Micro Mist Separator with Prefilter AMH Model Model AMH250 AMH350 AMH450 AMH550 AMH650 AMH850 AMH150 Series AMH can separate and (1) remove aerosol state oil mist in 500 1000 2000 3500 6000 12000 200 Rated flow (l/min(ANR)) compressed air and remove Po

110 130 180 Q 26 28 28 34 34 50 50 60 76 R 4.5 5 5 5 5 9 9 10 12 S 1.6 2 2 2.3 2.3 3.2 3.2 4.5 4.5 T U 37 37 37 37 37 37 37 37 37 1/8, 1/4, 3/8 1/4, 3/8 1/2 3/8, 1/2 3/4 1/2, 3/4 1 3/4, 1 1, 11/2 159 172 178 204 210 225 232 259 311 13 13 16 16 19 19 22 22 32 100 113 119 145 151 166 173 200 253 63 76 76 90 90 106 106 122 160 20 20 20 20 20 20 20 20 20 63 76 76 90 90 106 106 122 160 24 27 27

VQ

L size 19 248 18 235.5 17 223 16 210.5 15 198 14 185.5 13 173 12 160.5 11 148 No. L size 20 260.5 30 385.5 29 373 28 360.5 27 348 26 335.5 25 323 24 310.5 23 298 22 285.5 21 273 No. L size Blank plate with 2 screws and gasket 39 498 38 485.5 37 473 36 460.5 35 448 34 435.5 33 423 32 410.5 31 398 No. L size 40 510.5 2.9-15

NAMUR Interface 3 Port Solenoid Valve VFN200N Series [Option]

"Z") 84.5 ( Without "Z": 66.5) 36.5 75.5 (Without "Z": 57) 2(A) port 24 32 40 119 Pilot EXH 14 3(R) port 2 x 5.5 Mounting hole 2 x 1/4 (: Thread type) 19 1 3 Manual override 9 23 1(P) port 3(R) port DIN terminal VFN212N-l D (Y)ll-02l-D-l 216 19 23 2(A) port Indicator light (With "Z") Applicable heavy-duty cord O.D. 6 to 8 Pg 9 84.5(Without "Z": 66.5) 36.5 75.5(Without "Z": 57) 24 SMC 32

energy saving effect

HEB Anchor bolt fixing position A Anchor bolt fixing position B HED 1100 (Dimension of anchor bolt fixing bracket) 756 136 1020 (Dimension of anchor bolt fixing bracket) HEA 12 x 12 670 43 670 138 8 x 12 IDH (850) (Thermo-chiller dimension) 700 (715) (Thermo-chiller dimension) 627 43 617 752 50 (954) (Thermo-chiller dimension) 19 76 984 19 (1035) (Thermo-chiller dimension) 1064 View A-A View

3

Refer to back page 50 for Safety Instructions and pages 17 to 19 for 2 Port Solenoid Valve for Fluid Control Precautions. Design Selection Warning Warning VX2 1. Cannot be used as an emergency shutoff valve etc. 3.

MXH

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 17 CX 38 39 15 19 10 18 19 18 D5 -X 5.5 10 5.5 5.5 NS 4 209 10.5 8.5 31 + Stroke 39.5 + Stroke 16 Data 4-M3 x 0.5 Depth 4.8 5 + Stroke 10 (mm) Stroke (mm) NS LA LB LT J 5 42 14 10 4 10 42 14 4 10 15 24 52 4 20 20 24 20 52 4 25 62 30 30 4 30 62 30

Heavy Duty Stopper Cylinder

16 87.5 38.5 5 18.7 10 24 Rc1/4 NPT1/4 G1/4 40 54 31 3 6.7 19 109 49 6 20.6 12.5 23 Rc1/4 NPT1/4 G1/4 Note 1) Dimensions when equipped with auto switch are the same as drawing above.

ZP

5 Pad diameter: 10 to 50 ZP10B to 50B Model Size B06 A 6 ZP06B B 7 C 2.5 D 7 E G 3.3 H 9.1 Y 4 F 13 B08 8 ZP08B 9 2.5 7 13 4.7 10.1 4 B10 10 ZP10B 12 4 13 11.7 16 5.5 13.8 5.5 B13 13 ZP13B 15 4 13 14.2 18.5 8.7 19 7.5 B16 16 ZP16B 18 4 13 15.7 20 9.9 21 8.5 B20 20 ZP20B 22 4 15 19 23.5 12.4 25 10.5 B25 25 ZP25B 27 4 15 19.5 24 15.6 28 10.5 B32 32 ZP32B 34 4 15 24.5 29 18.9 37 14 B40 40

CE2

10 10 150.5 15 26 54 10 8 M8 x 1.25 6 11 27 25 to 800 25 to 650 50 35 80.5 27 70 46 21 52 24 20 28.5 10 40 10 12 162.5 17 27 59 13 11 M8 x 1.25 9 11 32 25 to 800 25 to 650 60 35 98.5 27 85 48.5 23 64 24 20 28.5 13 40 10 15 174 17 26 67 18 11 M10 x 1.25 9 13.5 32 25 to 750 25 to 600 70 40 117.5 32 102 55 23 78 26.5 25 36 15 52 14 17 189 21 30 72 23 13 M12 x 1.75 11 16.5 37 25 to 750 25 to

