AFJ20 to AFJ40

Vacuum Filter AFJ20 to AFJ40 Symbol Vacuum lter SP AFJ40 AFJ30 AFJ20 How to Order ZCUK AMJ AFJ 30 q 03 e 80 B T Option/Nominal ltration rating/Type/Semi-standard: Select one of each for a to f. Semi-standard: When more than one specification is required, indicate in alphanumeric order.

AQ

Quick Exhaust Valve Series AQ Model Excellent exhaust characteristics Large flow capacity Compact and lightweight A wide selection of models Port size Effective area (mm2) Mass (g) Model IN OUT OUT EXH AQ1500-M5 AQ1510-01 AQ2000-01 AQ2000-02 AQ3000-02 AQ3000-03 AQ5000-04 AQ5000-06 M5 x 0.8 2 2.8 25 1 8 4 5.8 45 1 8 25 25 110 1 4 35 40 105 1 4 40 42 215 8 3 60 70 205 1 2 105 115 690 3 4

Miniature Regulator ARJ310 Series

Inch size ARJ310F-N01 5/32" 1/4" 03 07 674

Direct Operated Precision Regulator/Modular Type ARP20 to ARP40 Series Direct Operated Precision Regulator with Backflow Function/Modular Type ARP20K to ARP40K Series Regulator Symbol Regulator with backflow function

Example 1) When the pressure in the rear and the front of the cylinder differs: Example 2) When the air supply is cut off and releasing the inlet pressure to the atmosphere, the residual pressure release of the outlet side can be ensured for a safety purpose. 1 1 2 12 2 1 2 1 3 1 2 1 14 2 4 12 L 10 5 1 3 How to Order ARP 30 03 BE K Option / Semi-standard: Select one each for a to f.

ASD

Metric size Inch size With One-touch fitting 04 06 08 10 12 01 03 05 07 09 11 4 6 8 10 12 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" Thread type Nil Metric thread (M5) Unified thread (10-32 UNF) R NPT AS N ASP Bore size ASN M5 x 0.8 10-32 UNF 1/8 1/4 3/8 1/2 M5 U10/32 01 02 03 04 AQ ASV AK ASS Needle Valve/Flow Characteristics (Inlet Pressure: 0.5 MPa) ASR ASD230F ASD330F ASD430F ASF 100 200 400 Flow

■How to Order ASP-X369 Series ASP330F－01－06S－X369 Applicable tubing O.D. Body size Metric size Inch size Port size φ6 3 φ1/4” 06 07 1/8 standard Symbol Cylinder side φ8 4 φ5/16” 08 09 1/4 standard 01 R1/8 φ3/8” φ10 5

Rc1/4 2571 Body O.D.;52 03 Rc3/8 1239 Body O.D.:84 04. Rc1/2 1719. Body O.D.:98 06 Rc3/4 10 Rc1 Model Port size Rc1/4 Rc3/8 Rc1/2 Rc3/4 Rc1 XTO-2571 XTO-1239 XTO-1719

AS-R/AS-Q

Thread type G adopts face seal method. 02 1/4 03 3/8 04 1/2 Only meter-in type is available. The meter-out version is not available and therefore is not shown in this How to Order. 10

D

Note) Type 01 02 03 04 Inch size Metric size Elbow Universal 2 3 1/8" AS 23 01 3.2 03 05 07 09 11 13 04 06 08 10 12 4 5/32" 6 3/16" Control AS-FE U10/32 N01 N02 N03 N04 8 1/4" Meter-out Meter-in 0 1 10 5/16" Made to Order Refer to the below for details. KE 12 3/8" 1/2" With One-touch fitting AS-FG Note) For applicable tubing O.D. selection, refer to the Model on page 734.

AS-FPQ/FPG

Port size M5 01 02 03 04 M5 x 0.8 R 1/8 R 1/4 R 3/8 R 1/2 With One-touch fitting Clean specifications Metal parts material Q G Brass (electoless nickel plated) Stainless steel 304 Needle Valve/Flow Rate Characteristics Note) The flow rate characteristics are representative values.

Speed Controller: Standard Type Large Flow In-line Type AS Series

Free flow Controlled flow Weight (kg) Model Port size Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) Critical pressure ratio Critical pressure ratio Sonic conductance dm3/(sbar) Sonic conductance dm3/(sbar) 1/4 3/8 1/2 3/4 1 1 1 10 3,600 4,800 6,700 8,100 16,900 38,500 47,500 60,800 AS420-02 AS420-03 AS420-04 AS500-06 AS600-10 AS800-12 AS900-14 AS900-20 2,500 5,000 6,600 6.9 13.9 18.3 28.1

AS-X785

Port size on the valve side 6, 8, 1/8 6, 8 10, 1/4 8 10, 3/8 10 12, 1/2 Sonic conductance [dm3/(sbar)] 0.8 1.3 1.4 3.1 3.2 5.1 5.8 Critical pressure ratio 0.25 0.25 0.25 0.25 0.25 0.25 0.25 How to Order 2 200 S AS 01 X785 Pilot port Port size Body size Thread type Seal method 2 1/8, 1/4 3 3/8 4 1/2 Nil R, Rc G G Nil Without sealant (for G) S With sealant (for R) Cylinder side 01 1/8 02 1/4 03

Filter Regulator Stainless Steel 316 and Special Temperature Environment (–40°C) Specifications AW30/40-X2622

How to Order 2 AW X2622 30 03 Option/Semi-standard: Select one each for a to d. Option/Semi-standard symbol: When more than one specication is required, indicate in alphanumeric order.

