LFE-OMZ0013

OFF ON Use the and buttons to enter the flow value that will generate 5 V or 20 mA. The entered flow value can be in the range: 10% rated flow, to the upper display limit. Sub screen 2 20 24 Flow rate[L/min] 20L/min (Analogue 1-5V) Press the button to set. Return to function selection mode. [F22] Analogue output setting complete.

XL-OMY0002

C D (KF) KF (K) KF G I H H V Fn Fd A C C U U M E V V A L E B K S H J M G A A A B C D E Fn Fd G H J K XLD-25 50 123 48 1 12 40 26 41 16 7.5 XLD-40 65 170 66 2 11 55 41 63 20 15 XLD-50 70 183 79 2 11 75 52 68 20 17.5 XLD-63 88 217 100 3 11 87 95 70 72 20 20 XLD-80 90 256 117 3 11 114 110 83 98 20 26.5 XLD-100 108 321 154 3 11 134 130 102 133 20 38 XLD-160 138 335 200 3 11 190 180 153 114

CEx-OMQ0011

P1 No.1 OFF ON P2 No.2 OFF ON P3 No.3 OFF ON P4 No.4 OFF ON P5 P6 P7 P8 1 2 3 4 5 6 7 8 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 59 1 2 3 4 5 6 7 8 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 60

LV50-OMQ0004

The proof pressure is double the operating pressure range. -27No.LV50***-OMQ0004-F Analogue output Flow rate/Analogue output Output A B C Voltage output 1 V 1.1 V 5 V C Current output 4 mA 4.4 mA 20 mA Rated flow rate[L/min] B Model Minimum Maximum A LFE1 0.5 20 Flow rate 0 Minimum rated flow Maximum rated flow LFE2 2.5 100 LFE3 5 200 Out of range -28No.LV50***-OMQ0004-F Dimensions Note)

High Vacuum L Type Valve

Dimensions Unit: mm Model A B C D E Fn Fd G H J K XLD-25 50 123 48 1 12 40 26 41 16 7.5 XLD-40 65 170 66 2 11 55 41 63 20 15 XLD-50 70 183 79 2 11 75 52 68 20 17.5 XLD-63 88 217 100 3 11 87 95 70 72 20 20 XLD-80 90 256 117 3 11 114 110 83 98 20 26.5 XLD-100 108 321 154 3 11 134 130 102 133 20 38 XLD-160 138 335 200 3 11 190 180 153 114 30 40 11 XL*-OMI0011-E 7.

Smooth Cylinder Series CM2Y ø20, ø25, ø32, ø40 Specifications and auto switch information not provided below are the same as those of the standard, double acting, single rod type of Series CM2 .

Dimensions/20 to 40 Basic/CM2YB Width across flats B2 2-P (Port size) (Rc, NPT, G) 2-NN H1 H2 G G Width across flats B1 I 2-Eh8 D MM AL A F F NA 1.5 1.5 N N K H S + Stroke ZZ + Stroke Boss-cut ZZ + Stroke (mm) A AL B1 B2 D E F G H H1 H2 I K MM N NA NN P S ZZ Bore size (mm) 20 25 32 40 0 0.033 0 0.033 0 0.033 0 0.039 18 15.5 13 26 8 13 8 41 5 8 28 5 M8 x 1.25 15 24 M20 x 1.5 1/8 62 116 20

Clean Air Module

) 111 59 71 80.4 41 59 59 Rc 3/8 (NPT 3/8) 521 3.5 (3.5) Note) This port is unavailable.

High Purity Chemical Valve/Air Operated/Compact Type Series LVD LVC LVA Space saving, compact type is available. Space saving, compact type is available. Space saving, compact type is available. LVH LVD Compact type is introduced as a new series to comple

1/8 9.5 4.5 (41) (67) (73) Pilot port threaded type 20 39 30 A A 32 2 x 5 MAX 14 (52.6) M5 x 0.8 Depth 5 Pilot port M5 x 0.8 Depth 5 Pilot port 44 36.5 23.5 1/8 1/8 9.5 (41) 4.5 (67) 501 Tube Extensions Series LVD How to Order Body class LVD 2 0 06 T Option Symbol 2 3 4 5 None With flow rate adjustment Nil 1 Orifice dia. 4 8 10 16 Body class 2 3 4 5 Note) Refer to Variations in the table

RZQ

For detailed specifications, refer to page 10-20-1. Electrical entry Type Part No.

DOC1023126

Applicable stroke table Stroke [mm] Size 30 50 100 150 200 250 300 350 400 450 500 Manufacturable stroke range 25 15 to 400 32 20 to 500 25 - .

