fitting dimension 3 x 7.2(=21.6) 8-M3 36 +0.5 0 6.4 OUT2 NC Sensor 8 Load 4 OUT1 Black 1 2 3 4 7 3 Load +0.5 0 Brown + 6 2 19.4 Blue 5 1 12 to 24VDC 5 6 7 8 Series PF2D5 PF2D301-A(-M) The applicable panel thickness is 1 to 3.2mm.

Copper-free Actuators

D)B 1.7-6 20-M(D)B Standard 20-M(D)BW Double rod SMB-l 1.7-16 20-M(D)BB With end lock 1.7-30 5.5-2 Copper-free Actuators Air Cylinder Series Application Bore size (mm) Name of CAD file Page in Vol.2 Standard Copper-free 6 8 12 (10) 16 (15) 20 25 32 40 50 63 80 100 125 140 160 Series/Variation Air cylinder Series C(D)A1 Standard 1.9-2 20-CA1nN Double rod 1.9-16 20-CA1WnN SCA1l Non-rotating

MHx-OMZ0005

JMHZ2-16D-X7400B-HC10-(*) Y Y Z X TCP X Y Z -0.4 -0.8 47.4 Tool Center Point(TCP) X Y Z Z 0 0 158 X JMHZ2-16D-X7400B-HC10DT-(*) Y Y Z X TCP X Y Z -0.4 -0.8 48.4 Tool Center Point(TCP) Z X Y Z 0 0 159 X 13 - 4 (www.smcworld.com) 4-1.

Air Gripper Unit for Collaborative Robots

Y Y Z X Flange mounting surface Center of gravity Z X Y Z -0.4 -0.8 48.4 X 12 - 4. Product Specifications * For detailed specifications not included in this document, please refer to our website (www.smcworld.com) or operation manual. 4-1.

SI unit ( device)

Serial Number N "x" 4 0x0016 (22) 0 R Hardware Revision N HW-Vx.y 5 0x0017 (23) 0 R Software Revision N FW-Vx.y 5 0x0018 (24) 0 R/W Application Specific Tag Y "* *" 6 Refer to page 17 "Device Status parameter" for details 0x0024 (36) 0 R Device Status N Refer to page 17 "Detailed Device Status parameter" for details 0x0025 (37) 1..8 R Detailed Device Status N 1: Where R is Read and W is

20 to 60C0 to 85%R.H.10 to 55 Hz 1.5 mm amplitude X, Y, Z directions for 2 hrs. each100 m/s2 (approx. 10 G) X, Y, Z directionOnly display unit with cover is equivalent to IP65.

20 to 60C0 to 85%R.H.10 to 55 Hz 1.5 mm amplitude X, Y, Z directions for 2 hrs. each100 m/s2 (approx. 10 G) X, Y, Z directionOnly display unit with cover is equivalent to IP65.

Vane Type Rotary Actuator Series CRB1 New 63mm Bore Size

length (m) Load voltage Indicator light Auto switch part no.

SI unit for AS-Interface

Example: When EX250-SAS9 is used Valve: VQC110NY 5 (low wattage type of 0.5 W) x 4 pcs. 0.5 [W] 24 [V] x 4 [pcs.] = 84 [mA] (4 outputs simultaneously ON) The maximum possible supply current of EX250-SAS9 is 120 mA.

70pvvna

Allowable voltage fluctuation Coil insulation type Normally closed Normally open Double acting VNA01 VNA02 VNA03 PAX 35C or less (When rated voltage is applied.) 70C or less (When rated voltage is applied.) 5.6 VA (50 Hz), 5.0 VA (60 Hz) 12 VA (50 Hz), 10.5 VA (60 Hz) 3.4 VA (50 Hz), 2.3 VA (60 Hz) 7.5 VA (50 Hz), 6 VA (60 Hz) 1.8 W 4.8 W Non-locking push type Other (Option) Non-locking push

High Vacuum L Type Valve

H4 S y m b o l Initial power / Power consumption (W) 100 VAC 200/40 200/50 400/100 600/150 200 VAC 800/40 800/50 1600/100 2400/150 Heater assembly number XL1A25-60S-1 XL1A25-60S-2 XL1A25-60S-2 XL1A25-60S-3 XL1A25-60S-2 No. of heater assemblies 1 pc. 1 pc. 1 pc. 1 pc. 2 pcs.