Series ARP20 to ARP40 10- 10- 21- 21- Direct฀Operated฀Precision฀Regulator Series ARP20K to ARP40K 10- 10- Direct฀Operated฀Precision 21- 21- Regulator฀with฀Backflow฀Function

Regulator How to Order ARP 30 03 BG K 10 Less particle generation in a clean room Grease:Fluorinetype Packaging:Doublepackaging Clean room compliant Specialapplications 10 Clean room compliant, copper-free, fluorine-free, silicone-free Less particle generation in a clean room Wettedparts:Aluminumdie-cast Stainless steel, HNBR, NBR Grease:Lithiumsoapbasedtype Clean room compliant Clean room

How to Order E210/310/410 Series Modular Adapter

Modular Adapter How to Order E210/310/410 Series AC-A AF-A AF-A E310 03 U AR-A Size AL-A Piping port size 210 310 410 Size 310 Port size Uni thread AW-A Symbol 410 210 01 02 03 04 1/8 1/4 3/8 1/2 AC-B Thread AF-A Uni thread U AF-A AR -A -B Specifications AL-A Model E210 E310 E410 AW -A -B Port size 3/8 1/4 1/4 1/4 3/8 1/2 1/8 AW Piping I.D. 10 8 8 8 10 12 6 AG Fluid Air Ambient and fluid

High Precision Filter for Liquids FGH Series

Filtration efficiency 99.9% Membrane FGH200 to 300 0.2 m EB ES X40 0.4 m Element classification Note) Port size 03 04 06 10 Rc3/8 Rc1/2 Rc3/4 Rc1 Element HEPO 2 Membrane Symbol J D Note) Refer to pages 70 to 73 for details about specifications, models, dimensions, etc. regarding the elements.

FH150

(Including O-ring for element) 5 m 10 m 20 m Model FH150-02 FH150-03 FH150-04 Element size EP910-005N EP910-010N EP910-020N 55 x 90 Note 1) The symbol at the end of the element part no. indicates the hydraulic fluid type. N: Petroleum, V: Phosphoric ester, W: Water-glycol, Emulsion (10 m only) Note 2) Refer to page 528 for micromesh elements.

ACG

Series ACG How to Order ACG 30 A 03 G1 Option Symbol Description Applicable model Body size Nil 1 2 3 6 8 C J N R ACG20 to 40 Port size Symbol (8) 0.02 to 0.2 MPa setting ACG20 to 40 20 30 40 1/8 Metal bowl ACG20 to 40 3/8 Lubricator with drain cock ACG20 to 40 1/2 Nylon bowl ACG30, 40 Metal bowl with level gauge ACG20 With bowl guard Model combination ACG20 to 40 (9) Filter case with drain

Series ARP20 to ARP40 10- 10- 21- 21- Direct฀Operated฀Precision฀Regulator Series ARP20K to ARP40K 10- 10- Direct฀Operated฀Precision 21- 21- Regulator฀with฀Backflow฀Function

Regulator How to Order ARP 30 03 BG K 10 Less particle generation in a clean room Grease:Fluorinetype Packaging:Doublepackaging Clean room compliant Specialapplications 10 Clean room compliant, copper-free, fluorine-free, silicone-free Less particle generation in a clean room Wettedparts:Aluminumdie-cast Stainless steel, HNBR, NBR Grease:Lithiumsoapbasedtype Clean room compliant Clean room

PA3000/5000

Process Pump Automatically Operated Type (Internal Switching Type) Series PA3000/5000 How to Order 1 1 PA 3 03 0 PA3000 Option Body size Nil N 3 5 Body only With silencer 3/8 standard 1/2 standard For AIR EXH: AN200-02 Port size Material of body wetted areas 03 04 06 3/8 (10A): PA3 1/2 (15A): PA5 3/4 (20A): PA5 1 2 ADC12 (Aluminum) SCS14 (Stainless steel) PA5000 Diaphragm material Thread

Process Pump: Automatically Operated Type (Internal Switching Type) Air Operated Type (External Switching Type) PAF3000 Series

Type Rc NPT G Symbol Nil N F Port size Port size 3/8" Symbol 03 0 PAF341 P13 Tube extension Option Actuation Note 1) Applicable actuation Automatically operated Option Symbol Air operated Symbol 0 3 Actuation Automatically operated Air operated Nil B N None With foot With silencer Tubing size When option is more than one, suffix in alphabetical order.