VHK

(mm) 2(A) Port size R(PT) 2(A) Port size R(PT) 1(P) 1(P) 1(P) 4 6 8 10 12 M5 1 8 1 4 3 8 1 2 1 8 1 4 3 8 1 2 4 6 8 10 12 1(P) M5 M5 4 M5 4 Tube O.D. (mm) Tube O.D.

VHK

B L2 Q L1 H 1(P) 2(A) L3 L4 L5 L6 C D E F G J K 1(P) R 2(A) 2(A) R 3(R)* VHK-01S-M5 VHK-M5-M5 11 41 1.2 26 23 11 3.5 11 M5 M5 M5 18 29.1 16.5 VHK-B1A 29 29.1 44.5 14.5 1 27 22 16.5 26 61.6 58.2 2.0 2.0 54 51 1 8 11 41 8.6 1.2 13 3.5 18 32.6 16.5 13 VHK-B1A 44.5 14.5 1 27 22 16.5 26 VHK-01S-01S 1 8 1 8 30 32.6 65.2 57 VHK-02S-01S 18 41 71.6 39 32.6 39 78 16.5 3.5 11 9.0 9.7 1.2 39 13 47 62

CY1F

Bore size (mm) Cylinder fixing bolt Tightening torque Bore size (mm) Hexagon socket head set screw Tightening torque 10 15 25 M3 0.55 to 0.72Nm 10 15 25 M3 0.37 to 0.45Nm M5 2.6 to 3.5Nm M5 0.54 to 0.64Nm Enlarged view of stepped part Surface D 3. Be careful about the tightening torque of the hexagon socket head screws.

Series SYJ300/500/700 3 Port Solenoid Valve Rubber Seal

VK P/R port M5 X 0.8, Rc (PT) 1/8, C4 (4 One-touch fitting) C6 (6 One-touch fitting) M5 X 0.8 Rc (PT)1/8 Port size M5 X 0.8 A port VZ M5 X 0.8 X port (1) M5 X 0.8 M5 X 0.8 VT Body ported style SYJ5l2/SYJ5l2R 3.4 (0.19) Valve effective area (mm2)(Cv) (2) VT M5: 3.3 (0.18) 1/8: 4.8 (0.27) C4, C6: 3.8 (0.21) Base mounted style SYJ5l4/SYJ5l4R M5: 3.8 (0.21) 1/8: 4.7 (0.26) VP Note 1) Only for

PSxx-OMU0002CN

-100.0~100.0 kPa T 2 X NPN2 Y PNP2 R NPN2+1 T PNP2+1 A1 A S NPN2+1 V PNP2+1 1: A2 B M SI3 P psi2 2 3 kPaMpa B D + M5 M5 1 01 R1/8 N01 NPT1/8 C4H 4mm J (2m) C6H 6mm N7H 1/4 inch C4L 4mm C6L 6mm N7L 1/4 inch -8No.PS-OMU0002CN-D / A ZS-46-A1 38L(2 ) B ZS-46-A2 38L(2 ) ZS-46-B + ZS-46-D ZS-46-5L 5 2m ZS-27-01 R1/8 ZS-46-N1 NPT1/8 ZS-46-N2 4mm ZS-46-C4H 6mm ZS-46-C6H 1/4 inch

180 ° Angular Type Air Gripper Rack & Pinion Type MHW2 Series ø 20, ø 25, ø 32, ø 40, ø 50

Replacement part/grease pack part no. : 20, 25, 32 : GR-S-010(10 g) 40, 50 : GR-S-020(20 g) 713 MHW2 Series Dimensions MHW2-20D Flat finger type (Standard) 20 2 x M5 x 0.8 thread depth 7 (Mounting thread) 17 60 4 x M5 x 0.8 thread depth 10 (Mounting thread) Bottom through hole dia. 4.2 (Mounting hole) 45 2 x M5 x 0.8 thread depth 10 (Mounting thread) 35 23 26 27 36 18 23 7 2 21H9 +0.052 depth

Compact Guide Cylinder

B 0.2 A 0.2 Bore size [mm] A [mm] B [mm] Hexagon socket head cap screw 12 (10 x 2) 52 11 M3 x 0.5 16 (12 x 2) 57 11 M4 x 0.7 20 (16 x 2) 75 14 M4 x 0.7 25 (20 x 2) 84 17 M5 x 0.8 32 (25 x 2) 98 21 M6 x 1.0 40 (32 x 2) 107 27 M8 x 1.25 50 (40 x 2) 135 37 M8 x 1.25 63 (45 x 2) 146 40 M10 x 1.5 80 (56 x 2) 184 50 M12 x 1.75 100 (71 x 2) 219 62 M14 x 2 7.

ZSE30/ISE30

kPa PRESSURE kPa PRESSURE kPa PRESSURE kPa PRESSURE kPa PRESSURE OUT OUT OUT OUT OUT SET SET SET SET SET With One-touch fitting (4, 6, 5/32", 1/4") Reduced dimensions in piping direction 17.8 mm reduction Straight type 12.4 mm reduction Elbow type 14.4 22.4 12.4 mm 17.8 mm 32.2 34.8 KQ2H06-M5 KQ2L06-M5 Comparison when One-touch fittings (KQ2H06-M5 / KQ2L06-M5) are connected to the piping

Solid State Auto Switches

x 0.8 x 16 M5 x 0.8 x 20 M5 x 0.8 x 25 ( ): Denotes the values of D-A44C Dimensions (mm) D-A3C D-A44C 2 x M5 x 0.8 x 12 Hexagon socket head cap bolt Tightening gland 2 x M5 x 0.8 x 12 Hexagon socket head cap bolt Tightening gland G 1/2 G 1/2 4 x Z 4 x Z (Applicable cable O.D. 6.8 to 9.6) (Applicable cable O.D. 6.8 to 11.5) Hexagon socket head cap bolt Hexagon socket head cap bolt Indicator