CE2

26 11 22 20 44 16 11 15 6 27 71.5 60 42 22 21 150.5 8 M8 x 1.25 25 to 800 25 to 650 50 35 12 13 10 59 40 27 11 27 21 52 20 10 17 9 32 80.5 70 46 24 28.5 162.5 11 M8 x 1.25 25 to 800 25 to 650 60 35 15 18 10 67 40 26 27 23 64 20 13 17 9 32 98.5 85 48.5 24 28.5 174 11 M10 x 1.25 13.5 25 to 750 25 to 600 70 40 17 23 14 72 52 30 32 23 78 25 15 21 11 37 117.5 102 55 26.5 36 189 13 M12 x 1.75

Rotary Actuator

30 80 50 5 192 40 100 60 5 232 45 Size D (g6) G H M N U UU L 30 8 6 13 10 8 53 63 7.8 50 15 11 27 20 15 89 109 14 63 17 13 29 22 17 105 127 16 80 20 15 38 25 20 130 155 19 100 25 19 44 30 25 156 186 24 Note) Dimension parts different from the standard conform to the general tolerance.

CEx-OMI0064

NO. 19 NO. , 26 , 41 - 10-2 CEU5 , ROM , , ,SMC RAM , ,SMC 2ROM E ,, , , 2ROM E 2ROM 80 E , , ,SMC , 42 -

Rotary Table

Doc. no.MSQB-OM04-E PRODUCT NAME Rotary Table MODEL / Series / Product Number MSQ10 to 200() Contents Safety Instructions 2 17 Outline Specifications 17 18 Mass 18 Effective torque 19 Internal construction and parts 22 Basic circuit 22 Circuit structure Recommended models 22 23 Mounting Load restrictions 23 23 Flange application Direction and Angle of Rotation (Adjusting bolt, Internal shock

Series VCL

Valve model Port size VCL2 VCW20-12-01 1/8, 1/4 34 40 25 30 12.8 12.8 5 4.5 6 13 VCW30-12-02 1/4, 3/8 42 52 30 40 19 19 6 5.5 7 19 VCL3 VCW30-12-04 1/2 48 56 36 44 23 23 6 5.5 7 23 VCW40-12-02 1/4, 3/8 42 52 30 40 23 23 6 5.5 7 19 VCW30-12-04 VCL4 1/2 48 56 36 44 23 23 6 5.5 7 23 VCW40-12-06 3/4 56 65 44 53 28.2 28.2 6 5.5 7 26 Bracket material: Stainless steel 3 Series VCL Direct Operated

VDW

Refer to front matters 42 and 43 for Safety Instructions, and pages 17 to 19 for 2 Port Solenoid Valves for Fluid Control Precautions.

AC Servo Motor Driver (SSCNET Type)

The method for measuring the settling time can be selected from the separate axis setting. 1ms 19 Overshoot amount The overshoot amount for position control is displayed in encoder pulses.

Vacuum Manifold for fieldbus system

Filter element (Refer to page 19) Vacuum port adapter (Refer to page 19) Sealing valve body Spring is only mounted on exhaust sealing valve type type 3) When installing the filter, insert the filter to the end so that there is no gap or bending between the filter element and the vacuum port adapter.

Series VC, Series VCL, Direct Operated 2 Port Solenoid Valve for Oil

Valve model Port size VCL2 VCW20-12-01 1/8, 1/4 34 40 25 30 12.8 12.8 5 4.5 6 13 VCW30-12-02 1/4, 3/8 42 52 30 40 19 19 6 5.5 7 19 VCL3 VCW30-12-04 1/2 48 56 36 44 23 23 6 5.5 7 23 VCW40-12-02 1/4, 3/8 42 52 30 40 23 23 6 5.5 7 19 VCW30-12-04 VCL4 1/2 48 56 36 44 23 23 6 5.5 7 23 VCW40-12-06 3/4 56 65 44 53 28.2 28.2 6 5.5 7 26 Bracket material: Stainless steel 3 Series VCL Direct Operated

Servo Motor Controller (24 VDC)

CN1: Power supply plug.18 5.1 Power supply plug specifications.18 5.2 Electric wire specifications.18 5.3 Wiring of power supply plug .19 (1) Wiring of the power supply.19 (2) Wiring of the stop switch.19 1 - (3) Wiring of the lock release .19 5.4 Stop circuits.20 (1) Example circuit 1Single controller with teaching Box .20 (2) Example circuit 2 multiple controllers (Stop relay contact (1

240

2 16 Step motor (Servo/24 VDC) 392 Electric Actuator Miniature Slide Table Type LEPS Series Step Motor (Servo/24 VDC) Dimensions LEPS6 D C B A 3.5 4 5.2 LEF 19 LEJ LEL ( ) +0.025 0 ( ) +0.025 0 2.5H9 depth 2.5 2.5H9 depth 2.5 2 x M4 x 0.7 thread depth 8 LEM LEY 4 x M4 x 0.7 thread depth 6 20 11 19 LES J 25 11 LEPY LEPS LEPY LEPS LER Table operating range Note 1) LEH Motor cable length 300