Thermo-chiller Basic Type HRSE Series

Model HRSE012-A-10-(T) HRSE018-A-10-(T) Cooling method Air-cooled refrigeration Refrigerant R407C (HFC) Refrigerant charge kg 0.3 0.32 Control method Compressor ON/OFF Ambient temperature/Humidity/Altitude Note 1), 11) Temperature: 5 to 35C, Humidity: 30 to 70%, Altitude: less than 3000 m Circulating uid Note 2) Tap water, 15% ethylene glycol aqueous solution Set temperature range Note 1)

Thermo-chiller Air-cooled 200 V Type Inverter Type HRSH Series (UL Standards)

(including 6 M8 bolts) Note 10) Weight (dry state) kg Approx. 180 Approx. 215 Approx. 280 Note 1) When the ambient temperature or circulating uid temperature is 10C or below, refer to "Operation at low ambient temperature or low circulating uid temperature" (page 186-1). Note 2) Use uid in condition below as the circulating uid.

Thermo-chiller Air-cooled 200 V/400 V Type Inverter Type HRSH090 Series (400 V type only) (Option S only) (UL Standards) (Option S only)

(including 4 M10 bolts) Note 10) Weight (dry state) kg Approx. 130 Note 1) Use a 15% ethylene glycol aqueous solution if operating in a place where the ambient temperature and/or circulating uid temperature is 10C or less. Note 2) Use uid in condition below as the circulating uid.

Thermo-chiller

Model HRS018-A-20--R HRS030-A-20--R Cooling method Air-cooled refrigeration Refrigerant R410A (HFC) Refrigerant charge [kg] 0.39 Control method PID control Ambient temperature/Humidity/Altitude1 [C] Temperature: 5 to 45C, Humidity: 30 to 70%, Altitude: less than 3000 m Circulating fluid2 Tap water, 15% ethylene glycol aqueous solution4 Set temperature range1 [C] 5 to 40 Cooling capacity3

® SEMI Thermo-chiller Series HRW Fluorinated Fluid Type

) Approx. 198 lbs (90 kg) Safety standards UL, CE marking, SEMI (S2-0703, S8-1103, F47-0200), SEMATECH (S2-93, S8-95) Note 1) It should have no condensation.

ø 20, ø 25, ø 32, ø 40, ø 50, ø 63, ø 80, ø 100 Series HYB Hygienic Design Cylinder Round Type

Mass Without auto switch Unit: kg Stroke (mm) Bore size (mm) 25 Theoretical Output 300 250 200 175 150 125 100 75 50 20 0.27 0.26 0.24 0.22 0.20 0.18 0.17 0.15 Unit: N 25 0.45 0.40 0.36 0.34 0.31 0.29 0.27 0.24 0.22 0.20 Operating pressure (MPa) Bore size (mm) Operating direction 32 0.59 0.53 0.47 0.44 0.41 0.38 0.35 0.32 0.29 0.26 0.5 0.3 0.7 40 1.01 0.91 0.82 0.78 0.73 0.68 0.64 0.59

Air Cylinder Double Acting, Single Rod JMB Series ø 32, ø 40, ø 45, ø 50, ø 56, ø 63, ø 67, ø 80, ø 85, ø 100

0.43 kg 3

MA2

AHC System Series MA2 How to Order AHC unit AHC unit MA 210 Y M3 N R3 Tool adapter Robot adapter Without robot adapter 8 10 11 14 15 20 Nil S1 R1 R2 R3 R4 R5 Auto hand changer Air gripper for AHC Applicable shaft diameter Transportable mass Transportable mass 3 kg 2 AHC unit Electric specifications Air connection size M3 M3 x 0.5 None N Air gripper for AHC Tool adapter <10/15> MA 210 A M3

Sine Cylinder Series REC ø20, ø25, ø32, ø40 How to Order 25 B C RE 150 M9BW Sine cylinder Number of auto switches Nil 2 pcs. Rod type S 1 pc. n “n” pcs. Mounting style B C Basic style Single clevis style Auto switch L D Axial foot style Double clevis st

) Mounting bracket 0.23 0.06 0.06 0.06 Single knuckle joint CY 0.20 0.07 0.07 0.07 Double knuckle joint (With pin) Calculation: (Example) RECL32-200 Basic mass 0.90 (Foot style 32) Additional mass 0.09/50 st Cylinder stroke 200 (st) 0.90 + 0.09 x 200/50 = 1.26 kg CX MQ RHC Mounting Bracket Part No.