Process Gas Diaphragm Valve

Construction Diaphragm Seat Body 1110 B Diaphragm Valve for Ultra High Purity Air operated type Series AZ3542 & 4542 Dimensions inch (mm) AZ3542 & 4542 Ports: 2PW (Welded) Ports: 2P (Machined) M5 x 0.8 Actuation port Actuation port M5 x 0.8 1.57 (40) 1.57 (40) FORGED BODY BAR STOCK BODY Note) 2.24 (57) 2.24 (57) 0.44 (11.2) 0.44 (11.2) A A B A A Connections: MV, FV Connections: MV B A A A

Series 12-CY3B Magnetic rodless cylinder ø15, ø20, ø25, ø32, ø40

Nil M5 x 0.8 Rc1/8 Rc1/8 Rc1/8 Rc1/4 TN NPT1/8 NPT1/8 NPT1/8 NPT1/4 TF G1/8 G1/8 G1/8 G1/4 12-CY3B15 12-CY3B20 12-CY3B25 12-CY3B32 12-CY3B40 d b C H B H 4 8 8 10 d M10 x 1.0 M20 x 1.5 M26 x 1.5 M32 x 2.0 B 14 26 32 41 C 16.2 30 37 47.3 Part number SNJ-016B SN-020B SN-032B SN-040B Applicable bore size (mm) 15 20 25, 32 40 161 Specific Product Precautions Be sure to read before handling.

CL

x 0.8 depth 7.5 M5 x 0.8 depth 8 M6 x 1 depth 12 Without rod boot ZZ e f h l ZZ With rod boot Stroke range Bore size (mm) H1 WA WW WB WH H PG PH PL PW S TA TB P TC W 30 30 25 20 20 25 32 40 178 193 196 221 198 215 218 241 55 62 62 70 16 17 17 17 30 30 35 35 35 40 40 50 M5 x 0.8 M5 x 0.8 Rc 1/8 Rc 1/8 23 25 28.5 33 11 11 10 10 14 14 13 14 11 11 11 12 5.5 7 7 9 38 41 41 41 86 96 97 105.5 20

VQ1000V-OMV0001

8370: JIS B 8361: JIS B 9960-1: 1 ) JIS B 8433-1993: *2) 1. 2. 3. 1. 2. 3. 4

Standard Combinations

Metal bowl B B B B B Dimensions B B N.C.: Gray N.O.: Black B 1/8 1/4 10 One-touch fitting Barb fitting Applicable tubing: T0604 M5 x 0.8 Width across flats 17 Width across flats 17 Standard specifications Bracket mount Model Port size A B C D P E F G H1 H2 J K L L M (1) (1) (1) (1) ACG20 ACG30 ACG40 1/8, 1/4 126 87 36 60 28.5 41.5 43 30 24 5.5 3.2 1/4, 3/8 167 115 41 80 30 55 57 41 35 35

AS-FPQ/AS-FPG

2 Speed Controller for Clean Room Series AS-FPQ/FPG Construction Meter-out type M5 type Meter-in type M5 type Parts list No.

Clean Regulator

Relief port M5 thread The body material has been changed to aluminum. ITVH X234 SRH Standard model no.

MGC

B B B B B 16 (24) A 21.5 (29.5) 20.5 (28.5) 15.5 (22.5) 17.5 (25.5) 19.5 (27.5) 20 27.5 27 24.5 25.5 29 27 24 31 30 21.5 (29.5) 20.5 (28.5) 15.5 (22.5) 17.5 (25.5) 19.5 (27.5) 16 (24) 25 30 29.5 27 25.5 29 27 24 31 30 22.5 (30.5) 21.5 (29.5) 15.5 (23.5) 18.5 (26.5) 20.5 (28.5) 17 (25) 32 33.5 33 30.5 26.5 30 28 25 32 31 24.5 (33.5) 23.5 (32.5) 19 (26.5) 20.5 (29.5) 22.5 (31.5) 19 (28) 40

Electric Rotary Table

B-1 A-1 B-2 A-2 B-3 A-3 Connector C terminal no. Signal Cable color Brown Red Orange Yellow Green Blue A A B B COM-A/COM COM-B/ 2 1 6 5 3 4 Cable color Connector D terminal no.

/

0452 Note) A thread is drilled on the bottom of the body of the VXED2130 with port size 04 (1/2). 2 x M5 x 8 thread depth 8 1.6 5.5 a 18 7.5 b 28 Bracket (mm) Electrical entry Grommet Conduit DIN terminal Conduit terminal Bracket mounting dimension Model Port size P B K L M A N.C.

VK300

Cv C [dm3/ (sbar)] b Cv C [dm3/ (sbar)] b Cv C [dm3/ (sbar)] b Cv Grommet 0.44 0.40 0.40 0.44 0.40 0.41 0.63 0.63 0.41 0.63 0.13 0.10 0.10 0.13 0.10 0.20 0.14 0.14 0.20 0.14 VK332 0.47 0.41 0.41 0.47 0.41 0.85 0.65 0.65 0.85 0.65 0.47 0.38 0.38 0.47 0.38 0.76 0.41 0.41 0.76 0.41 0.44 0.27 0.27 0.44 0.27 0.26 0.24 0.24 0.26 0.24 0.13 0.10 0.10 0.13 0.10 0.19 0.15 0.15 0.19 0.15 0.47 0.39 0.39