LEC-T1_C

Test 1 Step No. 20 Test Start Posn 123.45mm 36 - Test StartSET StartStopStopSET StopComplete AX IS. Test 1 Step No. 20 Test Start Posn 123.45mm MENU2 ESC 37 - (2) LECPA TB Ver2.1*LECPA MENU Test AX IS. Menu 1 Step data Parameter Test SET AX IS.

Speed Controller with Residual Pressure Release Valve with One-touch Fitting Series AS



FE Elbow Type/Universal Type

1 15-9-41 Dimensions AS2000E/3000E 2-port size L7 Max. Min.

ø 40, ø 50, ø 63, ø 80, ø 100 Series CBA2 Standard type CA2 Standard type CA2W Standard/Non-rotating rod CA2K Standard/Non-rotating rod CA2KW Low friction CA2
Q End Lock Cylinder

13 40 12 17 58 11 47.3 61 M8 x 1.25 7 18 11 M18 x 1.5 19 30 17 90 2.5 25 159 3/8 up to 600 35 32 85 27 64 20 15.5 40 10 17 58 11 54.8 68.5 M10 x 1.25 7 18 14 M18 x 1.5 19 31 17 98 4 25 170 3/8 up to 750 40 37 32 78 25 52 14 21 71 13 65.8 M12 x 1.75 11 22 17 M22 x 1.5 23 37 21 4 40 204 102 18.5 80.5 116 1/2 up to 750 40 37 116 41 92 30 20 52 14 21 72 16 72.8 87.5 M12 x 1.75 11 26 17 M26 x

Programless controller (with stroke study) Step motor (servo 24 VDC)

2000 20 48 No.JXC-OMU0030-A 11.

ZSE2/ISE2

Indicator light (Red) 20 600 (3000) 600 (3000) Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 48.5 41 39 39 3.5 3.5 8.5 8.5 13 2-3.5 Mounting hole 2-3.5 Mounting hole Piping port M5 x 0.8 depth 5 Piping port M5 x 0.8 depth 5 13 01: R 1/8 T1: NPTF 1/8 01: R 1/8 T1

Compact Pressure Switch Series ZSE2 (For Vacuum)/ISE2 (For Positive Pressure)

16 18 20 16 11 13 11 Vacuum supply port 3.3 Gasket Vacuum supply port 3.3 Gasket 784 Compact Pressure Switch Series ZSE2/ISE2 01 T1 Dimensions: ISE2Connector type: ISE2-15C Grommet type: ISE2-15 01 T1 01 T1 Pressure setting trimmer Pressure setting trimmer L H SET L H SET 15 15 Indicator light (Red) Indicator light (Red) 20 20 600 (3000) 600 (3000) ZSE ISE ZSP 48.5 41 39 39 PS 3.5 3.5 ISA

SI Unit

Installation . 20 3.1. Mounting . 20 3.2. Wiring . 21 4. Commissioning . 24 4.1. Configuration . 24 4.2. Diagnostics parameter . 24 4.3. Safe valve power module . 25 4.4. PROFIsafe parameter . 25 4.5. Valves (32coils) module . 26 4.6. 1 Byte feedback information about the valve output status . 26 5. Specifications . 27 6. Indication and setting . 29 6.1. LED indicators . 29 6.2.

Rotary Table

MSQB-OM02-A PRODUCT NAME Rotary Table MODEL / Series / Product Number MSQB1,2,3,7 Contents 2 Safety Instructions 18 Outline 18 How to order 19 Specifications 19 Weight 19 Effective torque 20 Internal construction and parts 20 MSQ1 to 7 21 Basic circuit 21 Circuit structure 21 Recommended models 22 Mounting 22 Load restrictions 22 Unit used as flange mount 23 Direction and Angle of Rotation

EXxx-OMU0020EN

Wiring 41 7.4. Process data 41 7.5. LED indicators 42 7.6. Block diagram 43 8. Digital Output Module EX245-DY1 44 8.1. Parts and description 44 8.2. Specifications 45 8.3. Wiring 46 8.4. Process data 46 8.5. LED indicators 47 8.6. Block diagram 48 -2No.EX##-OMU0020-A 9. End Plate EX245-EA2-1/2 49 9.1. Parts and description 49 9.2. Specifications 50 10. Accessories 51 10.1.

Digital Pressure Switch

Analogue output Output impedance Approx. 1 k Output current (rated pressure range) 4 to 20 mA 2.5% F.S. 2.4 to 20 mA 2.5% F.S. outpour 3 Current Linearity 1%F.S.