High Vacuum L Type Valve

H4 S y m b o l Initial power / Power 100 VAC 200/40 200/50 400/100 600/150 200 VAC 800/40 800/50 1600/100 2400/150 consumption (W) Heater assembly number XL1A25-60S-1 XL1A25-60S-2 XL1A25-60S-2 XL1A25-60S-3 XL1A25-60S-2 No. of heater assemblies 1 pc. 1 pc. 1 pc. 1 pc. 2 pcs.

XLC-25,40 ∗ -F7NJ ∗ - ∗ Series

H 4 S y m b o l consumption (W) 100 VAC 200/40 Initial power / Power 200 VAC 800/40 Heater assembly number XLA25-60S-1 XLA25-60S-2 No. of heater assemblies 1 pc. 1 pc. H 5 100 VAC 200/40 400/70 Initial power / Power consumption (W) 200 VAC 800/40 1600/80 Note 1) Initial power and power consumption are nominal values. The heaters are PTC thermistor type design.

High Vacuum L Type Valve

H4 S y m b o l Initial power / Power 100 VAC 200/40 200/50 200 VAC 800/40 800/50 consumption (W) Heater assembly number XLA25-60S-1 XLA25-60S-2 XLA25-60S-2 No. of heater assemblies 1 pc. 1 pc. 1 pc. H5 Initial power / Power 100 VAC 200/40 400/70 400/80 200 VAC 800/40 1600/80 1600/80 consumption (W) Note 1) Initial power and power consumption are nominal values.

Voltage Monitor for PFMV5

Part number Description Remarks ZS-28-A Power and output lead wire and connector Length: 2 m ZS-28-B Bracket Mounting screw (M3 x 5 L) 2 pcs. ZS-28-C Sensor connector 1 pc. ZS-27-C Panel mount adapter Mounting screw (M3 x 8 L) 2 pcs. ZS-27-D Panel mount adapter + Front protective cover Mounting screw (M3 x 8 L) 2 pcs.

Speed Exhaust Controller Series ASV Size: M3, M5, 1/8, 1/4, 3/8 1

M1 Weight (g) ASV120F-M3-04 ASV220F-M5-04 ASV220F-M5-06 Model 5 8 9 M3 x 0.5 M5 x 0.8 M5 x 0.8 5.5 8 8 9.3 9.3 11.6 7.2 9.6 9.6 21.4 22.8 23.6 25 27.6 28.4 9.8 11.1 11.1 28.6 31.4 31.4 26.1 28.6 28.6 25.8 27.7 27.7 23.3 24.9 24.9 12.7 12.7 13.5 4 4 6 Reference dimensions of M thread after installation. Inch Size Applicable tubing O.D. d T H D1 D2 L1 L2 L3 L4 A Max. Min. Max. Min.

Exhaust Cleaner Series AMC

B' B C Drain cock Drain guide R, NPT, G Operating Pressure: 0.5 (MPa) Operating pressure: 0.5 (MPa) Mounting bracket Port size Model E M3 x 0.5 Depth 8 Drain piping D C B A F G H J K B' 3 8 AMC310 75 140.5 138.5 150.5 24 50 15 55 2.3 141.5 AMC510 M4 x 0.7 Depth 8 102 193.5 196.5 203.5 40 70 20 70 3.2 199.5 3 4 Air consumption (l/min (ANR)) AMC610 M4 x 0.5 Depth 10 118 219.5 224.5 229.5