5.0 MPa Pilot Operated 2 Port Solenoid Valve Series VCH40

1.67 kg 12 VDC, 24 VDC, 100 VAC, 200 VAC (50/60 Hz) 10% of rated voltage DIN connector Class B 5 W (DC), 13 VA (AC) Allowable voltage fluctuation Electrical entry Coil insulation type Power consumption Note 3) Note 1) Impact resistance: No malfunction resulted in an impact test using a drop impact tester.

WRF100 Frame Clamp Cylinder

(WRF100-T200) Weight 47 kg (WRF100-S200) Note) For the position where the clamping force is generated, refer to the dimensions on pages 82 to 84. 81 A

Desktop Duster Box ZVB Series

9.9 kg Note 1) No freezing Note 2) When supply pressure to the dust collector is set to 0.3 MPa (ZVB20)/0.4 MPa (ZVB40) and additional air blow supply pressure to 0.2 MPa.

KG can be used for vacuum ?100 kPa and pressures up to 1 MPa (~150 PSI). This fitting is available in 27 different body styles, with connection sizes from M5 to R(PT), and tube sizes from 4mm OD to 12 mm OD., FITTING, MALE CONN S/S CLN RM, CONNECTORS, KG/KQ(X23) 1-TOUCH STAINLESS, F5, KQ(X23) 6MM, 0.00809 lb

KG can be used for vacuum 100 kPa and pressures up to 1 MPa (~150 PSI). This fitting is available in 27 different body styles, with connection sizes from M5 to + R(PT), and tube sizes from 4mm OD to 12 mm OD., FITTING, S/S CLEAN ROOM, CONNECTORS, KG/KQ(X23) 1-TOUCH STAINLESS, J5, KQ(X23) 10MM, .05513 lb, Applicable tubing O.D.

KG can be used for vacuum ?100 kPa and pressures up to 1 MPa (~150 PSI). This fitting is available in 27 different body styles, with connection sizes from M5 to R(PT), and tube sizes from 4mm OD to 12 mm OD., FITTING, MALE CONN S/S CLN RM, CONNECTORS, KG/KQ(X23) 1-TOUCH STAINLESS, N5, KQ(X23) 16MM, 0.08816 lb

KG can be used for vacuum ?100 kPa and pressures up to 1 MPa (~150 PSI). This fitting is available in 27 different body styles, with connection sizes from M5 to + R(PT), and tube sizes from 4mm OD to 12 mm OD., FITTING, MALE ELBOW CLN ROOM, CONNECTORS, KG/KQ(X23) 1-TOUCH STAINLESS, H5, KQ(X23) 8MM, .05663 lb, Applicable tubing O.D.

KG can be used for vacuum ?100 kPa and pressures up to 1 MPa (~150 PSI). This fitting is available in 27 different body styles, with connection sizes from M5 to + R(PT), and tube sizes from 4mm OD to 12 mm OD., FITTING, MALE ELBOW CLEAN ROOM, CONNECTORS, KG/KQ(X23) 1-TOUCH STAINLESS, J5, KQ(X23) 10MM, .06704 lb, Applicable tubing O.D.

KG can be used for vacuum ?100 kPa and pressures up to 1 MPa (~150 PSI). This fitting is available in 27 different body styles, with connection sizes from M5 to + R(PT), and tube sizes from 4mm OD to 12 mm OD., FITTING, PLUG IN ELBOW S/S, CONNECTORS, KG/KQ(X23) 1-TOUCH STAINLESS, L5, KQ(X23) 12MM, .04620 lb

KG can be used for vacuum ?100 kPa and pressures up to 1 MPa (~150 PSI). This fitting is available in 27 different body styles, with connection sizes from M5 to + R(PT), and tube sizes from 4mm OD to 12 mm OD., FTG, PLUG-IN REDUCER CLN ROOM, CONNECTORS, KG/KQ(X23) 1-TOUCH STAINLESS, F5, KQ(X23) 6MM, .01668 lb

KG can be used for vacuum 100 kPa and pressures up to 1 MPa (~150 PSI). This fitting is available in 27 different body styles, with connection sizes from M5 to + R(PT), and tube sizes from 4mm OD to 12 mm OD., FITTING, STAINLESS, CLEAN ROOM, CONNECTORS, KG/KQ(X23) 1-TOUCH STAINLESS, C5, KQ(X23) 4MM, .01510 lb, Applicable tubing O.D.