Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type 1

Metric size Inch size 0 1 Meter-out Meter-in 3.2 01 03 05 07 09 11 13 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" 23 04 06 08 10 12 4 6 8 10 12 With One-touch fitting Stainless steel specifications (SUS303) Thread type Nil Metric thread (M5) Unified thread (10-32 UNF) R NPT Use 1/8" tube.

Auto Switch Guide

Applicable bore size (mm) Cylinder series 32 40 50 63 80 100 MDB1 BMP1-032 6-16-72

Programless controller Step motor (servo 24 VDC)

moving to position No. 11 Forward direction (2) Reverse direction (3) Start position End position Operating direction speed acceleration Operation method (1) No. 10 No. 11 Reverse 9 7 Positioning (2) No. 11 Reverse 9 7 Positioning (3) No. 11 No. 10 Forward 5 3 Positioning I/O timing chart when the electric actuator is operated by PLC.

2–4

M thread TN TF 32 to 50 12 to 25 32 to 50 NN Inch thread Note 3) M thread to be used for without auto switch type of 32, 5 stroke exceptionally. Applicable auto switches/Refer to page 5.3-2 to 5.3-75 of Best Pneumatics vol. 2 for detailed auto switch specifications.

Series 10/11 -CQSX, -CQ2X Microspeed Cylinder for Clean Room Series 10-, 11-

Bore size (mm) 20 25 32 40 20 25 32 40 Clean room series Standard strokes (mm) Auto switches are not mounted, but rather packaged together with the cylinder for shipment. 10(Relieving type) 25, 50, 75, 100, 125, 150, 175, 200, 250, 300 11(Vacuum type) Specifications Bore size (mm) 10(Relieving type) 11(Vacuum type) 20 20 25 32 40 25 32 40 Fluid Proof pressure Maximum operating pressure Minimum

Hydraulic Cylinders

CHKD20-PS 1 Black anodized 20 Aluminum alloy Rod cover CHKD25-PS 2 Black anodized 25 Aluminum alloy Head cover CHKD32-PS 3 Hard anodized 32 Aluminum alloy Cylinder tube CHKD40-PS 40 Nos. 7, 10, 11, 12, and 13 from the chart at left 20 & 25: Stainless steel 32 to 100: Carbon steel Hard chromium electroplated 4 Piston rod CHKD50-PS 50 CHKD63-PS 5 63 Stainless steel Piston CHKD80-PS 6 80 Copper

Series VQ Metal Seal/Rubber Seal Body Ported

L 11 12 13 14 15 16 17 18 19 20 148 160.5 173 185.5 198 210.5 223 235.5 248 260.5 No. L 21 22 23 24 25 26 27 28 29 30 273 285.5 298 310.5 323 335.5 348 360.5 373 385.5 No. L 31 32 33 34 35 36 37 38 39 40 398 410.5 423 435.5 448 460.5 473 485.5 498 510.5 No.

Solid State Auto Switches

Applicable Cylinders Weight (g) Cylinder series Bore size (mm) D-G5NB Auto switch model CDM2-Z, CDM2, CDBM2, CDVM3, CDVM5, CDLM2, CDLG1, MLGC CDG1-Z, CDG1 CDA2-Z, CDA2, CDBA2, CDV3, CDVS1, CDL1 MGC, MGG 20, 25, 32, 40 3 m (L) 79 Lead wire length 20, 25, 32, 40, 50, 63, 80, 100 5 m (Z) 125 40, 50, 63, 80, 100 20, 25, 32, 40, 50 Operating Range Bore size (mm) 20 Cylinder series 35 25 40 32

HRX-OM-Z002

Refer to Table 5-11. Make a selection with the [] [] keys and press the [SEL] key to apply the setting.

M-E05-1-LQ1

extensions 1/4" x 5/32" LQ1T2A-TT4 2 Tubing extensions 1/4" x 5/32" 2-07 LQ1-2N07 LQ1-2B07 LQ1T3A-TT1 3 3-11 LQ1-3N11 LQ1-3B11 Tubing extensions 3/8" x 1/4" 3-11 LQ1-3N11 LQ1-3B11 LQ1T3A-TT2 3 Tubing extensions 3/8" x 1/4" 3-11 LQ1-3N11 LQ1-3B11 3-11 LQ1-3N11 LQ1-3B11 LQ1T3A-TT3 3 3-11 LQ1-3N11 LQ1-3B11 Tubing extensions 3/8" x 1/4" LQ1T3A-TT4 3 Tubing extensions 3/8" x 1/4" 3-11 LQ1-3N11

Precautions 1

2 M14 x 1.5 32 42.5 21.5 (mm) ZZ Z TZ TY TX TT TD S QY Bore size (mm) 20 25 32 40 116 36 52 32 32 10 8 62 14 D120 40 60 40 40 10 9 62 14 122 40 60 40 40 10 9 64 16 -X 154 44.5 77 53 53 11 10 88 16 Individual -X 1571 Series CVM5 Head Side Trunnion Style (T) CVM5T Bore size Stroke Max. 21 Min. 18 Manual override Width across flats B2 Width across flats B1 Width across flats NA S + Stroke Z

Vacuum Gripper

ZP25U ZP 32 U ZPG32U-7A-X2 10 11 11 12 ZP32U ZP 10 C ZPG10C-7A-X2 7 7 7 7 ZP10C ZPT2-7A-X2 ZP 13 C ZPG13C-7A-X2 7 7 7 7 ZP13C ZP 16 C ZPG16C-7A-X2 7 7 7 8 ZP16C ZP 20 C ZPG20C-7A-X2 9 10 10 11 ZP20C ZPT3-7A-X2 ZP 25 C ZPG25C-7A-X2 10 10 10 11 ZP25C ZP 32 C ZPG32C-7A-X2 10 11 11 12 ZP32C ZP 10 B ZPG10B-7A-X2 7 7 7 8 ZP10B ZPT2-7A-X2 ZP 13 B ZPG13B-7A-X2 7 8 8 8 ZP13B ZP 16 B ZPG16B

Compact Guide Cylinder Series MGQ

221 2 2 2 2 2.5 2.5 1 1 1 1 1.5 1.5 80 90 100 110 140 170 5 10 10 10 15 15 100 110 124 132 166 200 M8 x 1.25 11 11 12.5 15 18 21 16 17 17 19 21 25 E DB A 50 st or less 53 54 60 61 84 89 Bore size (mm) Bore size (mm) 32 40 50 63 80 100 MGT A DB E M8 x 1.25 Over 50 st 90 90 102 102 143 153 50 st or less 5.5 0 4 0 9.5 5 Over 50 st 42.5 36 46 41 68.5 69 M10 x 1.5 32 40 50 63 80 100 20 20 25 25

VZ100/300/500

32 48 64 80 96 112 128 144 160 176 192 208 224 240 256 272 288 304 L4 8 24 40 56 72 88 104 120 136 152 168 184 200 216 232 248 264 280 296 L plug connector (L) DIN terminal (D) M plug connector (M) Applicable cable O.D.: 3.5 to 7 300 (Lead wire length) 300 (Lead wire length) : With light/surge voltage suppressor 4-6-11 12 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco

Plug-in/Plug Lead: Single Unit

VQ0 Flow Characteristics at the Number of Manifold Stations (Operated individually) VQ4 Model Passage/Stations Station 5 Station 1 Station 10 VQ5 C [dm3/(sbar)] 11 11 11 1 4/2 (P A/B) 0.24 b 0.24 0.24 VQZ 2 position metal seal VQ5 00 2.7 Cv 2.7 2.7 1 2 C [dm3/(sbar)] 12 12 12 VQD 4/2 5/3 (A/B EA/EB) b 0.14 0.14 0.14 Cv 2.9 2.9 2.9 C [dm3/(sbar)] 12 12 12 1 4/2 (P A/B) b 0.33 0.33 0.33

Support Guide/11-LEFG Series

LEY LES Support guide (11-LEFG) LEPY LEPS How to Order LER LEH 200 S LEF 11 G 32 LEY -X5 q w e Clean series 11LEFS 11LEFS Support guide 11LEJS q Size w Type of mounting pitch e Stroke [mm] Symbol 11-LEFG16 11-LEFG25 11-LEFG32 11-LEFG40 Note 25A50 50 to to 1000 1000 16 25 32 40 S Ball screw drive Step motor/Servo motor (24 VDC)/AC servo motor LEC LEC S Applicable Stroke Table Ball Screw Drive

5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

12 10 11 11 12 11 12 6.3 6.8 12 12 12 12 10 11 10 10 11 11 6.5 6.8 0.18 0.15 0.18 0.15 0.18 0.18 0.16 0.15 0.22 0.22 2 position 3 position 40 or less 0.63 1,000 Single VFS4100 1 2 3 8 15 or less 0.75 Double VFS4210 VFS4200 1,200 1 2 3 8 1 2 3 8 1 2 3 8 1 2 Closed center 50 or less 0.82 VFS4310 600 VFS4300 Exhaust center 50 or less 0.82 VFS4410 VFS4400 600 Pressure center 50 or less 0.82

LX

Terminal part no. 1 10 2 11 3 12 4 13 5 14 6 15 7 16 8 17 9 18 A mark is located on the connector number 1 side. 20 19 18 17 16 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 LJ1 LG1 LC1 LX LC6D/LC6C Switches View from the insertion side View from the wiring side Switches Home position switch: This switch indicates the home position. Connect this switch when returning to the origin point.

MHF2

4 1.3 12 26 15 4 Accessory option: Hexagon socket head screw (special screws) 7 2-2H9 +0.025 0 depth 2 3 3 7 11 11 Groove for auto switch mounting 2-M3 x 0.5 thread depth 4 Mounting thread 11 34 10 Series MHF2 Dimensions MHF2-8D2 Scale: 80% 2.5H9 +0.025 0 depth 2.5 17 17 17 2.5H9 +0.025 0 depth 2.5 3 3.4 64.3 4-M3 x 0.5 thread depth 7 Mounting thread 32 72 2-M3 x 0.5 thread depth 4 Mounting

Vacuum Unit

Selectable option for manifold (Refer to i on pages 11 and 12, and y on page 13.)